Method to form self-aligned gate structures and focus rings

• US 5,186,670 A
• Filed: 03/02/1992
• Issued: 02/16/1993
• Est. Priority Date: 03/02/1992
• Status: Expired due to Term

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Lowrey, Tyler A., Doan, Trung T., Rolfson, J. Brett, Cathey, David A.
• Primary Examiner(s): Seidel, Richard K.
• Assistant Examiner(s): Knapp, Jeffrey T.
• Application Number:
  US07/844,369
• Time in Patent Office: 351 Days
• Field of Search: 445/24, 445/49, 445/50
• US Class Current: 445/24
• CPC Class Codes: H01J 2209/0226 Sharpening or resharpening of emitting point or edge
• CPC Class Codes: H01J 2329/00 Electron emission display panels, e.g. field emission display panels
• CPC Class Codes: H01J 9/025 of field emission cathodes

Abstract

A selective etching and chemical mechanical planarization process for the formation of self-aligned gate and focus ring structures surrounding an electron emission tip for use in field emission displays in which the emission tip is i) optionally sharpened through oxidation, ii) deposited with a first conformal layer, iii) deposited with a conductive material layer, iv) deposited with a second conformal insulating layer, v) deposited with a focus electrode ring material layer, vi) optionally deposited with a buffering material, vii) planarized with a chemical mechanical planarization (CMP) step, to expose a portion of the second conformal layer, viii) etched to form a self-aligned gate and focus ring, and thereby expose the emitter tip, afterwhich xi) the emitter tip may be coated with a low work function material.

Claims

1. A process for the formation of self-aligned gate and focus ring structures around a cold cathode emitter tip, said process comprising the following steps:

processing a wafer to form at least one conical cathode on a substrate, said cathode having an emitter tip;

depositing a first conformal insulating layer over the surface of the wafer;

depositing a conductive material layer superjacent said first conformal insulating layer;

depositing a second conformal insulating layer superjacent said conductive material layer;

depositing a focus electrode material layer superjacent said second conformal insulating layer;

subjecting the wafer to chemical mechanical planarization (CMP) to expose at least a portion of said conductive material layer; and

etching said layers to expose the emitter tip.

2. The process according to claim wherein said first and second conformal insulating layers are selectively etchable with respect to said conductive material layer and said focus electrode layer.

3. The process according to claim 2, wherein said conductive material layer and said focus electrode material layer comprise at least one of doped polysilicon and silicized silicon.

4. The process according to claim 3, wherein the chemical mechanical planarization (CMP) step is performed with an abrasive compound in a polishing slurry.

5. The process according to claim 4, further comprising the step of depositing a buffering material layer on said focus electrode material layer prior to subjecting the wafer to the chemical mechanical planarization (CMP) step

6. The process according to claim 5, further comprising the step of sharpening said tip by oxidation prior to depositing said first conformal insulating layer.

7. The process according to claim 6, wherein said buffering material layer comprises a thin layer of Si₃ N₄.

8. The process according to claim 7, wherein said first and second conformal insulating layers comprise at least one of SiO₂, Si₃ N₄, and silicon oxynitride.

9. The process according to claim 8, wherein said cathode is incorporated into an array of like cathodes as an optical display transmitter.

10. The process according to claim 9, wherein said etching further comprises the steps of:

etching said second conformal insulating layer to create a cavity between said conductive material layer and said focus electrode material layer;

etching said conductive material layer to form a gate; and

removing a portion of said first conformal insulating layer surrounding the tip thereby exposing said tip.

11. The process according to claim 10, further comprising:

depositing additional said focus electrode material layers and additional said conformal insulating layers.

12. The process according to claim 9, wherein said etching further comprises the steps of:

etching said conductive material layer to form a gate; and

etching said first and second conformal insulating layers simultaneously thereby exposing the emitter tip.

13. The process according to claim 12, further comprising:

depositing additional said focus electrode material layers and additional said conformal insulating layers.

14. A process for the formation of self-aligned gate and focus ring structures around a cold cathode tip, said process comprising the following steps:

processing a wafer to form at least one conical cathode on a substrate, said cathode having an emitter tip;

depositing at least two conformal insulating layers over the tip of said cathode;

depositing at least two conductive material layers superjacent said conformal insulating layer;

subjecting the wafer to chemical mechanical planarization (CMP); and

removing said layers to expose the emitter tip.

15. The process according to claim 14, wherein the chemical mechanical planarization step is performed with an abrasive compound in a polishing slurry.

16. The process according to claim 15 further comprising the step of depositing a buffering material layer prior to subjecting the wafer to the chemical mechanical planarization (CMP) step.

17. The process according to claim 16, wherein said removing further comprises the step of:

etching said at least two conformal insulating layers thereby defining the gate and the focus ring structures.

18. The process according to claim 17, wherein said conformal insulating layers are selectively etchable with respect to said conductive material layers.

19. The process according to claim 18, further comprising the step of coating said tip with a material having a low work function.

20. A process for the formation of self-aligned gate and focus ring structures around an electron emitting cold cathode tip, said process comprising the following steps:

processing a wafer to form at least one cathode having an emitter tip;

depositing a first conformal insulating layer over the tip of said cathode;

depositing a conductive material layer superjacent said first conformal insulating layer;

depositing a second conformal insulating layer superjacent said conductive material layer;

depositing a focus electrode material layer superjacent said second conformal insulating layer;

subjecting the wafer to chemical mechanical planarization (CMP) to expose at least a portion of said second conformal insulating layer;

etching said second conformal insulating layer to create a cavity between said conductive material layer and said focus electrode material layer

etching said conductive material layer to form a gate; and

removing a portion of said first conformal insulating layer surrounding the tip thereby exposing said tip.