Capacitor and pressure transducer
First Claim
1. A dual capacitor device for utilizing dependent capacitances for measurement purposes comprising:
- an upper capacitor base member and a lower capacitance base member arranged with parallel capacitor surfaces in horizontal planes where said parallel capacitor surfaces are located on opposite sides relative to a vertical central axis and said capacitance surfaces define first and second capacitors;
said lower capacitor base member having a centrally located section connected to an outer section of said lower capacitor base member by torsion beam means, said centrally located section being attached to said upper capacitor base member by a vertical arm member;
said torsion beam means having a displacement axis normal to said central axis so that angular displacement of said torsion beam means and said centrally located section about said displacement axis produces a capacitance change in said first and second capacitors;
force means coupled to said centrally located section for producing a torsion force on said torsion beam means for developing angular displacement of said centrally located section and a capacitance change as a function of said torsion force.
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Accused Products
Abstract
A dual capacitor device for utilizing dependent capacitances for measurement purposes where an upper capacitor base member and a lower capacitance base member are arranged with parallel capacitor surfaces in horizontal planes and where the parallel capacitor surfaces are located on opposite sides relative to a vertical axis to define first and second capacitors. The lower capacitor base member has a centrally located section connected to an outer section of the lower capacitor base member by a torsion beam and the centrally located section is attached to the upper capacitor base member by a vertical arm member. The torsion beam means has a displacement axis normal to the central axis so that angular displacement of the torsion beam and the centrally located section about the displacement axis produces a capacitance change in the first and second capacitors. A force moment applied to the centrally located section by a spirally wound bourdon tube in response to pressure develops a low force on the torsion beam which is less than the micro yield point of the torsion beam material and develops a micro dimensional angular displacement of the centrally located section and a capacitance change as a function of the force to measure high pressures with small deflections of the capacitor. The structure is arranged to compensate for changing temperature.
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Citations
33 Claims
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1. A dual capacitor device for utilizing dependent capacitances for measurement purposes comprising:
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an upper capacitor base member and a lower capacitance base member arranged with parallel capacitor surfaces in horizontal planes where said parallel capacitor surfaces are located on opposite sides relative to a vertical central axis and said capacitance surfaces define first and second capacitors; said lower capacitor base member having a centrally located section connected to an outer section of said lower capacitor base member by torsion beam means, said centrally located section being attached to said upper capacitor base member by a vertical arm member; said torsion beam means having a displacement axis normal to said central axis so that angular displacement of said torsion beam means and said centrally located section about said displacement axis produces a capacitance change in said first and second capacitors; force means coupled to said centrally located section for producing a torsion force on said torsion beam means for developing angular displacement of said centrally located section and a capacitance change as a function of said torsion force. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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27. A method of measuring capacitance in a dual capacitor device utilizing dependent capacitances for measurement purposes and wherein the capacitor device has an upper capacitor base member and a lower capacitance base member arranged with parallel capacitor surfaces in horizontal planes where said parallel capacitor surfaces are located on opposite sides relative to a vertical central axis and said capacitance surfaces define first and second capacitors having first and second capacitance gaps comprising the steps of:
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torquing said upper capacitor base member about a horizontal displacement axis located in a torsion beam means disposed normal to said central axis and in a horizontal plane in said lower base member by applying a moment force about said displacement axis so that angular displacement of said upper base member about said displacement axis produces a dependent change in said capacitance gaps of said first and second capacitors; and maintaining the force and the force moment below the yield point of the torsion beam means to minimize permanent distortion in said torsion beam means. - View Dependent Claims (28, 29)
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30. A method of measuring capacitance in a dual capacitor device utilizing dependent capacitances for measurement purposes and wherein the capacitor device has an upper capacitor base member and a lower capacitance base member arranged with parallel capacitor surfaces in horizontal planes where said parallel capacitor surfaces are located on opposite sides relative to a vertical central axis and said capacitance surfaces define first and second capacitors having first and second capacitance gaps and wherein the lower capacitance base member has torsion beam means disposed along a horizontal displacement axis with the torsion beam means coupled to a vertical moment arm on the upper capacitor base member comprising the steps of:
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torquing said upper capacitor base member about said horizontal displacement axis located in a torsion beam means by applying a force to said moment arm for developing a moment force about said displacement axis and develop an angular displacement of said upper base member about said displacement axis for producing a dependent change in said capacitance gaps of said first and second capacitors., and maintaining the force below the yield point of the torsion beam means to minimize permanent distortion in said torsion beam means. - View Dependent Claims (31, 32, 33)
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Specification