Intelligent system for processing and storing articles

• US 5,166,884 A
• Filed: 11/25/1991
• Issued: 11/24/1992
• Est. Priority Date: 12/24/1984
• Status: Expired due to Term

• Current Assignee: Asyst Technologies Incorporated (Azenta, Inc.)
• Original Assignee: Asyst Technologies Incorporated (Azenta, Inc.)
• Inventors: Bonora, Anthony C., Brain, Michael D., Parikh, Mihir, Maney, George A.
• Primary Examiner(s): RUGGIERO, JOSEPH F
• Application Number:
  US07/797,714
• Time in Patent Office: 365 Days
• Field of Search: 364/468, 364/478, 364/424.01, 364/424.02, 235/375, 235/376, 235/492, 414/331, 414/273, 414/274, 414/403, 414/410, 414/416, 414/417, 414/217, 340/825.3, 340/825.31, 104/88, 198/341, 198/349, 198/349.5, 198/349.95, 198/356, 198/358
• US Class Current: 700/113
• CPC Class Codes: G03F 7/70541 Tagging, i.e. hardware or software tagging of features or components, e.g. using tagging scripts or tagging identifier codes for identification of chips, shots or wafers
• CPC Class Codes: G03F 7/7075 Handling workpieces outside exposure position, e.g. SMIF box
• CPC Class Codes: G03F 7/70991 Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum
• CPC Class Codes: H01L 21/67294 using identification means, e.g. labels on substrates or labels on containers

Abstract

A system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memory to an information processor associated with a processing station which processes the articles in a carrier. In a preferred embodiment, the system includes data processing capability and both receives data from and transmits data to the processing station.

Claims

1. A system for performing a series of processing steps for a group of articles, comprising:

a transportable container for the group of articles, said transportable container including;

first interface means for controlling access to the group of articles in said transportable container, and

data handling means for receiving, storing and transmitting data relating to the identity and processing history of each article in the group of articles;

a plurality of workstations, each said workstation including;

second interface means for interfacing with said first interface means;

communication means for receiving data from and transmitting data to said data handling means, for processing the data received from said data handling means, and for controlling said first and second interface means to permit access to the article in said transportable container based on a comparison of the processing history of the article and the identity of the workstation; and

processing means for processing selected ones of the articles in the group of articles in response to the comparison of the processing history of each of the articles in the group of articles and the identity of the workstation.

2. A system according to claim 1, wherein each said communication means is for transmitting processing history data to said data handling means.

3. A semiconductor wafer processing system, comprising:

a transportable SMIF pod for transporting and storing a plurality of semiconductor wafers, comprising;

a door for preventing unauthorized access to articles stored in said SMIF pod, and

means for storing data related to the wafers stored in said SMIF pod, for transmitting said data, and for receiving data related to each of the plurality of semiconductor wafers stored in said SMIF pod; and

a plurality of workstations, each workstation comprising;

an interface station for receiving said SMIF pod and operating said door of said SMIF pod,

a processing station,

means for processing semiconductor wafers,

transfer means for transferring semiconductor wafers between said interface station and said processing station, and

data processing means for storing workstation identification information, for receiving data from and transmitting data to said SMIF pod for comparing data received from said SMIF pod and said workstation idenitification information, and for controlling said interface station and for controlling said means for processing to process selected ones of the plurality of semiconductor wafers in response to said comparison of said data received from said SMIF pod and said workstation identification information.