Temperature compensated proofmass assembly for accelerometers

• US 5,186,053 A
• Filed: 12/19/1990
• Issued: 02/16/1993
• Est. Priority Date: 12/19/1990
• Status: Expired due to Term

• Current Assignee: BEI Sensors & Systems Company Incorporated (Schneider Electric SE)
• Original Assignee: New SD, Inc.
• Inventors: Hanson, Richard A., Newell, G. Richard, Egley, Bert D.
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US07/633,375
• Time in Patent Office: 790 Days
• Field of Search: 73/497, 73/517 AV, 73/514, 73/517 R
• US Class Current: 73/497
• CPC Class Codes: G01P 1/006 used for thermal compensation

Abstract

Proofmass assembly for an accelerometer having transducers fabricated of crystalline quartz and other components fabricated of fused quartz. The assembly includes a main support, a frame pivotally connected to the support for pendulous movement about a hinge axis such that the frame moves with a component of motion along the sensing axis of the accelerometer, a proofmass connected to the frame for movement about a compensation axis spaced from and generally parallel to the hinge axis, and a pair of transducers connected between the proofmass and the support for sensing forces produced by acceleration of the proofmass along the sensing axis. Differences in thermal expansion between the transducers and the fused quartz components are taken up by rotation of the proofmass about the compensation axis, and the two parallel axes permit translational motion of the proofmass in response to acceleration along the sensing axis without rotation of the proofmass relative to the support.

Claims

1. In a temperature compensated device for measuring acceleration along a sensing axis;

(a) a main support;

(b) a frame fabricated of fused quartz pivotally connected to the support for pendulous movement about a hinge axis with a component of motion along the sensing axis;

(c) a proofmass comprising a pendulum fabricated of fused quartz pivotally conducted to the frame for movement about a compensation axis spaced from and generally parallel to the hinge axis; and

(d) transducer means comprising a pair of crystalline quartz transducers connected between the pendulum and the support and having a greater coefficient of thermal expansion than fused quartz for sensing forces produced by acceleration of the proofmass along the sensing axis, with any difference in thermal expansion between the transducers and the elements fabricated of fused quartz resulting in rotation of the pendulum about the compensation axis.

2. The device of claim 1 wherein the proofmass is connected to the frame by a torsional hinge which extends along the compensation axis.

3. The device of claim 1 wherein the proofmass is connected to the frame by a flexure which is adapted to bend about the compensation axis.

4. In a device for measuring acceleration along a sensing axis;

(a) a main support;

(b) a frame connected to the support by a first hinge structure for pendulous movement about a hinge axis with a component of motion in the direction of the sensing axis;

(c) a proofmass assembly comprising a pendulum and a pair of proofmass weights conduced to the frame by a second hinge structure for movement about a compensation axis spaced from and parallel to the hinge axis;

(d) said support, said frame, said pendulum and said first and second hinge structures being formed as an integral structure of fused quartz; and

(d) a pair of crystalline quartz force transducers connected between the pendulum and the support for monitoring forces produced by acceleration of the proofmass assembly along the sensing axis, with any difference in thermal expansion between the transducers and the elements fabricated of fused quartz resulting in rotation of the pendulum about the compensation axis.

5. The device of claim 4 wherein the first hinge structure comprises a pair of flexures spaced apart along the hinge axis and connected between the support and the frame.

6. The device of claim 4 wherein the second hinge structure comprises a pair of torsion hinges extending along the compensation axis between opposite ends of the pendulum and the frame.

7. The device of claim 4 wherein the frame comprises a U-shaped bridge having a pair of generally parallel arms, and the second hinge structure comprises a pair of flexures connected between the pendulum and the arms of the bridge.