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High pressure capacitive transducer

  • US 5,165,281 A
  • Filed: 09/22/1989
  • Issued: 11/24/1992
  • Est. Priority Date: 09/22/1989
  • Status: Expired due to Fees
First Claim
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1. A capacitive pressure transducer comprising:

  • a substantially non-deflecting reference member of predetermined outline and having a planar reference surface;

    a diaphragm member adjacent the planar reference surface of the reference member in facing relation, the diaphragm member having two sides and including a rigid periphery secured to the reference member and a central deflection region interior to the periphery, a substantially flat surface adjacent and facing the reference member and defining a gap region therebetween, ad the diaphragm member including concavities on both sides defining a hinging portion about an interior deflection region of greater rigidity than the hinging portion, such that principal deformation in response to pressure occurs in the hinging portion, the concavity on the side adjacent the reference member being disposed about the interior deflection region and the concavity on the side opposite the reference member extending across the central deflection region;

    means for applying pressure to be sensed to the interior deflection region of the diaphragm member on the side opposite the reference member; and

    thin planar electrode means disposed on the opposing surfaces of the reference member and the diaphragm member in the gap region.

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