Method of bonding metals, and method and apparatus for producing semiconductor integrated circuit device using said method of bonding metals
First Claim
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1. A method of bonding a set of members which comprises the steps of:
- irradiating respective bonding surfaces of a pair of members with an atomic beam;
transferring said members into an inert gas atmosphere; and
pressing said bonding surfaces of said members against each other in the inert gas atmosphere.
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Abstract
A technique for producing a chip mount type package or a TAB package with high reliability, without use of a flux which would cause environmental pollution or would hinder an enhancement of reliability, more particularly pertains to a method of irradiating bonding surfaces, for which a solder is used, and solder bump electrodes of a package with an atomic or ion energy beam, and bonding the bonding surfaces to each other under normal pressure (about 1 atm) in a continuous apparatus.
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Citations
31 Claims
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1. A method of bonding a set of members which comprises the steps of:
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irradiating respective bonding surfaces of a pair of members with an atomic beam; transferring said members into an inert gas atmosphere; and pressing said bonding surfaces of said members against each other in the inert gas atmosphere.
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2. A method of bonding a set of members which comprises the steps of:
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irradiating respective bonding surfaces of a pair of members with an atomic beam; and pressing said bonding surfaces of said members against each other in the presence of normal atmospheric pressure.
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3. A method of bonding a set of metal members which comprises the steps of:
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irradiating respective bonding surfaces of the set of metal members disposed in a vacuum vessel with a particle energy beam to clean contaminants from the bonding surfaces by sputtering; thereafter transferring the metal members into another vessel continuous with the vacuum vessel, the another vessel provided therein with an inert gas atmosphere to prevent reformation of contaminants; and thereafter pressing the bonding surfaces of the metal members against each other in the another vessel provided therein with the inert gas atmosphere for bonding the set of metal members. - View Dependent Claims (4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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30. A fluxless method of bonding two bonding surfaces of components of an electronic integrated circuit, comprising the steps of:
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forming a plurality of non-eutectic alloy solder bumps on one of the components, with the solder bumps forming the bonding surfaces of the one of the components; said forming including melting the solder bumps and cooling the melted solder bumps sufficiently to segregate a eutectic alloy layer on the bonding surface of each of the non-eutectic alloy solder bumps; pressing the components together so that the eutectic alloy layer of each of the solder bumps is temporarily bonded to the respective bonding surface of the other component while heating the bonding surfaces to a temperature at about the melting point of the eutectic alloy layer and lower than the melting point of the non-eutectic alloy layer. - View Dependent Claims (31)
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Specification