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Temperature compensated proofmass assembly for accelerometers

  • US 5,186,053 A
  • Filed: 12/19/1990
  • Issued: 02/16/1993
  • Est. Priority Date: 12/19/1990
  • Status: Expired due to Term
First Claim
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1. In a temperature compensated device for measuring acceleration along a sensing axis;

  • (a) a main support;

    (b) a frame fabricated of fused quartz pivotally connected to the support for pendulous movement about a hinge axis with a component of motion along the sensing axis;

    (c) a proofmass comprising a pendulum fabricated of fused quartz pivotally conducted to the frame for movement about a compensation axis spaced from and generally parallel to the hinge axis; and

    (d) transducer means comprising a pair of crystalline quartz transducers connected between the pendulum and the support and having a greater coefficient of thermal expansion than fused quartz for sensing forces produced by acceleration of the proofmass along the sensing axis, with any difference in thermal expansion between the transducers and the elements fabricated of fused quartz resulting in rotation of the pendulum about the compensation axis.

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