Anti-reflection optical element
First Claim
1. An anti-reflection optical element comprising (i) an optical component made of a plastic and (ii) a multi-layered anti-reflection film provided directly or indirectly on said optical component, said film comprising at least one low refractive index film layer and at least one high refractive index film layer, said low refractive index film layer and said high refractive index film layer being laminated alternately on said optical component, said high refractive index film layer being a film of mixed metal oxides comprising tantalum oxide, zirconium oxide and yttrium oxide, deposited by evaporation process.
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Abstract
The anti-reflection optical element of the present invention achieves reduction of surface reflection by providing a multi-layered anti-reflection film directly or indirectly on an optical component made of a plastic. The anti-reflection optical element of the present invention uses a multi-layered anti-reflection film comprising at least one high refractive index film layer which is a film of mixed metal oxides comprising tantalum oxide, zirconium oxide and yttrium oxide deposited by evaporation process, and thereby has solved the problems of conventional anti-reflection optical elements that their optical, mechanical and chemical properties are deteriorated with the lapse of time.
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11 Claims
- 1. An anti-reflection optical element comprising (i) an optical component made of a plastic and (ii) a multi-layered anti-reflection film provided directly or indirectly on said optical component, said film comprising at least one low refractive index film layer and at least one high refractive index film layer, said low refractive index film layer and said high refractive index film layer being laminated alternately on said optical component, said high refractive index film layer being a film of mixed metal oxides comprising tantalum oxide, zirconium oxide and yttrium oxide, deposited by evaporation process.
Specification