Light beam scanning apparatus
First Claim
Patent Images
1. A light beam scanner comprising:
- a light beam generating means for generating a light beam;
a first scanning means for guiding the light beam in a first scanning direction;
a second scanning means composed of a deflection prism for guiding the light beam in a second scanning direction that is different from the first scanning direction, said deflection prism having an incident surface, an outgoing surface, and a light reflection surface provided between said incident surface and said outgoing surface; and
an object lens means,all of these means having a common optical axis.
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Abstract
A light beam scanner comprises a light beam generating unit for generating a light beam, a first scanning unit for guiding the light beam in a first scanning direction, a second scanning unit composed of a deflection prism for guiding the light beam in a second scanning direction that is different from the first scanning direction, and an object lens. The second scanning unit is movable in an optical direction in parallel with an optical axis or turnable around the optical axis, so that the light beam entering the second scanning unit may be deflected in any direction when exiting from the second scanning unit.
26 Citations
18 Claims
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1. A light beam scanner comprising:
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a light beam generating means for generating a light beam; a first scanning means for guiding the light beam in a first scanning direction; a second scanning means composed of a deflection prism for guiding the light beam in a second scanning direction that is different from the first scanning direction, said deflection prism having an incident surface, an outgoing surface, and a light reflection surface provided between said incident surface and said outgoing surface; and an object lens means, all of these means having a common optical axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A deflection prism employed by a light beam scanner, comprising an incident surface and an outgoing surface that are orthogonal to the optical axis of a light beam, and at least three reflection points disposed between the incident and outgoing surfaces to reflect the light beam, and constituted such that the optical axis of a light beam entering the deflection prism is in parallel with the optical axis of a light beam exiting the deflection prism, said deflection prism further comprising an equilateral triangle prism and a rectangular prism having an apex angle of 30 degrees associated with said equilateral triangle prism.
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12. A light beam scanner comprising:
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a first scanning means for guiding a light beam in a first axial direction on a plane that is orthogonal to a common optical axis; a second scanning means composed of a deflection prism for guiding the light beam in a second axial direction, the deflection prism having an incident surface, an outgoing surface, and a reflection surface formed between the incident and outgoing surfaces, the first and second scanning means forming a scanning optical system; a first scan controlling portion for controlling a scanning operation of the first scanning means; a moving means for moving the second scanning means in the second axial direction; and a controlling means for controlling movements of the second scanning means, all of means belonging to an optical system including at least said first and second scanning means having the common optical axis and being arranged in an optical path extending between a laser source and an object lens, the moving means moving the second scanning means to shift the light beam which is guided in the first axial direction and enters the incident surface of the second scanning means, in the second axial direction, thereby two-dimensionally scanning an object with the light beam.
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13. A light beam scanner comprising:
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a first scanning means for guiding a light beam in a first axial direction on a plane that is orthogonal to a common optical axis; a second scanning means composed of a deflection prism for guiding the light beam in a second axial direction, the deflection prism having an incident surface, between the incident and outgoing surfaces, the first and second scanning means forming a scanning optical system; a first scan controlling portion for controlling a scanning operation of the first scanning means; a turning means for turning the second scanning means around the common optical axis; and a controlling means for controlling the turn of the second scanning means, all of means belonging to an optical system including at least said first and second scanning means having the common optical axis and being arranged in an optical path extending between a laser source and an object lens, the turning means turning the second scanning means to change the light beam which is guided in the first axial direction and enters the incident surface of the second scanning means, in an optional scanning direction, thereby two-dimensionally scanning an object with the light beam.
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14. A light beam scanner comprising:
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a first scanning means for guiding a light beam in a first axial direction on a plane X-Y that is orthogonal to a common optical axis; a second scanning means composed of a deflection prism for guiding the light beam in a second axial direction, the deflection prism having an incident surface, an outgoing surface, and a reflection surface disposed between the incident and outgoing surfaces, the first and second scanning means forming a scanning optical system; a first controlling means for controlling the first scanning means; a moving means for moving the second scanning means in the second axial direction to move the reflection surface in the second axial direction; a turn controlling means for turning the second scanning means around a center axis, all of means belonging to an optical system including at least said first and second scanning means having the common optical axis and being disposed in an optical path extending between a laser source and an object lens, the turn controlling means turning the reflection surface of the second scanning means, the light beam guided in the first axial direction being made incident to the incident surface of the second scanning means, and at the same time the moving means moving the reflection surface in the second axial direction, thereby two-dimensionally scanning an object with the light beam. - View Dependent Claims (15)
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16. A light beam scanner comprising:
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a first scanning means composed of first and second scanning elements having different scanning ranges and scan resolutions; a second scanning means made of a deflection prism having an incident surface, an outgoing surface, and a reflection surface formed between the incident and outgoing surfaces; a scan controlling means for driving the first and second scanning elements; and a turn/shift controlling means for turning the second scanning means or shifting the second scanning means in parallel with a common optical axis, all of means belonging to an optical system including at least said first and second scanning means having the common optical axis and being arranged in an optical path extending between a laser source and an object lens, the scan controlling means controlling the first scanning element to scan a first region on the incident surface of the second scanning means, and controlling the second scanning element to scan a second region which is a part of the first region on the incident surface of the second scanning means, the turn/shift controlling means turning the reflection surface of the second scanning means in a plane that is vertical to the common optical axis, or shifting the reflection surface, thereby changing the scanning direction of the light beam that has passed through the first and second scanning elements and entered the incident surface of the second scanning means, and letting the light beam exit from the outgoing surface of the second scanning means. - View Dependent Claims (17, 18)
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Specification