Plate-mode ultrasonic sensor

• US 5,189,914 A
• Filed: 11/15/1991
• Issued: 03/02/1993
• Est. Priority Date: 02/29/1988
• Status: Expired due to Term

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: White, Richard M., Wenzel, Stuart W.
• Primary Examiner(s): ARANA, LOUIS M
• Application Number:
  US07/792,457
• Time in Patent Office: 473 Days
• Field of Search: 73/599, 73/597, 73/596, 73/24.06, 73/24.04, 73/24.03, 73/24.01, 73/19.03
• US Class Current: 73/599
• CPC Class Codes: B01L 3/5027 by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip B01L3/5023 takes precedence; micromixers B01F33/30; microreactors for synthesis B01J19/0093; microcapillary devices in general B81B1/00
• CPC Class Codes: G01H 13/00 Measuring resonant frequency
• CPC Class Codes: G01H 17/00 Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves, not provided for in the preceding groups see provisionally also G01H1/00
• CPC Class Codes: G01L 9/0025 with acoustic surface waves
• CPC Class Codes: G01N 2291/014 Resonance or resonant frequency
• CPC Class Codes: G01N 2291/0256 Adsorption, desorption, surface mass change, e.g. on biosensors
• CPC Class Codes: G01N 2291/02818 Density, viscosity
• CPC Class Codes: G01N 2291/02827 Elastic parameters, strength or force
• CPC Class Codes: G01N 2291/02854 Length, thickness
• CPC Class Codes: G01N 2291/0422 Shear waves, transverse waves, horizontally polarised waves
• CPC Class Codes: G01N 2291/0423 Surface waves, e.g. Rayleigh waves, Love waves
• CPC Class Codes: G01N 2291/0427 Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
• CPC Class Codes: G01N 29/022 Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices microdevices per se B81B
• CPC Class Codes: G01P 15/08 with conversion into electric or magnetic values
• CPC Class Codes: G10K 11/36 Devices for manipulating acoustic surface waves electro-acoustic amplifiers H03F13/00; networks comprising electro-acoustic elements H03H9/00

Abstract

An ultrasonic sensor which has a thin planar sheet of material forming a Lamb wave propagation medium, the sheet having a thickness which is no greater than about twenty microns. The sensor also includes a Lamb wave generator for generating Lamb waves in the propagation medium and an output device for producing an electrical signal representative of the propagation characteristics of the Lamb waves propagating along the propagation medium. A measuring device is included in the sensor to measure selected characteristics of the output electrical signal. The propagation medium has some physical characteristics that are determined by the value of a measurand acting on the medium and the determined physical characteristics determine the propagation characteristics of the Lamb waves which are propagated along the medium. When the sensor is acted on by a measurand to determine the physical characteristics of the propagation medium, the characteristics of the electrical signal are also determined. The measuring device measures the electrical signal and provides an indication of the measurand value. Several sensing arrangements are also disclosed as well as methods for making the planar propagation medium.

Claims

1. An ultrasonic sensor comprising:

a propagation medium comprising a thin planar sheet of material capable of supporting Lamb waves, said sheet having a thickness which is not greater than about twenty micrometers, and having some physical characteristic determined by a measurand acting thereon, said physical characteristic determining the propagation characteristics of Lamb waves to be propagated along the medium, said propagation medium including a layer of silicon nitride and a layer of piezoelectric material,

electrical means coupled to the propagation medium for producing Lamb waves in the propagation medium, said electrical means including means for producing both symmetrical and antisymmetrical Lamb waves in the propagation medium,

output means for producing an electrical signal representative of the determined propagation characteristic of the Lamb waves propagating along the propagation medium,

measuring means for measuring a selected characteristic of said electrical signal, said output means including a receiving transducer, coupled to the propagation medium, for producing an electrical signal representative of the Lamb waves propagating along said propagation medium,

the electrical means including a launching transducer, coupled to the propagation medium, for generating Lamb waves in the propagation medium,

a feedback path between the receiving and launching transducers for providing feedback from the receiving transducer to the launching transducer,

a feedback amplifier in the feedback path for amplifying said electrical signal produced by the receiving transducer and fed back to the launching transducer, the sensor forming an oscillator in which Lamb waves are continuously propagated along the propagation medium,

the measuring means including frequency measuring means for measuring the oscillation frequency, and

frequency blocking means for preventing signal frequencies outside a certain range from reaching the feedback amplifier, said frequency blocking means being adjustable so that the frequencies which are blocked may be varied,

whereby the sensor may be operated successively at several different frequencies to indicate different measurands.

