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Polysilicon resonating beam transducers and method of producing the same

  • US 5,188,983 A
  • Filed: 01/03/1992
  • Issued: 02/23/1993
  • Est. Priority Date: 04/11/1990
  • Status: Expired due to Term
First Claim
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1. A method of making a resonant beam force transducer comprising the steps of:

  • (a) forming a beam of polysilicon mounted at its ends above a substrate;

    (b) annealing the polysilicon beam so it has zero or low built-in tensile strain;

    (c) encapsulating the beam in a polysilicon shell which forms with the substrate a cavity which surrounds the beam, and channels formed in the shell leading from the cavity;

    (d) sealing the interior of the cavity from the external atmosphere with a gas which reacts to deposit solid material in the channels to close them and to evacuate the cavity.

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