Micro-abrading method and micro-abrading tool
First Claim
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1. A micro-abrading method for abrading a workpiece, comprising the steps of:
- mounting the workpiece on a support;
providing an abrading tool;
mounting a Z-direction piezoelectric actuator element to a main body of said abrading tool;
connecting an abrading section to said Z-direction piezoelectric actuator element via a connecting section which allows movement of said abrading section relative to said Z-direction piezoelectric actuator element in an X-direction and in a Y-direction orthogonal to said X-direction;
connecting at least one XY-direction piezoelectric actuator element between said main body of said abrading tool and said abrading section;
operating said at least one XY-direction piezoelectric actuator element in order to create micromotion of said abrading section in said X-direction and said Y-direction; and
limiting movement of said Z-direction piezoelectric actuator element in said X-direction and said Y-direction while allowing movement of said abrading section in said X-direction and said Y-direction during operation of said at least one XY-direction piezoelectric element, by connecting a movement regulating fixture between said Z-direction piezoelectric actuator element and said main body of said abrading tool.
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Abstract
A micro-abrading method wherein an abrading section undergoes a micromotion in the XY-direction parallel with the surface of a workpiece according to the operation of an actuator comprising piezoelectric elements, and an abrading material is held between the abrading section positioned at the lower end of an abrading tool and the workpiece. The phase difference between the X-direction motion and the Y-direction motion is cyclically changed while the abrading section is undergoing the micromotion, and the surface of the workpiece is entirely and uniformly abraded even though a large area is abraded.
24 Citations
13 Claims
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1. A micro-abrading method for abrading a workpiece, comprising the steps of:
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mounting the workpiece on a support; providing an abrading tool; mounting a Z-direction piezoelectric actuator element to a main body of said abrading tool; connecting an abrading section to said Z-direction piezoelectric actuator element via a connecting section which allows movement of said abrading section relative to said Z-direction piezoelectric actuator element in an X-direction and in a Y-direction orthogonal to said X-direction; connecting at least one XY-direction piezoelectric actuator element between said main body of said abrading tool and said abrading section; operating said at least one XY-direction piezoelectric actuator element in order to create micromotion of said abrading section in said X-direction and said Y-direction; and limiting movement of said Z-direction piezoelectric actuator element in said X-direction and said Y-direction while allowing movement of said abrading section in said X-direction and said Y-direction during operation of said at least one XY-direction piezoelectric element, by connecting a movement regulating fixture between said Z-direction piezoelectric actuator element and said main body of said abrading tool. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A micro-abrading tool for micro-abrading a workpiece, comprising:
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a main body; a Z-direction piezoelectric actuator element mounted to said main body; an abrading section connected to said Z-direction piezoelectric actuator element; a connecting section interposed between said abrading section and said Z-direction piezoelectric actuator element for allowing movement of said abrading section relative to said Z-direction piezoelectric actuator element in an X-direction and in a Y-direction orthogonal to said X-direction; at least one XY-direction piezoelectric actuator element connected between said main body and said abrading section; and a movement regulating fixture mounted between said Z-direction piezoelectric actuator element and said main body for limiting movement of said Z-direction piezoelectric actuator element in said X-direction and in said Y-direction while allowing movement of said abrading section in said X-direction and said Y-direction during operation of said at least one XY-direction piezoelectric actuator element. - View Dependent Claims (9, 10, 11, 12, 13)
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Specification