2. The sensor as recited in claim 1, wherein the frequency blocking means is a band pass filter with an adjustable frequency characteristic.

3. An ultrasonic sensor comprising:

a propagation medium comprising a thin planar sheet of material capable of supporting Lamb waves, said sheet having a thickness which is not greater than about twenty micrometers, and having some physical characteristic determined by a measurand acting thereon, said physical characteristic determining the propagation characteristics of Lamb waves to be propagated along the medium,

electrical means coupled to the propagation medium for producing Lamb waves in the propagation medium,

output means for producing an electrical signal representative of the determined propagation characteristic of the Lamb waves propagating along the propagation medium,

measuring means for measuring selected characteristics of said electrical signal,

whereby when said sensor is acted on by a measurand, the physical characteristic of said propagation medium is determined and said electrical signal characteristics are also determined, so that said measuring means provides an indication of the measurand, and

heating means in contact with said propagation medium for heating a propagation path, and

wherein the propagation medium includes a layer of sorptive material forming an outer surface of said propagation medium,

whereby the heating means may heat the propagation medium, including the sorptive material, causing vapors or gases on the surface or in the interior of the sorptive material to be desorbed, thereby affecting a certain characteristic of the propagation medium and the characteristic of the Lamb waves propagating therethrough, the sensor forming a thermal desorption spectrometer and a vapor or gas sensor having increased selectivity.

4. An ultrasonic sensor comprising:

a propagation medium comprising a thin planar sheet of material capable of supporting Lamb waves, said sheet having a thickness which is no greater than about twenty micrometers, and having some physical characteristic determined by a measurand acting thereon, said physical characteristic determining the propagation characteristics of Lamb waves to be propagated along the medium;

electrical means coupled to the propagation medium for producing Lamb waves in the propagation medium;

output means for producing an electrical signal representative of the determined propagation characteristics of the Lamb waves propagating along the propagation medium, and

measuring means for measuring selected characteristics of said electrical signal,

whereby when said sensor is acted on by a measurand, the physical characteristic of said propagation medium is determined and said electrical signal characteristics are also determined, so that said measuring means provides an indication of the measurand,

said output means including a receiving transducer coupled to the propagation medium for producing an electrical signal representative of the Lamb waves propagating along said propagation medium,

the electrical means including a launching transducer coupled to the propagation medium for generating Lamb waves in the propagation medium,

a plurality of feedback paths between the receiving and launching transducers for providing feedback from the receiving transducer to the launching transducer,

a band pass filter in each said feedback path for passing a different range of signal frequencies, and

a feedback amplifier in each said feedback path for amplifying said electrical signal produced by the receiving transducer and passed by the band pass filter to be fed back to the launching transducer, the sensor forming an oscillator in which Lamb waves are continuously propagated along the propagation medium, and

wherein the measuring means includes a separate frequency measuring means for measuring the oscillation frequency of each said feedback path,

whereby the sensor can simultaneously sense several different measurands, one with each frequency measuring means.

5. An ultrasonic sensor comprising:

a composite structure comprising (a) a supporting frame of a first material and (b) a propagation medium comprising a thin planar sheet of a second, different material, capable of supporting Lamb waves, supported by said supporting frame, said sheet having a thickness very much thinner than the wave to be propagated thereon having some physical characteristic determined by a measurand acting thereon, said physical characteristic determining the propagation characteristics of Lamb waves to be propagated along the medium,

electrical means coupled to the propagation medium for producing Lamb waves in the propagation medium,

output means for producing an electrical signal representative of the determined propagation characteristic of the Lamb waves propagating along the propagation medium, and

measuring means for measuring selected characteristics of said electrical signal,

whereby when said sensor is acted on by a measurand, the physical characteristic of said propagation medium is determined and said electrical signal characteristics are also determined, so that said measuring means provides an indication of the measurand,

wherein the propagation medium comprises a planar sheet of nonconducting and non-piezoelectric material, and

the electrical means includes electrode means for inducing a plurality of electrical fields at various positions across the nonconducting material, said fields having sufficient intensity to deform the material and thereby generate Lamb waves in the propagation medium with no need for a piezoelectric layer in the propagation medium, and

the output means including a receiving ground plane on one surface of the propagation medium with an electrical connection to ground,

a receiving electrode array on the surface of the propagation medium opposite the receiving ground plane,

a voltage source with one lead connected to the receiving electrode array, and

an output resistor connecting the other lead of said voltage source to ground,

whereby when a Lamb wave travels along the propagation medium between said receiving electrode array and said receiving ground plane, the capacitance between the electrode array and the ground plane varies due to the deformation of the propagation medium, producing an alternative current in the output resistor and an output electrical signal across the output resistor representative of the Lamb waves propagating along said propagation medium.

