Plate-mode ultrasonic sensor
First Claim
1. An ultrasonic sensor comprising:
- a propagation medium comprising a thin planar sheet of material capable of supporting Lamb waves, said sheet having a thickness which is not greater than about twenty micrometers, and having some physical characteristic determined by a measurand acting thereon, said physical characteristic determining the propagation characteristics of Lamb waves to be propagated along the medium, said propagation medium including a layer of silicon nitride and a layer of piezoelectric material,electrical means coupled to the propagation medium for producing Lamb waves in the propagation medium, said electrical means including means for producing both symmetrical and antisymmetrical Lamb waves in the propagation medium,output means for producing an electrical signal representative of the determined propagation characteristic of the Lamb waves propagating along the propagation medium,measuring means for measuring a selected characteristic of said electrical signal, said output means including a receiving transducer, coupled to the propagation medium, for producing an electrical signal representative of the Lamb waves propagating along said propagation medium,the electrical means including a launching transducer, coupled to the propagation medium, for generating Lamb waves in the propagation medium,a feedback path between the receiving and launching transducers for providing feedback from the receiving transducer to the launching transducer,a feedback amplifier in the feedback path for amplifying said electrical signal produced by the receiving transducer and fed back to the launching transducer, the sensor forming an oscillator in which Lamb waves are continuously propagated along the propagation medium,the measuring means including frequency measuring means for measuring the oscillation frequency, andfrequency blocking means for preventing signal frequencies outside a certain range from reaching the feedback amplifier, said frequency blocking means being adjustable so that the frequencies which are blocked may be varied,whereby the sensor may be operated successively at several different frequencies to indicate different measurands.
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Abstract
An ultrasonic sensor which has a thin planar sheet of material forming a Lamb wave propagation medium, the sheet having a thickness which is no greater than about twenty microns. The sensor also includes a Lamb wave generator for generating Lamb waves in the propagation medium and an output device for producing an electrical signal representative of the propagation characteristics of the Lamb waves propagating along the propagation medium. A measuring device is included in the sensor to measure selected characteristics of the output electrical signal. The propagation medium has some physical characteristics that are determined by the value of a measurand acting on the medium and the determined physical characteristics determine the propagation characteristics of the Lamb waves which are propagated along the medium. When the sensor is acted on by a measurand to determine the physical characteristics of the propagation medium, the characteristics of the electrical signal are also determined. The measuring device measures the electrical signal and provides an indication of the measurand value. Several sensing arrangements are also disclosed as well as methods for making the planar propagation medium.
116 Citations
25 Claims
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1. An ultrasonic sensor comprising:
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a propagation medium comprising a thin planar sheet of material capable of supporting Lamb waves, said sheet having a thickness which is not greater than about twenty micrometers, and having some physical characteristic determined by a measurand acting thereon, said physical characteristic determining the propagation characteristics of Lamb waves to be propagated along the medium, said propagation medium including a layer of silicon nitride and a layer of piezoelectric material, electrical means coupled to the propagation medium for producing Lamb waves in the propagation medium, said electrical means including means for producing both symmetrical and antisymmetrical Lamb waves in the propagation medium, output means for producing an electrical signal representative of the determined propagation characteristic of the Lamb waves propagating along the propagation medium, measuring means for measuring a selected characteristic of said electrical signal, said output means including a receiving transducer, coupled to the propagation medium, for producing an electrical signal representative of the Lamb waves propagating along said propagation medium, the electrical means including a launching transducer, coupled to the propagation medium, for generating Lamb waves in the propagation medium, a feedback path between the receiving and launching transducers for providing feedback from the receiving transducer to the launching transducer, a feedback amplifier in the feedback path for amplifying said electrical signal produced by the receiving transducer and fed back to the launching transducer, the sensor forming an oscillator in which Lamb waves are continuously propagated along the propagation medium, the measuring means including frequency measuring means for measuring the oscillation frequency, and frequency blocking means for preventing signal frequencies outside a certain range from reaching the feedback amplifier, said frequency blocking means being adjustable so that the frequencies which are blocked may be varied, whereby the sensor may be operated successively at several different frequencies to indicate different measurands. - View Dependent Claims (2)
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3. An ultrasonic sensor comprising:
