Scintillating articles and method of making the same

• US 5,168,540 A
• Filed: 04/26/1991
• Issued: 12/01/1992
• Est. Priority Date: 09/12/1990
• Status: Expired due to Fees

• Current Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Original Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Inventors: Kirlin, Peter R., Winn, David R.
• Primary Examiner(s): Lee, John D.
• Application Number:
  US07/692,138
• Time in Patent Office: 585 Days
• Field of Search: 350/96.29-96.34, 385/123-130, 385/141, 385/142, 385/144, 427/64-73
• US Class Current: 385/128
• CPC Class Codes: C23C 16/18 from metallo-organic compounds
• CPC Class Codes: C23C 16/45561 Gas plumbing upstream of the reaction chamber
• CPC Class Codes: G01T 1/201 using scintillating fibres
• CPC Class Codes: G02B 6/02 Optical fibres with cladding with or without a coating
• CPC Class Codes: G02B 6/03622 having 2 layers only
• CPC Class Codes: G02B 6/03694 Multiple layers differing in properties other than the refractive index, e.g. attenuation, diffusion, stress properties
• CPC Class Codes: H10N 60/0464 by metalloorganic chemical vapour deposition [MOCVD]

Abstract

A scintillating article comprising a substrate coated with an inorganic scintillating material comprising a doped or undoped material selected from the group consissting of barium fluoride, calcium fluoride, zinc oxide, zinc sulfide, zinc silicate, bismuth germanate, fast cathode ray tube phosphors, yttrium silicate, rare earth silicates, orthosilicates, and mixtures thereof. Also disclosed is an appertaining method of forming such a scintillating article, comprising depositing the inorganic scintillating material by chemical vapor deposition (CVD). In a particularly advantageous embodiment, the substrate is of fibrous form, e.g., a quartz optical quality fiber, which is coated with a scintillating material such as barium fluoride. The scintillating articles of the invention are usefully employed as detectors for ionizing particles in high energy physics applications, such as radiation track imaging and tracking chambers, calorimetry, synchrotron radiation electron detectors, and pixel detectors for active targets, as well as detector elements and high energy particle accelerators and other high rate systems.

Claims

1. A scintillating article, comprising a substrate having coated thereon a thin film consisting essentially of a doped or undoped inorganic scintillating material selected from the group consisting of zinc silicate, yttrium silicate, rate earth silices, orthosilacates, and mixtures thereof, said inorganic scintillating material thin film (i) having a thickness of less than 100 micrometers and (ii) being devoid of any metal film coated thereon.

2. An article according to claim 1, wherein the substrate comprises a material selected form the group consisting of silica, silicon, zinc selenide, spinel, aluminum oxy nitride, gallium arsenide, gallium aluminum arsenide, germanium, sapphire, and silicate glass.

3. A article according to claim 1, wherein the inorganic scintillating material thin film is an epitaxial film of substantially single crystal character.

4. An article according to claim 1, wherein the substrate comprises a silicate glass optical fiber.

5. An article according to claim 1, wherein the inorganic scintillating material is doped with a metal dopant.

6. An article according to claim 5, wherein the metal dopant is selected from the group consisting of europium, gallium, silver, and mixtures thereof.

7. An article according to claim 1, wherein the substrate comprises an optical quality fiber.

8. An article according to claim 1, wherein the inorganic scintillating material is coated on the substrate at a thickness of from about 0.05 up to 100 μ

m.

9. A scintillating article comprising a substrate having coated thereon a thin film consisting essentially of an inorganic scintillating material selected from the group consisting of barium fluoride, calcium fluoride, zinc oxide, zine sulfide, zinc silicate, bismuth emanate, fast cathode ray tube phosphors, yttrium silicate, rare earth silicates, orthosilicates, and mixtures thereof, said inorganic scintillating material thin film being doped with a metal dopant.

10. An article according o claim 9, wherein the inorganic scintillating material is barium fluoride.

11. An article according to claim 9, wherein the metal dopant is selected from the group consisting of europium, gallium, silver, and mixtures thereof.

12. An article according to claim 9, wherein the inorganic scintillating material is coated on the substrate at a thickness of from about 0.05 to about 100 μ

m.

13. An article according to claim 9, wherein the inorganic scintillating material has a thickness below 1.0 micrometer.

14. An article according to claim 9 wherein the substrate is formed of optical quality glass.

15. A method for forming on a substrate a scintillating layer consisting essentially of a doped or undoped inorganic scintillator material selected from the group consisting of barium fluoride, calcium fluoride, zinc oxide, zinc sulfide, zinc silicate, bismuth germanate, yttrium silicate, rare earth silicates, orthosilicates, and mixtures thereof, including the steps of depositing the inorganic scintillator material by chemical vapor deposition and doping he inorganic scintillator material with a metal dopant.

16. A method according to claim 15, wherein the scintillating layer has a thickness of from about 0.05 to about 100 μ

m.

17. A method according to claim 15, wherein the substrate comprises a fiber element.

18. A method according to claim 15, wherein he inorganic scintillator material comprises barium fluoride.

19. A method according to claim 15, wherein the substrate comprises an optical quality glass fiber.

20. A method according to claim 15, wherein the metal dopant is selected form the group consisting of europium, gallium, silver, and mixtures thereof.