Miniature dynamically tunable microwave and millimeter wave device
First Claim
Patent Images
1. A miniature, electrostatically actuated, tunable circuit comprising:
- a substrate having a first circuit member disposed at one surface thereof;
a second circuit member disposed above said substrate, said second circuit member being movable relative to said first circuit member; and
control means fabricated on said substrate and being operable to selectively receive control signals for producing electrostatic fields which are coupled to said second circuit member, the electrostatic fields being operable to selectively move said second circuit member relative to said first circuit member and operably tune said tunable circuit.
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Abstract
A miniature, electrostatically actuated, variable impedance circuit element which is operably tunable in response to control signals. With integrated circuit, thin film processing a fixed circuit member is fabricated on a substrate and a movable circuit member is fabricated over the substrate and is movable relative to the fixed circuit member in response to electrostatic fields produced at armature tabs when the control signals are selectively applied to rows of control electrodes. Embodiments include a variable capacitor and a variable ring resonator.
34 Citations
18 Claims
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1. A miniature, electrostatically actuated, tunable circuit comprising:
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a substrate having a first circuit member disposed at one surface thereof; a second circuit member disposed above said substrate, said second circuit member being movable relative to said first circuit member; and control means fabricated on said substrate and being operable to selectively receive control signals for producing electrostatic fields which are coupled to said second circuit member, the electrostatic fields being operable to selectively move said second circuit member relative to said first circuit member and operably tune said tunable circuit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A miniature, electrostatically actuated, circuit element comprising:
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a substrate having a first circuit element fixed thereto; a second circuit element having a surface member and which is movable relative to said first circuit element; and control means including control electrodes each having planar faces that are disposed in parallel planes and which match said surface member with an air gap there between and to allow said second circuit element to move through the region beside said control electrodes and to operably effect electrostatic attraction between said control electrodes and an image charge on said surface member in response to a control signal applied to said control electrode.
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Specification