Precision linear measuring suspension system having sliding contact between the scale and the pick-off

• US 5,172,485 A
• Filed: 10/17/1991
• Issued: 12/22/1992
• Est. Priority Date: 10/17/1991
• Status: Expired due to Term

• Current Assignee: Mitutoyo Corporation
• Original Assignee: Mitutoyo Corporation
• Inventors: Atherton, Kim W., Gerhard, Gregory J.
• Primary Examiner(s): HAROIAN, HARRY
• Application Number:
  US07/778,002
• Time in Patent Office: 432 Days
• Field of Search: 33/558, 33/561, 33/706, 33/707, 33/708, 33/501.6, 33/784, 324/662, 324/690
• US Class Current: 33/706
• CPC Class Codes: G01B 3/002 Details
• CPC Class Codes: G01B 7/003 for measuring position, not involving coordinate determination coordinate measuring G01B7/004
• CPC Class Codes: G01D 5/2415 adapted for encoders

Abstract

In a capacitive-type linear displacement measuring device, a pick-off body is resiliently biased into sliding contact with a scale. The pick-off body is supported by a flat spring and resiliently biased towards the scale by a leaf spring. The front surface of the scale slides in abutting contact with the front surface of the pick-off body. The flat spring restrains non-axial movement of the pick-off body but permits movement normal to the axial movement so that the pick-off body accurately tracks and remains in abutting contact with the scale as it slides in an axial direction. Changes in capacitance caused by axial displacement of the scale are accurately sensed and changes in capacitance caused by non-axial motion are avoided. According to an alternative embodiment, the pick-off body and scale are positioned with their sliding surfaces aligned with the axis of the support member to reduce the moment arm for any friction forces to zero, further reducing the likelihood of inaccurately sensing the axial movement of the scale.

Claims

1. A linear measuring apparatus comprising:

a housing;

a scale slidably mounted within said housing so that said scale can move in an axial direction;

a pick-off body coupled to said housing, said pick-off body having a front surface retained in sliding contact with said scale, said pick-off body including a sensor for measuring movement of said scale with respect to said pick-off body; and

a spring assembly coupled to said pick-off body and to said housing and resiliently biasing said pick-off body into abutting contact with said scale as said scale slides on a surface of said pick-off body, said spring assembly restraining movement of said pick-off body in said axial direction while permitting movement normal to said axial direction so that axial movement of said scale is accurately sensed.

2. The apparatus according to claim 1 wherein said spring assembly includes:

a flat spring rigidly coupled to said pick-off body and to said housing, said flat spring lying in a plane that is substantially parallel to the axis of movement of said scale; and

a leaf spring coupled to said flat spring and to said housing for biasing said flat spring towards said scale for retaining said front surface of said pick-off body in abutting contact with said scale.

3. The apparatus according to claim 2 wherein said flat spring includes a first end and a second end and said pick-off body is rigidly coupled to said flat spring in a central portion between said first end and said second end;

and

said flat spring is rigidly coupled to said housing at said first and second ends.

4. The apparatus of claim 3 wherein said central portion where said pick-off body is rigidly attached is effectively co-linear with said first and second end attachment points of the flat spring to the housing, so that the bending moment due to frictional forces and reaction forces is substantially zero in the plane of the flat spring and so that in-plane bending of the flat spring is substantially eliminated, and axial deflection of the pick-off due to frictional forces if limited by the axial tension and compression characteristics of the flat spring.

5. The apparatus according to claim 2 wherein said flat spring includes a first end and a second end and said spring is rigidly coupled at said first end to said housing, said pick-off body being rigidly coupled to said flat spring adjacent said second end of said flat spring and said second end is not coupled to said housing.

6. The apparatus of claim 4 wherein said rigid coupling area of the pick-off body adjacent to the second end is effectively co-linear with a line parallel to the axis of motion of the scale extending through the effective rigid coupling point of said first end of the flat spring to said housing, so that the bending moment due to frictional forces and reaction forces is substantially zero in the plane of the flat spring and so that in-plane bending of the flat spring is substantially eliminated, and axial deflection of the pick-off due to frictional forces is limited by the axial tension and compression characteristics of the flat spring.

7. The apparatus according to claim 2 wherein said flat spring includes an aperture and said pick-off body is mounted within said aperture with said front surface of said pick-off body in approximately the same plane as said flat spring to reduce the moment arm between sliding friction forces and support reaction forces acting on said pick-off body to approximately zero with respect to said flat spring.

8. The apparatus according to claim 1, further including:

a pick-off support member rigidly coupled to said pick-off body; and

said spring assembly includes a pair of rods extending from said housing and coupled to a pick-off support member on either side of said pick-off body, said rods each having an axis in approximately the same plane as said front surface of said pick-off body.

9. The apparatus according to claim 1 wherein said spring assembly includes:

a flat spring which is deformed prior to assembly and then rigidly coupled to said pick-off body and to said housing such that following assembly said flat spring is deflected back to a substantially flat configuration, thereby resiliently biasing said pick-off into abutting contact with said scale without the need for additional biasing springs, and said flat spring lying in a plane that is substantially parallel to the axis of movement of said scale.

10. The apparatus according to claim 1 wherein said pick-off body and said spring assembly are integrally formed of a single material and piece.

11. The apparatus according to claim 10 wherein said integral pick-off body and spring assembly are miniature elements formed by micromachining.

12. The apparatus according to claim 1 wherein said slidably mounted scale is restricted to very short axial motions and is substantially restricted in other degrees of freedom of motion by flexures which connect it to said housing.

