Semiconductor transducer or actuator utilizing corrugated supports
First Claim
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1. A semiconductor transducer comprising:
- a semiconductor layer having a centrally positioned, substantially rigid deflecting member, a support member, and a plurality of corrugations formed between said deflecting member and said support member, said corrugations enabling said deflecting member to move with respect to said support member in response to an applied force; and
means for sensing the deflection of said deflecting member and for developing an electrical signal as a function of the sensed deflection of said deflecting member.
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Abstract
A semiconductor transducer or actuator is disclosed. The transducer and actuator each include a deflecting member with corrugations producing increased vertical travel which is a linear function of applied force. An accurate and easily controlled method that is insensitive to front-to-back alignment is also disclosed for forming uniform corrugations of precise thickness; independent of the thickness of the deflecting member. The cross-sectional shape of the corrugations is not limited by the etching technique, so that any configuration thereof is enabled.
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Citations
20 Claims
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1. A semiconductor transducer comprising:
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a semiconductor layer having a centrally positioned, substantially rigid deflecting member, a support member, and a plurality of corrugations formed between said deflecting member and said support member, said corrugations enabling said deflecting member to move with respect to said support member in response to an applied force; and means for sensing the deflection of said deflecting member and for developing an electrical signal as a function of the sensed deflection of said deflecting member. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A semiconductor transducer comprising:
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a support member having a centrally positioned opening defined therein; a substantially rigid deflecting member positioned in said opening; a plurality of corrugations for supporting said deflecting member with respect to said support member, said corrugations enabling said deflecting member to be deflected with respect to said support member in response to an applied force, wherein said plurality of corrugations are composed of a material selected from a group consisting of silicon, sputtered metal, evaporated metal, plated metal, vapor deposited dielectric material, and polymers; and means for sensing the deflection of said deflecting member and for developing electrical signals as a function of the sensed deflection of said deflecting member.
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13. A semiconductor transducer comprising:
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a semiconductor substrate having a bottom section and an upwardly extending section coupled to one end of said bottom section; a bending member including a beam member and a plurality of corrugations coupled between said beam member and said upwardly extending member; and means for sensing the movement of said beam member and for developing an electrical signal as a function of the sensed movement of said beam member. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification