Method of growing compound semiconductor epitaxial layer by atomic layer epitaxy
First Claim
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1. A method of growing a compound semiconductor epitaxial layer, by an atomic layer epitaxy process, which comprises:
- A. providing a first surface of a first polarity on a substrate;
B. blowing a first source material gas, comprising a first compound containing at least a first of the elements of said compound semiconductor, including first ions having an ion polarity different from said first polarity, substantially perpendicularly onto said substrate surface in a substantially non-decomposed state;
C. adsorbing at least said first compound, onto said substrate surface;
D. decomposing, at a temperature of about 470°
to 560°
C. and a pressure of about 7 to 60 Torr., at least said adsorbed first compond, into atoms of at least said first element constituting crystals, at said substrate surface, so as to grow a substantially monatomic first layer having substantially the same ion polarity as the ions of said first source material gas comprising said first compound, while substantially preventing the adsorption of additional of said first compound after said first atomic layer has grown, whereby to produce a second surface of a different, second polarity than said first surface, over said first surface;
E. blowing a second source material gas, comprising a second compound containing at least a second of the elements of said compound semiconductor, including second ions having an ion polarity different from said second polarity, substantially perpendicularly onto said second surface in a substantially non-decomposed state;
F. adsorbing at least said second compound, onto said second surface;
G. decomposing, at a temperature of abourt 470°
to 560°
C. and a pressure of about 7 to 60 Torr., at least said adsorbed second compound, into atoms of at least said second element constituting crystals, at said second surface, so as to grow a substantially monatomic second layer having substantially the same ion polarity as the ions of said second source material gas comprising said second compound, while substantially preventing the adsorption of additional of said second compound after said second atomic layer has grown, whereby to produce a third surface of a different polarity than said second surface, over said second surface;
H. reacting at least said first and second elements to form a first layer of said compound semiconductor on said surface;
I. supplying hydrogen gas into operative relationship with the layer of Step H as it is being grown;
wherein at least one of said first and second compounds contains at least one methyl group; and
J. repeating steps A. through I. a number of times sufficient to grow said layer of said compound semiconductor of desired thickness.
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Abstract
A method of growing compound semiconductor epitaxial layer by an atomic layer epitaxy, comprises the steps of blowing on a predetermined surface a compound source material gas constituted by atoms having an ion polarity different from atoms constituting the predetermined surface so that the compound source material is adsorped on the predetermined surface in a non-decomposed state, and decomposing the adsorped compound source material on the predetermined surface into atoms constituting crystals at the predetermined surface so as to grow an atomic layer of atoms having the same ion polarity as the compound source material gas. The ion polarity of the atomic layer prevents adsorption of the compound source material after the atomic layer is grown.
167 Citations
20 Claims
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1. A method of growing a compound semiconductor epitaxial layer, by an atomic layer epitaxy process, which comprises:
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A. providing a first surface of a first polarity on a substrate; B. blowing a first source material gas, comprising a first compound containing at least a first of the elements of said compound semiconductor, including first ions having an ion polarity different from said first polarity, substantially perpendicularly onto said substrate surface in a substantially non-decomposed state; C. adsorbing at least said first compound, onto said substrate surface; D. decomposing, at a temperature of about 470°
to 560°
C. and a pressure of about 7 to 60 Torr., at least said adsorbed first compond, into atoms of at least said first element constituting crystals, at said substrate surface, so as to grow a substantially monatomic first layer having substantially the same ion polarity as the ions of said first source material gas comprising said first compound, while substantially preventing the adsorption of additional of said first compound after said first atomic layer has grown,whereby to produce a second surface of a different, second polarity than said first surface, over said first surface; E. blowing a second source material gas, comprising a second compound containing at least a second of the elements of said compound semiconductor, including second ions having an ion polarity different from said second polarity, substantially perpendicularly onto said second surface in a substantially non-decomposed state; F. adsorbing at least said second compound, onto said second surface; G. decomposing, at a temperature of abourt 470°
to 560°
C. and a pressure of about 7 to 60 Torr., at least said adsorbed second compound, into atoms of at least said second element constituting crystals, at said second surface, so as to grow a substantially monatomic second layer having substantially the same ion polarity as the ions of said second source material gas comprising said second compound, while substantially preventing the adsorption of additional of said second compound after said second atomic layer has grown,whereby to produce a third surface of a different polarity than said second surface, over said second surface; H. reacting at least said first and second elements to form a first layer of said compound semiconductor on said surface; I. supplying hydrogen gas into operative relationship with the layer of Step H as it is being grown; wherein at least one of said first and second compounds contains at least one methyl group; and J. repeating steps A. through I. a number of times sufficient to grow said layer of said compound semiconductor of desired thickness. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of growing a compound semiconductor epitaxial layer, by an atomic layer epitaxy process, which comprises:
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A. providing a first surface of a first polarity on a substrate; B. blowing a first source material gas, comprising a first compound containing at least a first of the elements of said compound semiconductor, including first ions having an ion polarity different from said first polarity, substantially perpendicularly onto said substrate surface in a substantially non-decomposed state; C. adsorbing at least said first compound, onto said substrate surface; D. decomposing, at least said adsorbed first compond, into atoms of at least said first element constituting crystals, at said substrate surface, so as to grow a substantially monatomic first layer having substantially the same ion polarity as the ions of said first source material gas comprising said first compound, while substantially preventing the adsorption of additional of said first compound after said first atomic layer has grown, whereby to produce a second surface of a different, second polarity than said first surface, over said first surface; E. blowing a second source material gas, comprising a second compound containing at least a second of the elements of said compound semiconductor, including second ions having an ion polarity different from said second polarity, substantially perpendicularly onto said second surface in a substantially non-decomposed state; F. adsorbing at least said second compound, onto said second surface; G. decomposing, at least said adsorbed second compound, into atoms of at least said second element constituting crystals, at said second surface, so as to grow a substantially monatomic second layer having substantially the same ion polarity as the ions of said second source material gas comprising said second compound, while substantially preventing the adsorption of additional of said second compound after said second atomic layer has grown, whereby to produce a third surface of a different polarity than said second surface, over said second surface; H. reacting at least said first and second elements to form a first layer of said compound semiconductor on said surface; I. supplying hydrogen gas into operative relationship with the layer of Step H as it is being grown; wherein at least one of said first and second compounds is an alkyl compound of said respsective element; J. repeating steps A. through I. a number of times sufficient to grow said layer of said compound semiconductor of desired thickness. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Current AssigneeFujitsu Microelectronics Limited (Fujitsu Limited)
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Original AssigneeFujitsu Limited
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InventorsMochizuki, Kouji, Ozeki, Masashi, Ohtsuka, Nobuyuki
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Primary Examiner(s)Chaudhuri, Olik
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Assistant Examiner(s)Fourson, G.
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Application NumberUS07/608,602Time in Patent Office756 DaysField of Search437/81, 437/86, 437/87, 437/105, 437/107, 437/108, 437/112US Class Current117/102CPC Class CodesH01L 21/02543 PhosphidesH01L 21/02546 ArsenidesH01L 21/0262 Reduction or decomposition ...
