Method of making a multi-layer silicon structure

• US 5,169,472 A
• Filed: 03/14/1991
• Issued: 12/08/1992
• Est. Priority Date: 03/21/1990
• Status: Expired due to Fees

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Goebel, Herbert
• Primary Examiner(s): AFTERGUT, JEFFRY H
• Application Number:
  US07/669,683
• Time in Patent Office: 635 Days
• Field of Search: 156/153, 156/281, 156/87, 156/306.3, 357/26, 51/283 R, 148/DIG. 12, 148/DIG. 159, 148/DIG. 135, 437/225, 437/901, 437/974, 437/74
• US Class Current: 156/281
• CPC Class Codes: G01L 9/0042 Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms details about the integration or bonding of piezoresistor in or on the diaphragm G01L9/0052 and G01L9/0057 respectively
• CPC Class Codes: H01L 21/187 by direct bonding
• CPC Class Codes: Y10S 148/012 Bonding, e.g. electrostatic for strain gauges
• CPC Class Codes: Y10S 148/135 Removal of substrate
• CPC Class Codes: Y10S 148/159 Strain gauges

Abstract

Multi-layer silicon structures particularly micromechanical sensors, can be made by cleaning and polishing respective surfaces of two silicon wafers, assembling the wafers together under clean room conditions and adhering them together by temperature treatment. This method is improved by the pretreatment of the wafer surfaces using fuming nitric acid (e.g., 100% HNO₃), rinsing with de-ionized water, drying, and temperature treatment at a lower temperature than was previously thought necessary, namely between 100° and 400° C. This has the advantage that such gentler treatment preserves previously-applied integrated circuit structures, which can therefore be applied before the wafer assembly steps. The method is particularly suitable for producing pressure sensors having a pressure-responsive silicon membrane, and an evaluation circuit integrated on the silicon wafer. Such sensors are suitable for use in motor vehicles for measuring engine pressures and for measuring brake fluid pressures in anti-lock braking systems (ABS).

Claims

1. A method for making a multi-layer silicon structure comprising the steps of

polishing and cleaning surfaces of silicon wafers, one of said wafers having aluminum electric conductor tracks on a surface thereof,

dipping said wafers in a solution consisting essentially of fuming nitric acid having a temperature of from about 15°

C. to 30°

C., said dipping not destroying the aluminum conductor tracks, then rinsing said wafers with de-ionized water and drying the wafers;

assembling the thus polished surfaces of the wafers together in a substantially particle-free atmosphere, and

subjecting the assembled wafers to a heating treatment to form a secure silicon-to-silicon bond, said heating treatment being carried out at a temperature between about 100°

C. and about 400°

C.

2. The method of claim 1 wherein said dipping is conducted in 100% nitric acid.

3. The method according to claim 1, wherein said heating treatment is carried out between about 170°

C. and about 400°

C.

4. The method according to claim 2, wherein

at the time of said dipping, said wafers have not yet been subjected to micromechanical structuring steps, and

said dipping step comprises immersion in fuming nitric acid for at least about 10 minutes.

5. The method according to claim 2, wherein

at the time of said dipping, said wafers have already been subjected to micromechanical structuring steps, and

said dipping step comprises immersion in fuming nitric acid for up to about 4 hours.

6. The method according to claim 1, further comprising carrying out said heating treatment step in an atmosphere consisting essentially of a gas selected from the group consisting of nitrogen gas and forming gas.

7. The method according to claim 1, further comprising prior to said heating treatment, forming a micromechanical structural element in at least one of said wafers.

8. The method according to claim 3, further comprising prior to said heating treatment, forming a micromechanical structural element in at least one of said wafers.

9. The method according to claim 5, further comprising prior to said heating treatment, forming a micromechanical structural element in at least one of said wafers.

10. The method according to claim 6, further comprising prior to said heating treatment, forming a micromechanical structural element in at least one of said wafers.

11. The method according to claim 1, wherein said heating treatment is carried out between 170°

C. and 400°

C.;

said fuming nitric acid is 100% nitric acid and said dipping is conducted for 10 minutes to 4 hours.

12. The method according to claim 11, further comprising carrying out said heating treatment step in an atmosphere of nitrogen gas or a gas comprising hydrogen and nitrogen.

13. The method according to claim 12, further comprising forming a micromechanical structural element in at least one of said wafers prior to said heating treatment.