Resonant mechanical sensor

• US 5,165,289 A
• Filed: 07/10/1990
• Issued: 11/24/1992
• Est. Priority Date: 07/10/1990
• Status: Expired due to Fees

• Current Assignee: Johnson Controls Technology Company (Johnson Controls International plc)
• Original Assignee: Johnson Service Company
• Inventors: Tilmans, Hendrikus A. C.
• Primary Examiner(s): Eisenzopf, Reinhard J.
• Assistant Examiner(s): Shopbell, E.
• Application Number:
  US07/551,523
• Time in Patent Office: 868 Days
• Field of Search: 73/702, 73/704, 73/517 AV, 73/862.59, 73/DIG. 1
• US Class Current: 73/862.59
• CPC Class Codes: G01L 1/183 by measuring variations of frequency of vibrating piezo-resistive material
• CPC Class Codes: G01L 9/0042 Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms details about the integration or bonding of piezoresistor in or on the diaphragm G01L9/0052 and G01L9/0057 respectively
• CPC Class Codes: G01L 9/008 using piezoelectric devices piezoelectric resonators G01L9/0022; surface acoustic waves G01L9/0025
• CPC Class Codes: G01P 15/097 by vibratory elements

Abstract

The sensor according to the present invention provides a device for measuring the magnitude of an applied load as a shift in resonant frequency of a mechanical resonator caused by load-induced strains on the resonator. The sensor includes a substrate, generally constructed of a semiconductor material, e.g. silicon, a diaphragm substantially supported along its outer periphery by the substrate, a boss abutting a region of the diaphragm remote from the outer periphery of the diaphragm, at least one resonator in the form of a beam having one end integral to the diaphragm proximate the region of the boss and the other end integral to the diaphragm remote from the boss, a hermetic seal for enclosing the resonator, and an exciter/detector for measuring changes in the natural frequency of the resonator due to an applied load. Preferably, the sensor includes a differential resonator configuration in which the resonators are positioned rectilinearly with respect to each other and are covered by the same hermetic seal.

Claims

1. A resonant mechanical sensor, comprising:

a diaphragm substantially supported along the outer periphery thereof by a substrate, a boss member abutting a region of said diaphragm remote from said outer periphery, at least one resonator having one end integral with said diaphragm proximate to said region and another end integral with said diaphragm remote from said region, and means for detecting a change in the natural frequency of said resonator due to an applied load.

2. The sensor of claim 1, wherein said resonator is a beam clamped at both ends.

3. The sensor of claim 1, wherein said diaphragm has a substantially laminar construction comprising thin film layers.

5. The sensor of claim 3, wherein said sensor has two resonators in the form of beams, one of said beams having an end integral with said diaphragm proximate said region and the other of said beams having an end integral with said diaphragm proximate the outer periphery of said diaphragm.

6. The sensor of claim 3, wherein said means for detecting a change in the natural frequency comprises a piezoelectric material sandwiched between two electrodes.

7. The sensor of claim 6, wherein said piezoelectric material is zinc oxide.

4. A resonant mechanical sensor for detecting an applied load, comprising:

a substrate;

a diaphragm substantially supported along the outer periphery thereof by said substrate;

a boss member abutting a region of said diaphragm remote from said outer periphery;

at least one resonator having one end integral with said diaphragm proximate to said region and another end integral with said diaphragm remote from said region;

means for hermetically sealing and enclosing said resonator; and

means for detecting a change in the natural frequency of said resonator due to an applied load.

8. A resonant mechanical sensor for detecting an applied mechanical load, comprising:

a substrate;

a diaphragm substantially supported along the outer periphery thereof by said substrate;

a boss member abutting a region of said diaphragm remote from said outer periphery;

at least one resonator in the form of a beam having one end integral with said diaphragm proximate to said region and another end integral with said diaphragm remote from said region;

a first electrode disposed on said beam;

a piezoelectric layer encapsulated by an insulator disposed on said first electrode;

a second electrode disposed on said piezoelectric layer; and

a hermetic cap enclosing said beam.

9. The sensor of claim 8, wherein said sensor has two resonators in the form of beams, one of said beams having an end integral with said diaphragm proximate said region and the other of said beams having an end integral with said diaphragm proximate the outer periphery of said diaphragm.

10. A method for fabricating a resonant mechanical sensor, comprising the steps of:

forming a diaphragm substantially supported along its outer periphery by a substrate;

providing a boss abutting a region of said diaphragm substantially remote from said outer periphery; and

forming a resonator having one end integral to said diaphragm proximate to said region and another end integral to said diaphragm remote from said region.

11. The method of claim 10, wherein said step of forming a diaphragm includes providing successive layers of thin film on a first surface of said substrate.

12. The method of claim 10, wherein said step of forming a resonator includes sacrificial layer etching of said diaphragm.

13. The method of claim 10, further comprising the step of hermetically sealing and enclosing said resonator in a cap.

14. The method of claim 10, further comprising the step of providing means for detecting a change in the natural frequency of said resonator due to an applied load.

15. The method of claim 14, wherein said providing step comprises sandwiching a piezoelectric layer between two electrodes.