Contact pressure sensor
First Claim
1. A contact pressure sensor comprising:
- a semiconductor having opposite surfaces;
at least one pressure sensing element provided in one of said opposite surfaces of said chip;
a spacer member supporting the other surface of said chip, said spacer member having a side surface substantially flush with an edge of said chip;
a substrate having a surface to which said spacer member is fixed;
said one surface of said chip being adapted to be pressed against an object which produces a pressure, so that said at least one sensing element detects said pressure produced by said object;
a first connection terminal provided in said one surface of said chip adapted to be pressed against said object;
a second connection terminal provided in a free portion of said surface of said substrate which portion is free from said spacer member; and
a flexible flat cable connecting between said first and second connection terminals, said flexible flat cable being bent into two portions one of which extends along said side surface of said spacer member and the other of which extends along said free portion of said surface of said substrate.
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0 Petitions
Accused Products
Abstract
A contact pressure sensor including a semiconductor chip having opposite surfaces, at least one pressure sensing element provided in one of the opposite surfaces of the chip, a spacer member supporting the other surface of the chip, a substrate having a surface to which the spacer member is fixed, the one surface of the chip being pressed against an object which produces a pressure, so that the at least one sensing element detects the pressure produced by the object, a first connection terminal provided in the one surface of the chip, a second connection terminal provided in the surface of the substrate, and a flexible flat cable connecting between the first and second connection terminals, the flexible flat cable being bent into two portions one of which extends along a side surface of the spacer member and the other of which extends along the surface of the substrate. The contact pressure sensor may further comprise a light-shading layer covering the one surface of the chip in which the at least one pressure sensing element is provided.
101 Citations
23 Claims
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1. A contact pressure sensor comprising:
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a semiconductor having opposite surfaces; at least one pressure sensing element provided in one of said opposite surfaces of said chip; a spacer member supporting the other surface of said chip, said spacer member having a side surface substantially flush with an edge of said chip; a substrate having a surface to which said spacer member is fixed; said one surface of said chip being adapted to be pressed against an object which produces a pressure, so that said at least one sensing element detects said pressure produced by said object; a first connection terminal provided in said one surface of said chip adapted to be pressed against said object; a second connection terminal provided in a free portion of said surface of said substrate which portion is free from said spacer member; and a flexible flat cable connecting between said first and second connection terminals, said flexible flat cable being bent into two portions one of which extends along said side surface of said spacer member and the other of which extends along said free portion of said surface of said substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A contact pressure sensor comprising:
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a semiconductor chip having opposite surfaces; at least one pressure sensing element provided in one of said opposite surfaces of said chip; said one surface of said chip being pressed against an object which produces a pressure, so that said at least one sensing element detects said pressure produced by said object; and a light-shading layer covering said one surface of said chip in which said at least one pressure sensing element is provided, said light-shading layer being formed of a black and electrically conducting material. - View Dependent Claims (14, 15, 16, 17, 18)
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19. A contact pressure sensor comprising:
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a semiconductor chip having opposite surfaces; at least one pressure sensing element provided in one of said opposite surfaces of said chip; said one surface of said chip being pressed against an object which produces a pressure, so that said at least one sensing element detects said pressure produced by said object; a light-shading layer covering said one surface of said chip in which said at least one pressure sensing element is provided; and a covering member covering said one surface of said semiconductor chip, said light-shading layer being superimposed on said covering member. - View Dependent Claims (20, 21, 22, 23)
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Specification