Filtering and dispensing system with independently activated pumps in series

• US 5,167,837 A
• Filed: 03/28/1989
• Issued: 12/01/1992
• Est. Priority Date: 03/28/1989
• Status: Expired due to Term

• Current Assignee: Entegris Incorporated
• Original Assignee: FAS Technologies Ltd.
• Inventors: Farney, Michael K., Gibson, Gregory M., Snodgrass, Ocie T.
• Primary Examiner(s): Dawson, Robert A.
• Assistant Examiner(s): DRODGE, JOSEPH W
• Application Number:
  US07/329,525
• Time in Patent Office: 1,344 Days
• Field of Search: 210/102, 210/141, 210/142, 210/416.1, 210/416.4, 210/416.5, 210/418, 210/420, 210/424, 210/741, 210/767, 210/134, 210/258, 210/143, 210/138, 210/90, 210/321.65, 417/7, 417/244, 417/246, 417/253, 417/395, 417/401, 417/472, 417/473, 417/2, 417/426, 417/428, 417/540, 417/541, 417/216, 417/542, 417/543, 222/189, 222/255, 222/344, 364/502, 364/496
• US Class Current: 210/767
• CPC Class Codes: B01D 29/15 arranged for inward flow filtration
• CPC Class Codes: B01D 29/46 of flat, stacked bodies
• CPC Class Codes: B01D 35/26 Filters with built-in pumps filters provided with a pump mounted in or on the casing aquarium pumps or filters A01K63/04
• CPC Class Codes: F04B 15/02 the fluids being viscous or non-homogeneous
• CPC Class Codes: F04B 43/067 the fluid being actuated directly by a piston
• CPC Class Codes: F04B 7/0076 the members being actuated by electro-magnetic means
• CPC Class Codes: F04B 9/02 the means being mechanical
• CPC Class Codes: F04B 9/1095 having two or more pumping chambers in series
• CPC Class Codes: Y10S 210/90 Ultra pure water, e.g. conductivity water
• CPC Class Codes: Y10T 428/1234 Honeycomb, or with grain orientation or elongated elements in defined angular relationship in respective components [e.g., parallel, inter- secting, etc.]

Abstract

A fluid dispensing system is provided which has first diaphragm pump means, a filter connected to receive the discharge of the first pump, and second diaphragm pump means connected to the receive the discharge of said filter. Hydraulic fluids pumped by cylinder/piston/stepper assemblies independently actuate each of the diaphragm pumps, providing accurate, controllable and repeatable dispense of the subject fluid. In addition, pressure sensing means are provided to indicate the pressure of the actuating hydraulic fluids, and computer controller means may be utilized to monitor, adjust and control the rates and intervals of filtering and dispense of the system in response to said pressure sensing means or otherwise.

Claims

1. In a device for filtering and dispensing fluid in a precisely controlled manner, the combination of:

first pumping means;

second pumping means in fluid communication with said first pumping means; and

filtering means between said first and second pumping means, whereby said first pumping means pumps the fluid through said filtering means to said second pumping means;

in which each of said first and second pumping means includes surfaces that contact the fluid, said surfaces being of materials that are non-contaminating to industrial fluids which are viscous and/or high purity and/or sensitive to molecular shear; and

comprising means to enable said second pumping means to collect and/or dispense the fluid, or both, at rate or during periods of operation, or both which are independent of rates or periods of operation, or both, respectively, of said first pumping means.

2. The device of claim 1 wherein said first pumping means and said second pumping means are both non-contaminating and suitable for handling high-purity fluids.

4. The device of claim 1 in which said fist pumping means includes first incremental pump advancement means, and said second pumping means includes second incremental pump advancement means, whereby said first and second incremental pump advancement means operate their respective pumps at finite, controllable rates and intervals independently of each other.

8. The device of claim 4 or claim 5 or claim 6 or claim 7, including valve means associated with said first pumping means and said filtering means, whereby said valve means is actuated to selectively permit said fluid to flow to said first pumping means or from said first pumping means to said filtering means, further including computer controller means adapted to activate, monitor, or both, said first pumping means, said second pumping means, said first and second incremental pump advancement means, and said valve means.

19. The device of claim 1 or claim 2 or claim 3 or claim 4 or claim 5 or claim 6 or claim 7 or claim 18, including valve means associated with said first pumping means and said filtering means, whereby said valve means is actuated to selectively permit said fluid to flow to said first pumping means or from said first pumping means to said filtering means.

20. The device of claim 19, further including computer controller means adapted to activate, monitor, or both, said first pumping means, said second pumping means, and said valve means.

3. In a device for filtering and dispensing fluid, the combination of:

first pumping means;

second pumping means in fluid communication with said first pumping means; and

filtering means between said first and second pumping means, whereby said first pumping means pumps the fluid through said filtering means to said second pumping means;

in which each of said first and second pumping means includes surfaces that contact the fluid, said surfaces being of materials that are non-contaminating to industrial fluids which are viscous and/or high purity and/or sensitive to molecular shear; and

comprising means to enable said second pumping means to collect and/or dispense the fluid, or both, at rates or during periods of operation, or both, which are independent of rates or periods of operation, or both, respectively, of said first pumping means.

5. In a device for filtering and dispensing fluid, the combination of:

first pumping means;

second pumping means in fluid communication with said first pumping means; and

filtering means between said first and second pumping means, whereby said first pumping means pumps the fluid through said filtering means to said second pumping means;

in which each of said first and second pumping means includes surfaces that contact the fluid, said surfaces being of materials that are non-contaminating to industrial fluids which are viscous and/or high purity and/or sensitive to molecular shear; and

comprising means to enable said second pumping means to collect and/or dispense the fluid, or both, at rates or during periods of operation, or both, which are independent of rates or periods of operation, or both, respectively, of said first pumping means, in which said first pumping means includes first incremental pump advancement means, and said second pumping means includes second incremental pump advancement means, whereby said first and second incremental pump advancement means operate their respective pumps at finite, controllable rates and intervals independently of each other, in which said first pumping means and said second pumping means include diaphragm-type pumps, and in which said first and second incremental pump advancement means comprise hydraulic stepper assemblies incorporating relatively incompressible fluid, said relatively incompressible fluid being in fluid communication with the respective said diaphragm-type pumps and causing movement of said diaphragm-type pumps in response to movement of their respective incremental pump advancement means.

6. The device of claim 5 including first pressure sensing means to monitor the pressure of the hydraulic fluid in said first diaphragm-type pump.

7. The device of claim 6 including second pressure sensing means to monitor the pressure of the hydraulic fluid in said second diaphragm-type pump.

9. In a device for filtering and dispensing fluid, the combination of:

first pumping means;

second pumping means in fluid communication with said first pumping means; and

filtering means between said first and second pumping means, whereby said first pumping means pumps the fluid through said filtering means to said second pumping means, in which each of said first and second pumping means includes surfaces that contact the fluid, said surfaces being of materials that are non-contaminating to industrial fluids which are viscous and/or high purity and/or sensitive to molecular shear;

said device further including valve means intermediate said first pumping means and said filtering means to direct the fluid selectively to said first pumping means or from said first pumping means and to said filter means; and

comprising means to enable said second pumping means to collect and/or dispense the fluid, or both, at rates or during periods of operation, or both, which are independent of rates or periods of operation, or both, respectively, of said first pumping means;

said first pumping means including first incremental pump advancement means, and said second pumping means including second incremental pump advancement means, whereby said first and second incremental pump advancement means may operate their respective pumps at finite, controllable rates and intervals independently of each other;

said first pumping means and said second pumping means further including diaphragm-type pumps, and said first and second incremental pump advancement means further comprising hydraulic stepper assemblies incorporating relatively incompressible fluid, said relatively incompressible fluid being in fluid communication with the respective said diaphragm-type pumps and causing movement of said diaphragm-type pumps in response to movement of their respective incremental pump advancement means;

said device further including pressure sensing means to monitor the pressure of the hydraulic fluid in said first diaphragm-type pump;

said device further including a computer controller to activate, monitor, or both, said first pumping means, said second pumping means, and said valve means, said computer controller being further adapted to receive input from said pressure sensing means and cause said activation in response thereto.

