Method of making an optical component by ion implantation
First Claim
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1. In a process for making an optical component, the improvement which comprises the steps of:
- (a) forming in a dielectric optical component substrate over a laterally limited region thereof and in a generally elongate pattern by doping said substrate a strip light waveguide from said limited region of said substrate; and
(b) additionally implanting in said waveguide over a limited length of said string light waveguide rare-earth ions or ions of a transition metal which are laser-active in the presence of the material of the waveguide to form a laser from said limited length of the waveguide, the implanting of the laser-active ions being effected at an energy of 50 KeV to 10 MeV.
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Abstract
An optical electronic component, in which strip waveguides of limited depth and lateral width are formed in undoped dielectric substrate, e.g. an undoped crystal, by implantation of rare-earch ions or ions of transition metals, preferably laser-active ions with energies of 50 keV to 10 MeV.
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9 Claims
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1. In a process for making an optical component, the improvement which comprises the steps of:
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(a) forming in a dielectric optical component substrate over a laterally limited region thereof and in a generally elongate pattern by doping said substrate a strip light waveguide from said limited region of said substrate; and (b) additionally implanting in said waveguide over a limited length of said string light waveguide rare-earth ions or ions of a transition metal which are laser-active in the presence of the material of the waveguide to form a laser from said limited length of the waveguide, the implanting of the laser-active ions being effected at an energy of 50 KeV to 10 MeV. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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