6. An ultrasonic sensor comprising:

a composite structure comprising (a) a supporting frame of a first material and (b) a propagation medium comprising a thin planar sheet of a second, different material capable of supporting Lamb waves, supported by said supporting frame, said sheet having a thickness very much thinner than the wave to be propagated thereon having some physical characteristic determined by the value of a measurand acting thereon, said physical characteristic determining the propagation characteristics of Lamb waves to be propagated along the medium,

electrical means coupled to be propagation medium for producing Lamb waves in the propagation medium,

output means for producing an electrical signal representative of the determined propagation characteristics of the Lamb waves propagating along the propagation medium,

measuring means for measuring selected characteristics of said electrical signal,

whereby when said sensor is acted on by a measurand, the physical characteristics of said propagation medium are determined and said electrical signal characteristics are also determined, so that said measuring means indicates the value of the measurand,

wherein the propagation medium comprises a planar sheet of nonconducting and non-piezoelectric material, and

the electrical means includes electrode means for inducing a plurality of electrical fields at various positions across the nonconducting material, said fields having sufficient intensity to deform the material and thereby generate Lamb waves in the propagation medium with no need for a piezoelectric layer in the propagation medium, and

the propagation medium including on its outer surfaces a layer of protective material.

7. The sensor as recited in claim 6, wherein the protective material is Teflon.

8. The sensor as recited in claim 6, wherein the protective material is silicone.

9. An ultrasonic sensor comprising:

a propagation medium comprising a thin planar sheet of material capable of supporting Lamb waves, said sheet having a thickness which is no greater than about twenty micrometers, and having some physical characteristic determined by the value of a measurand acting thereon, said physical characteristic determining the propagation characteristics of Lamb waves to be propagated along the medium, said propagation medium including a layer of silicon nitride and a layer of piezoelectric material,

electrical means coupled to the propagation medium for producing Lamb waves in the propagation medium, said electrical means including means for producing both symmetrical and antisymmetrical Lamb waves in the propagation medium,

output means for producing an electrical signal representative of the determined propagation characteristics of the Lamb waves propagating along the propagation medium;

measuring means for measuring selected characteristics of said electrical signal, said output means including a receiving transducer, coupled to the propagation medium, for producing an electrical signal representative of the Lamb waves propagating along said propagation medium,

the electrical means including a launching transducer, coupled to the propagation medium, for generating Lamb waves in the propagation medium,

a feedback path between the receiving and launching transducers for providing feedback from the receiving transducer to the launching transducer, and

a feedback amplifier in the feedback path for amplifying said electrical signal produced by the receiving transducer and fed back to the launching transducer, the sensor forming an oscillator in which Lamb waves are continuously propagated along the propagation medium,

the measuring means including frequency measuring means for measuring the oscillation frequency,

a phase-locked loop circuit taking its input from the output of the feedback amplifier, and

filter means connected between the phase-locked loop circuit and the measuring means for preventing slowly-varying signals from the feedback amplifier from reaching the measuring means.

10. A method for sensing a measurand, comprising the steps of:

propagating Lamb waves along a propagation medium capable of supporting Lamb waves, said waves having a wave velocity for the lowest frequency antisymmetric mode of less than about 1500 meters per second;

producing an electrical signal representative of the Lamb waves propagating along said propagation medium; and

measuring the characteristics of said electrical signal representing the Lamb waves propagating along the propagation medium,

whereby when the propagation medium is acted on by a measurand, the measured characteristics of said electrical signal provide an indication of the measurand.

11. The method of claim 10, wherein the step of propagating Lamb waves along the propagation medium is performed with the propagation medium in contact with a fluid.