13. The apparatus according to claim 1 wherein said sensor in said pick-off body includes a capacitive electrode grating coupled to a front surface of said pick-off and further including:

a capacitive electrode grating coupled to a front surface of said scale;

a thin insulating dielectric layer overlying at least one of said capacitive gratings, said dielectric layer completely covering said capacitive grating and forming the sliding contact surface between said pick-off body and said scale.

14. The apparatus according to claim 13 wherein said dielectric layer is epoxy filled with Teflon particles.

15. A linear measuring apparatus comprising:

a scale means slidably coupled within a housing for moving axially in response to motion of an object whose displacement is to be measured, said scale means including a periodic pattern means for providing sensing of axial motion of said scale means;

a sensor means within said housing for sensing axial movement of said scale means, said sensor means including a pick-off body having a front surface in abutting contact with said scale means; and

a spring assembly means coupled to said pick-off body for biasing said pick-off body into abutting contact with said scale means as said scale means moves axially within said housing means and for permitting said pick-off body to move normal to said axial motion and for restraining said pick-off body from moving axially to minimize errors caused by non-axial motion of said pick-off body relative to said scale and to accurately sense axial motion of said scale.

16. The apparatus according to claim 15 wherein said sensor means includes capacitive electrodes in said pick-off body and said scale includes capacitive electrodes for sensing axial motion of said scale by changes in capacitance as said scale moves axially with respect to said pick-off body.

17. The apparatus according to claim 15 wherein said pick-off body is rigidly coupled to said spring assembly means.

18. The apparatus according to claim 17 wherein said spring assembly means includes a flat spring rigidly coupled to said housing and a leaf spring rigidly coupled to said flat spring and to said housing and biasing said flat spring away from said housing and said pick-off body into abutting contact with said scale means.

19. The apparatus according to claim 15 wherein said apparatus also includes a drive means slidably coupled to said housing and contacting said scale means to transfer motion of said object to said scale means, said driving means including a spindle slidably coupled to said housing, said spindle having a hollow shaft and a rod positioned within the hollow shaft of said spindle, said rod having a first end connected to a tip of said hollow shaft and a second end connected to said scale means so that axial motion of said object is transferred to said scale means via said rod and non-axial motion of said spindle is decoupled from axial motion of said scale.

20. The apparatus according to claim 15 wherein said spring assembly means includes a flat spring rigidly coupled at one end to said housing and free at said other end.

21. The apparatus according to claim 15 wherein said spring means includes a pair of support rods rigidly coupled to said housing and to a support carriage, said support carriage including a recess into which said pick-off member is positioned, the depth of said recess being selected to align a front surface of said pick-off member with a horizontal axis of said pair of support rods to reduce the moment arm of force caused by said scale sliding at said front surface to approximately zero.

22. The apparatus according to claim 15 wherein said spring assembly includes a flat spring having a uniform width along the entire length thereof.

23. The apparatus according to claim 22 wherein said flat spring is constructed of a material which is relatively non-compressible in a longitudinal, axial direction but is flexible in planes orthogonal to said longitudinal, axial direction to permit said flat spring to undergo pitch, roll, and linear motion normal to said longitudinal axis for accurately sensing axial motion of said scale but accomodating non-axial motion of said pick-off body induced by contact with said scale.

24. A linear measuring apparatus comprising:

a scale slidably coupled within a housing and adapted to be coupled to an object whose movement is to be measured, said scale moving axially in response to movement by said object, said scale having a front surface;

a capacitive grating mounted in said front surface of said scale;

a thin dielectric layer on said front surface of said scale and overlaying said capacitive grating, said dielectric layer being generally planar and smooth to provide a large area, low friction surface area for sliding contact;

a pick-off member mounted within said housing in abutting contact with said scale, said pick-off member being mounted to maintain a fixed axial location while said scale undergoes axial motion for detecting axial motion of said scale, said pick-off member having a front surface;

a capacitive grating mounted in said front surface of said pick-off member;

a thin dielectric layer on said front surface of said pick-off member and overlaying said capacitive grating, said dielectric layer being in abutting contact with said dielectric layer of said scale and being generally planar and smooth to provide a large contact area, low friction surface for sliding contact with said scale;

an electrical circuit within said housing and coupled to said respective capacitive gratings to form a capacitor, said two capacitive grating forming the plates of said capacitor and said thin dielectric layers being the dielectric material between said plates, the axial movement of said scale being sensed based on changes in the capacitance of said capacitor between said scale and said pick-off body.

25. The apparatus according to claim 24 wherein the thickness of each of said thin dielectric layers is selected to ensure that based on the combined thickness of said two dielectric layers, the two capacitive gratings do not electrically short out over the operational voltage of said capacitor and said layers are thin to provide a relatively high capacitance for a given area of said capacitive gratings.

26. The apparatus according to claim 25 wherein each of said dielectric layers has a thickness of approximately five (5) microns for an operational voltage range from zero to five volts.

27. The apparatus according to claim 24 wherein said dielectric layer includes an epoxy filled with Teflon.

28. The apparatus according to claim 24 wherein said pick-off member includes a silicon substrate and said dielectric layer on said pick-off member is an oxide layer.

29. The apparatus according to claim 24 wherein the contacting surface area between said pick-off and said scale approximately equals the front surface area of said pick-off and the contacting surface area exceeds the area of the capacitive grating on said pick-off member.

30. The apparatus according to claim 24, further including a spring assembly coupled to said pick-off member for biasing the front surface of said pick-off member into abutting contact with the front surface of said scale as said scale moves axially within said housing, said spring assembly permitting said pick-off body to move normal to said axial motion to minimize errors caused by non-axial motion of said scale.