Semiconductor processor with extendible receiver for handling multiple discrete wafers without wafer carriers
First Claim
1. A centrifugal processor for processing a plurality of wafer units, comprising:
- a frame;
at least one processing enclosure for containing and enclosing at least portions of a processing chamber;
said at least one processing enclosure being mounted upon the frame and having at least one access opening through which said wafer units can be loaded into and unloaded from the processing chamber;
at least one closure mounted for controlled motion to open and close the processing enclosure;
said at least one closure being controllably movable between at least a closed position wherein a substantially enclosed processing chamber is provided, and at least one open position wherein said at least one access opening is substantially clear to allow ingress and egress of said wafer units into and from the processing chamber;
at least one rotor mounted for rotation relative to said frame;
said at least one rotor having portions thereof within the processing chamber;
extendible unit support means mounted upon said at least one rotor for holding said wafer units upon said rotor;
said extendible unit support means being mounted to said rotor to allow extension of at least portions of the extendible unit support means at least partially through said access opening when said closure is in an open position to allow said wafer units to be loaded onto the extendible unit support means, and to allow retraction of the unit support means and any wafer units supported thereon into the processing chamber for processing when the closure is in a closed position;
said unit support means including means for holding said wafer units in spaced relationship thereon.
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Accused Products
Abstract
A processor for centrifugal processing of semiconductor wafers and similar units without a wafer carrier. The processor is specially constructed to provide an automatically extendible and retractable rotor head to allow automated loading and unloading of discrete wafers onto the rotor head. The rotor head includes means for holding the wafers in spaced discrete relationship without a carrier. The processor includes a novel shaft assembly construction which includes an axially extendible shaft controlled using pressurized fluid. The pressurized fluid is supplied to the shaft assembly by a pressure supply which is controllably extendible and retractable for engagement with the shaft assembly when rotation is stopped. The shaft assembly also preferably incorporates an axial locking mechanism which holds the axially movable components of the shaft assembly in fixed axial position during rotation, while allowing release when rotation is stopped so that movable portions of the shaft assembly can be axially extended.
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Citations
9 Claims
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1. A centrifugal processor for processing a plurality of wafer units, comprising:
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a frame; at least one processing enclosure for containing and enclosing at least portions of a processing chamber;
said at least one processing enclosure being mounted upon the frame and having at least one access opening through which said wafer units can be loaded into and unloaded from the processing chamber;at least one closure mounted for controlled motion to open and close the processing enclosure;
said at least one closure being controllably movable between at least a closed position wherein a substantially enclosed processing chamber is provided, and at least one open position wherein said at least one access opening is substantially clear to allow ingress and egress of said wafer units into and from the processing chamber;at least one rotor mounted for rotation relative to said frame;
said at least one rotor having portions thereof within the processing chamber;extendible unit support means mounted upon said at least one rotor for holding said wafer units upon said rotor;
said extendible unit support means being mounted to said rotor to allow extension of at least portions of the extendible unit support means at least partially through said access opening when said closure is in an open position to allow said wafer units to be loaded onto the extendible unit support means, and to allow retraction of the unit support means and any wafer units supported thereon into the processing chamber for processing when the closure is in a closed position;
said unit support means including means for holding said wafer units in spaced relationship thereon. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification