Aluminosilicate glass pressure transducer
First Claim
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1. A capacitive pressure transducer comprising:
- a pressure diaphragm made of glass having a thermal elastic coefficient between ±
30 ppm/°
C;
a first electrode on a first surface of said pressure diaphragm;
support means for supporting said pressure diaphragm, said support means being made of said glass; and
electrode means, carried by said support means, for providing a second electrode which cooperates with said first electrode to form a capacitor.
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Abstract
A capacitive pressure transducer is made of aluminosilicate glass or any other glass having a low thermal coefficient.
55 Citations
16 Claims
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1. A capacitive pressure transducer comprising:
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a pressure diaphragm made of glass having a thermal elastic coefficient between ±
30 ppm/°
C;a first electrode on a first surface of said pressure diaphragm; support means for supporting said pressure diaphragm, said support means being made of said glass; and electrode means, carried by said support means, for providing a second electrode which cooperates with said first electrode to form a capacitor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A capacitive pressure transducer comprising:
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a pressure diaphragm made of aluminosilicate glass; a first electrode on at least one surface of said pressure diaphragm; a reference diaphragm made of aluminosilicate glass; a second electrode on at least one surface of said reference diaphragm, said reference diaphragm being bonded to said pressure diaphragm such that said first and second electrodes cooperate to form a capacitor; and support means for supporting said diaphragms. - View Dependent Claims (11)
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12. A method of making a capacitive pressure sensor from segments of aluminosilicate glass, comprising the steps of:
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shaping one of said segments into a pressure diaphragm; forming a first electrode on at least one surface of said pressure diaphragm; shaping another one of said segments into a second diaphragm; forming a second electrode on at least one surface of said second diaphragm; and bonding said pressure and second diaphragms together such that said first and second electrodes form a capacitor. - View Dependent Claims (13, 14, 15, 16)
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Specification