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a propagation medium comprising a thin planar sheet of material capable of supporting Lamb waves, said sheet having a thickness which is not greater than about twenty micrometers, and having some physical characteristic determined by a measurand acting thereon, said physical characteristic determining the propagation characteristics of Lamb waves to be propagated along the medium, electrical means coupled to the propagation medium for producing Lamb waves in the propagation medium, output means for producing an electrical signal representative of the determined propagation characteristic of the Lamb waves propagating along the propagation medium, measuring means for measuring selected characteristics of said electrical signal, whereby when said sensor is acted on by a measurand, the physical characteristic of said propagation medium is determined and said electrical signal characteristics are also determined, so that said measuring means provides an indication of the measurand, and heating means in contact with said propagation medium for heating a propagation path, and wherein the propagation medium includes a layer of sorptive material forming an outer surface of said propagation medium, whereby the heating means may heat the propagation medium, including the sorptive material, causing vapors or gases on the surface or in the interior of the sorptive material to be desorbed, thereby affecting a certain characteristic of the propagation medium and the characteristic of the Lamb waves propagating therethrough, the sensor forming a thermal desorption spectrometer and a vapor or gas sensor having increased selectivity.
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4. An ultrasonic sensor comprising:
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a propagation medium comprising a thin planar sheet of material capable of supporting Lamb waves, said sheet having a thickness which is no greater than about twenty micrometers, and having some physical characteristic determined by a measurand acting thereon, said physical characteristic determining the propagation characteristics of Lamb waves to be propagated along the medium; electrical means coupled to the propagation medium for producing Lamb waves in the propagation medium; output means for producing an electrical signal representative of the determined propagation characteristics of the Lamb waves propagating along the propagation medium, and measuring means for measuring selected characteristics of said electrical signal, whereby when said sensor is acted on by a measurand, the physical characteristic of said propagation medium is determined and said electrical signal characteristics are also determined, so that said measuring means provides an indication of the measurand, said output means including a receiving transducer coupled to the propagation medium for producing an electrical signal representative of the Lamb waves propagating along said propagation medium, the electrical means including a launching transducer coupled to the propagation medium for generating Lamb waves in the propagation medium, a plurality of feedback paths between the receiving and launching transducers for providing feedback from the receiving transducer to the launching transducer, a band pass filter in each said feedback path for passing a different range of signal frequencies, and a feedback amplifier in each said feedback path for amplifying said electrical signal produced by the receiving transducer and passed by the band pass filter to be fed back to the launching transducer, the sensor forming an oscillator in which Lamb waves are continuously propagated along the propagation medium, and wherein the measuring means includes a separate frequency measuring means for measuring the oscillation frequency of each said feedback path, whereby the sensor can simultaneously sense several different measurands, one with each frequency measuring means.
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5. An ultrasonic sensor comprising:
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a composite structure comprising (a) a supporting frame of a first material and (b) a propagation medium comprising a thin planar sheet of a second, different material, capable of supporting Lamb waves, supported by said supporting frame, said sheet having a thickness very much thinner than the wave to be propagated thereon having some physical characteristic determined by a measurand acting thereon, said physical characteristic determining the propagation characteristics of Lamb waves to be propagated along the medium, electrical means coupled to the propagation medium for producing Lamb waves in the propagation medium, output means for producing an electrical signal representative of the determined propagation characteristic of the Lamb waves propagating along the propagation medium, and measuring means for measuring selected characteristics of said electrical signal, whereby when said sensor is acted on by a measurand, the physical characteristic of said propagation medium is determined and said electrical signal characteristics are also determined, so that said measuring means provides an indication of the measurand, wherein the propagation medium comprises a planar sheet of nonconducting and non-piezoelectric material, and the electrical means includes electrode means for inducing a plurality of electrical fields at various positions across the nonconducting material, said fields having sufficient intensity to deform the material and thereby generate Lamb waves in the propagation medium with no need for a piezoelectric layer in the propagation medium, and the output means including a receiving ground plane on one surface of the propagation medium with an electrical connection to ground, a receiving electrode array on the surface of the propagation medium opposite the receiving ground plane, a voltage source with one lead connected to the receiving electrode array, and an output resistor connecting the other lead of said voltage source to ground, whereby when a Lamb wave travels along the propagation medium between said receiving electrode array and said receiving ground plane, the capacitance between the electrode array and the ground plane varies due to the deformation of the propagation medium, producing an alternative current in the output resistor and an output electrical signal across the output resistor representative of the Lamb waves propagating along said propagation medium.