12. The method of claim 11, wherein the fluid in contact with the propagation medium is a liquid.

13. The method of claim 10, wherein the step of propagating Lamb waves along a propagation medium includes propagating Lamb waves at different wavelengths,

the step of producing an electrical signal representative of the Lamb waves includes producing a different electrical signal for each wavelength, and

the step of measuring the characteristics of said electrical signal includes measuring the characteristics of each said different electrical signal for each wavelength,

whereby the measured characteristics of each wavelength provides indication of a different measurand.

14. The method of claim 13, wherein the step of propagating Lamb waves along a propagation medium at different wavelengths comprises propagating said different wavelengths successively.

15. The method of claim 13, wherein the step of propagating Lamb waves along a propagation medium at different wavelengths comprises propagating said different wavelengths simultaneously.

16. The method of claim 10, wherein the step of propagating Lamb waves along a propagation medium includes propagating Lamb waves in at least two different directions;

the step of producing an electrical signal representative of the Lamb waves propagating along said propagation medium includes producing two separate electrical signals, each representative of a different one of the set of propagation Lamb waves; and

the step of measuring the characteristics of said electrical signal representing the Lamb waves propagating along the propagation medium includes measuring the characteristics of each separate electrical signal,

whereby the measured characteristics of each separate electrical signal provides an indication of a different measured.

17. The method of claim 10, including the steps of:

providing a layer of sorptive material on one of the outer surfaces of the propagation path;

sorbing a substance into the layer of sorptive material; and

gradually applying desorbing energy to the propagation medium, including the layer of sorptive material, thereby slowly desorbing said substance from the sorptive layer,

whereby the desorption of the sorptive layer changes the measured characteristics of the electrical signal.

18. The method of claim 17, wherein the step of applying desorbing energy to the propagation medium includes directing an optical beam through the propagation medium.

19. The method of claim 17, wherein the step of applying desorbing energy to the propagation medium comprises heating said medium.

20. The method of claim 17, wherein the step of heating the propagation medium includes directing an optical beam through the propagation medium, parallel to its plane.

21. The method of claim 17, wherein the step of heating the propagation medium includes applying electrical power to an electrical heating element adjacent the propagation medium.

22. The method of claim 10, including the steps of:

separating the electrical signal into a plurality of bands of frequency constituents;

amplifying each said frequency constituent signal;

measuring the frequency characteristics of each said constituent signal;

combining said amplified constituent signals; and

feeding the combined and amplified signal back to a launching location on the propagation medium from which said Lamb waves propagate,

whereby the sensor forms an assembly of oscillators which operate simultaneously to provide indications of a plurality of different measurands.

23. The method of claim 10, wherein the propagation medium includes material having piezoelectric and semiconductive properties and including the steps of:

producing an electrical field along a propagation path such that the Lamb waves propagating along said path are amplified; and

feeding the amplified signal back from the receiving location to a launching location on the propagation medium from which said Lamb waves propagate,

whereby the sensor forms an oscillator which operates at the frequency of the Lamb waves propagating along said medium.

24. The method of claim 10, wherein the step of propagating said Lamb waves along the propagation medium includes launching said Lamb waves at a launching location on the propagation medium,

the step of producing an electrical signal representative of the Lamb waves propagating along said propagation medium includes varying the frequency of Lamb waves launched at the launching location about the frequency of maximum coupling, and

the step of measuring the characteristics of said electrical signal representing the Lamb waves propagating along the propagation medium includes measuring the current and voltage supplied to the launching location at the frequency of maximum coupling.

25. An ultrasonic sensor comprising:

a supporting frame of a first material and a propagation medium comprising a thin planar sheet of a second, different material capable of supporting Lamb waves, supported peripherally by the supporting frame, said sheet having a thickness very much thinner than the wavelength of Lamb waves to be propagated thereon and having some physical characteristic determined by a measurand acting thereon, said physical characteristic determining the propagation characteristics of Lamb waves to be propagated along the propagation medium,

electrical means coupled to the propagation medium for producing Lamb waves in the propagation medium,

output means for producing an electrical signal representative of the determined propagation characteristics of the Lamb waves propagating along the propagation medium, said electrical means and said output means comprising separate, spaced apart transducers located on said thin planar sheet, and

measuring means for measuring selected characteristics of said electrical signal,

whereby when said sensor is acted on by a measurand, the physical characteristic of said propagation medium is determined and said electrical signal characteristics are also determined, so that said measuring means provides an indication of the measurand.