Semiconductor processor with extendible receiver for handling multiple discrete wafers without wafer carriers

• US 5,174,045 A
• Filed: 05/17/1991
• Issued: 12/29/1992
• Est. Priority Date: 05/17/1991
• Status: Expired due to Term

• Current Assignee: Semitool Incorporated (Applied Materials Incorporated)
• Original Assignee: Semitool Incorporated (Applied Materials Incorporated)
• Inventors: Thompson, Raymon F., Owczarz, Aleksander
• Primary Examiner(s): Bennet, Henry A.
• Assistant Examiner(s): Gromada, Denise L. F.
• Application Number:
  US07/703,266
• Time in Patent Office: 592 Days
• Field of Search: 34/8, 34/58, 34/184, 34/187, 210/787, 210/781, 210/360.1, 414/411, 134/17, 134/33
• US Class Current: 34/58
• CPC Class Codes: F26B 25/004 in the shape of discrete sheets wicket conveyors F26B15/085
• CPC Class Codes: F26B 5/08 by centrifugal treatment
• CPC Class Codes: H01L 21/67028 for cleaning followed by drying, rinsing, stripping, blasting or the like
• CPC Class Codes: Y10S 414/135 Associated with semiconductor wafer handling

Abstract

A processor for centrifugal processing of semiconductor wafers and similar units without a wafer carrier. The processor is specially constructed to provide an automatically extendible and retractable rotor head to allow automated loading and unloading of discrete wafers onto the rotor head. The rotor head includes means for holding the wafers in spaced discrete relationship without a carrier. The processor includes a novel shaft assembly construction which includes an axially extendible shaft controlled using pressurized fluid. The pressurized fluid is supplied to the shaft assembly by a pressure supply which is controllably extendible and retractable for engagement with the shaft assembly when rotation is stopped. The shaft assembly also preferably incorporates an axial locking mechanism which holds the axially movable components of the shaft assembly in fixed axial position during rotation, while allowing release when rotation is stopped so that movable portions of the shaft assembly can be axially extended.

Claims

1. A centrifugal processor for processing a plurality of wafer units, comprising:

a frame;

at least one processing enclosure for containing and enclosing at least portions of a processing chamber;

said at least one processing enclosure being mounted upon the frame and having at least one access opening through which said wafer units can be loaded into and unloaded from the processing chamber;

at least one closure mounted for controlled motion to open and close the processing enclosure;

said at least one closure being controllably movable between at least a closed position wherein a substantially enclosed processing chamber is provided, and at least one open position wherein said at least one access opening is substantially clear to allow ingress and egress of said wafer units into and from the processing chamber;

at least one rotor mounted for rotation relative to said frame;

said at least one rotor having portions thereof within the processing chamber;

extendible unit support means mounted upon said at least one rotor for holding said wafer units upon said rotor;

said extendible unit support means being mounted to said rotor to allow extension of at least portions of the extendible unit support means at least partially through said access opening when said closure is in an open position to allow said wafer units to be loaded onto the extendible unit support means, and to allow retraction of the unit support means and any wafer units supported thereon into the processing chamber for processing when the closure is in a closed position;

said unit support means including means for holding said wafer units in spaced relationship thereon.

2. A processor according to claim 1 wherein said means for holding said wafer units in spaced relationship includes a plurality of wafer support members having wafer positioning recesses which receive edge surfaces of the wafers at desired locations.

3. A processor according to claim 1 wherein said means for holding said wafer units in spaced relationship includes a plurality of cantilevered wafer support members having wafer positioning recesses which receive edge surfaces of said wafer units at desired locations.

4. A processor according to claim 1 wherein said extendible unit support means includes at least two unit support members cantilevered to hold said wafer units thereon.

5. A processor according to claim 1 wherein said extendible unit support means includes at least two unit support members cantilevered to an extendible shaft mounted within an outer shaft which is mounted for rotation.

6. A processor according to claim 1 wherein the extendible unit support means includes at least one unit support actuator for extending and retracting portions of the extendible unit support means.

7. A processor according to claim 1 wherein the extendible unit support means includes at least one unit support actuator for extending and retracting portions of the extendible unit support means;

said unit support actuator including at least an outer shaft mounted for rotation relative to the frame, and at least an inner shaft mounted within the outer shaft for axial extension and retraction relative to the outer shaft.

8. A processor according to claim 1 wherein the extendible unit support means includes at least one unit support actuator for extending and retracting portions of the extendible unit support means;

said unit support actuator including at least an outer shaft mounted for rotation relative to the frame, and at least an inner shaft mounted within the outer shaft for axial extension and retraction relative to the outer shaft;

said at least an inner shaft including anti-rotation means for preventing relative rotation between the at least an outer shaft and at least an inner shaft when the unit support actuator is extended from a retracted position.

9. A processor according to claim 1 wherein the extendible unit support means includes an unit support actuator for extending and retracting portions of the extendible unit support means;

said unit support actuator including at least one fluid pressure actuator for extending or retracting portions of the extendible unit support means using fluid pressure.