Liquid crystal display apparatus
First Claim
1. A liquid crystal display apparatus comprising:
- a transparent substrate;
driving thin film transistors disposed on said transparent substrate;
display picture elements, each connected to a respective one of said driving thin film transistors; and
storage capacitance devices, each connected in parallel with a corresponding one of said display picture elements, wherein each of said storage capacitance devices includesa storage capacitance metallic line made of a metal containing Ta and N, said storage capacitance metallic line being disposed on said transparent substrate, anda metal oxide film formed by anodically oxidizing the surface of said storage capacitance metallic line, andwherein the corresponding one of said display picture elements is disposed on said metal oxide film.
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Accused Products
Abstract
An object is to provide an active matrix type liquid crystal display apparatus with a substrate for a liquid crystal driving semiconductor device which is free from point defects, rise of production costs, and shortcircuit in a storage capacitance portion. The liquid crystal display apparatus has a substrate for a liquid crystal driving semiconductor device with a display picture element group consisting of driving semiconductor devices 15 and storage capacitances, the display picture element group being disposed on one major surface of a transparent substrate 13, wherein the storage capacitance is formed by disposing an anodic oxide film 18 between a display electrode 16 and a storage capacitance metallic line 1b made of TaN, for example, and disposed on the one major surface of the transparent substrate 13.
91 Citations
14 Claims
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1. A liquid crystal display apparatus comprising:
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a transparent substrate; driving thin film transistors disposed on said transparent substrate; display picture elements, each connected to a respective one of said driving thin film transistors; and storage capacitance devices, each connected in parallel with a corresponding one of said display picture elements, wherein each of said storage capacitance devices includes a storage capacitance metallic line made of a metal containing Ta and N, said storage capacitance metallic line being disposed on said transparent substrate, and a metal oxide film formed by anodically oxidizing the surface of said storage capacitance metallic line, and wherein the corresponding one of said display picture elements is disposed on said metal oxide film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A liquid crystal display apparatus comprising:
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a transparent substrate; driving thin film transistors disposed on said transparent substrate; a plurality of display picture elements, each display picture element being connected to and driven by a corresponding driving thin film transistor; and storage capacitance devices, each connected in parallel with a corresponding one of said plurality of display picture elements, wherein each of said storage capacitance devices includes a storage capacitance metallic line made of a metal containing Ta and N, said storage capacitance metallic line being disposed on said transparent substrate, and a metal oxide film formed by anodically oxidizing the surface of said storage capacitance metallic line, and wherein the corresponding display picture element is disposed on said metal oxide film, and wherein the metal containing Ta and N has a dielectric constant ε
s and a resistivity ρ
which satisfy the following relationship;
space="preserve" listing-type="equation">ε
s×
ρ
>
1.9×
10.sup.12. - View Dependent Claims (13)
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14. A liquid crystal display apparatus comprising:
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a transparent substrate; driving thin film transistors disposed on said transparent substrate; display picture elements, each connected to a respective one of said driving thin film transistors; and storage capacitance devices, each connected in parallel with a corresponding one of said display picture elements, wherein each of said storage capacitance devices includes a storage capacitance metallic line made of metal layers containing Ta and N selected from Ta--N, Nb--Ta--N, Ta--Mo--N, and Ta--W--N, the metal layers laminating a Ta layer as an intermediate layer, said storage capacitance metallic line being disposed on said transparent substrate, and a metal oxide film formed by anodically oxidizing the surface of said storage capacitance metallic line, and wherein the corresponding one of said display picture elements is disposed on said metal oxide film.
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Specification