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High temperature transducers and methods of fabricating the same employing silicon carbide

  • US 5,165,283 A
  • Filed: 05/02/1991
  • Issued: 11/24/1992
  • Est. Priority Date: 05/02/1991
  • Status: Expired due to Term
First Claim
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1. A high temperature pressure transducer, comprising:

  • a diaphragm of a predetermined thickness fabricated from a first type of silicon carbide and at least one piezoresistive sensor of a second type of silicon carbide integrally formed on said diaphragm.

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