10. A method for filtering and dispensing industrial fluids which are viscous and/or high purity and/or shear sensitive, comprising the steps of:

pumping the fluid through filtering means by first pumping means to second pumping means;

accumulating the fluid in second pumping means at rates or during periods of operation, or both, of the rates or periods of operation, or both, respectively, independent of said first pumping means; and

dispensing the fluid by operating said second pumping means.

11. The method of claim 10 wherein said accumulating step is achieved by operating said second pumping means on an intake stroke at the same rate at which said first pumping means is pumping said fluid through said filter, so that the fluid which has been filtered is accumulated in said second pumping means without being dispensed from said second pumping means.

12. The method of claim 10 wherein said accumulating step includes operating said second pumping means to draw said filtered fluid at a rate slightly greater than the rate at which said filtered fluid is being pumped by said first pumping means, such that there is a slight drawback of said fluid from a dispensing means of said second pumping means.

13. The method of claim 10 additionally including the step of controlling the operation of said first and second pumping means such that said fluid may be dispensed from said second pumping means at a rate and intervals independently of the rate and intervals at which said fluid is filtered.

14. The method of claim 10 or claim 11 or claim 12 or claim 13 wherein said pumping, accumulating and dispensing steps are achieved and controlled in said first pumping means by first motor means, and in said second pumping means by second motor means, each motor means providing finite, controllable, and independent operation of its respective pumping means.

15. In a device for filtering and dispensing fluid, the combination of:

first pumping means;

second pumping means in fluid communication with said first pumping means;

said second pumping means including accumulating means for selectively accumulating the fluid, and filtering means between said first and second pumping means, whereby said first pumping means pumps said fluid through said filtering means to said second pumping means, and further in which said second pumping means is operable at a rate and at intervals independent of the rate and intervals at which said first pumping means is operated.

16. In a device for filtering and dispensing high-purity and/or viscous and/or shear-sensitive fluid, the combination of:

a first diaphragm-type pump;

filtering means connected to receive the fluid from said first diaphragm-type pump; and

a second diaphragm-type pump connected to receive the fluid from said filtering means, in which each of said first and second diaphragm-type pumps includes surfaces that contact the fluid, said surfaces being of materials that are non-contaminating to industrial fluids which are viscous and/or high purity and/or sensitive to molecular shear; and

comprising means to enable said second diaphragm-type pump to collect and/or dispense the fluid, or both, at rates or during periods of operation, or both, which are independent of rates or periods of operation, or both, respectively, of said first diaphragm-type pump.

17. In a device for filtering and dispensing fluid:

a reservoir;

valve means in fluid communication with said reservoir;

first pumping means in fluid communication with said valve means;

filter means in fluid communication with said valve means; and

second pumping means in fluid communication with said filter means, the device being constructed and arranged such that fluid is drawn from said reservoir by said first pumping means and through said valve means into said first pumping means, and is then pumped from said first pumping means through said valve means and through said filter means to said second pumping means, and said fluid can selectively be accumulated or dispensed, or both simultaneously, by said second pumping means.

18. In a device for filtering and dispensing fluid, the combination of:

first pumping means;

second pumping means in fluid communication with said first pumping means; and

filtering means between said first and second pumping means, whereby said first pumping means pumps the fluid through said filtering means to said second pumping means;

in which each of said first and second pumping means includes surfaces that contact the fluid, said surfaces being of materials that are non-contaminating to industrial fluids which are viscous and/or high purity and/or sensitive to molecular shear; and

comprising means to enable said second pumping means to collect and/or dispense the fluid, or both, at rates or during periods of operation, or both, which are independent of rates or periods of operation, or both, respectively, of said first pumping means, wherein said second pumping means includes a diaphragm-type pump.