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Flow regulator damper element

  • US 5,163,920 A
  • Filed: 01/30/1991
  • Issued: 11/17/1992
  • Est. Priority Date: 01/30/1991
  • Status: Expired due to Fees
First Claim
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1. A device placed in a fluid flow to equalize pressure between an inlet and an outlet comprising:

  • a housing, said housing having a fluid inlet, a fluid outlet and a chamber therebetween;

    a unitary silicon damper beam in said chamber, said damper beam affixed to said housing and dividing said chamber into two regions, one of said regions defining a restrictive gap between said damper beam and said fluid outlet,wherein variations in pressure between said fluid inlet and said fluid outlet are compensated by deflection of said damper beam to vary the volume of said restrictive gap and thereby provide a compensated flow at said outlet.

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  • 3 Assignments
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