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6. An ultrasonic sensor comprising:
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a composite structure comprising (a) a supporting frame of a first material and (b) a propagation medium comprising a thin planar sheet of a second, different material capable of supporting Lamb waves, supported by said supporting frame, said sheet having a thickness very much thinner than the wave to be propagated thereon having some physical characteristic determined by the value of a measurand acting thereon, said physical characteristic determining the propagation characteristics of Lamb waves to be propagated along the medium, electrical means coupled to be propagation medium for producing Lamb waves in the propagation medium, output means for producing an electrical signal representative of the determined propagation characteristics of the Lamb waves propagating along the propagation medium, measuring means for measuring selected characteristics of said electrical signal, whereby when said sensor is acted on by a measurand, the physical characteristics of said propagation medium are determined and said electrical signal characteristics are also determined, so that said measuring means indicates the value of the measurand, wherein the propagation medium comprises a planar sheet of nonconducting and non-piezoelectric material, and the electrical means includes electrode means for inducing a plurality of electrical fields at various positions across the nonconducting material, said fields having sufficient intensity to deform the material and thereby generate Lamb waves in the propagation medium with no need for a piezoelectric layer in the propagation medium, and the propagation medium including on its outer surfaces a layer of protective material. - View Dependent Claims (7, 8)
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9. An ultrasonic sensor comprising:
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a propagation medium comprising a thin planar sheet of material capable of supporting Lamb waves, said sheet having a thickness which is no greater than about twenty micrometers, and having some physical characteristic determined by the value of a measurand acting thereon, said physical characteristic determining the propagation characteristics of Lamb waves to be propagated along the medium, said propagation medium including a layer of silicon nitride and a layer of piezoelectric material, electrical means coupled to the propagation medium for producing Lamb waves in the propagation medium, said electrical means including means for producing both symmetrical and antisymmetrical Lamb waves in the propagation medium, output means for producing an electrical signal representative of the determined propagation characteristics of the Lamb waves propagating along the propagation medium; measuring means for measuring selected characteristics of said electrical signal, said output means including a receiving transducer, coupled to the propagation medium, for producing an electrical signal representative of the Lamb waves propagating along said propagation medium, the electrical means including a launching transducer, coupled to the propagation medium, for generating Lamb waves in the propagation medium, a feedback path between the receiving and launching transducers for providing feedback from the receiving transducer to the launching transducer, and a feedback amplifier in the feedback path for amplifying said electrical signal produced by the receiving transducer and fed back to the launching transducer, the sensor forming an oscillator in which Lamb waves are continuously propagated along the propagation medium, the measuring means including frequency measuring means for measuring the oscillation frequency, a phase-locked loop circuit taking its input from the output of the feedback amplifier, and filter means connected between the phase-locked loop circuit and the measuring means for preventing slowly-varying signals from the feedback amplifier from reaching the measuring means.
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10. A method for sensing a measurand, comprising the steps of:
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propagating Lamb waves along a propagation medium capable of supporting Lamb waves, said waves having a wave velocity for the lowest frequency antisymmetric mode of less than about 1500 meters per second; producing an electrical signal representative of the Lamb waves propagating along said propagation medium; and measuring the characteristics of said electrical signal representing the Lamb waves propagating along the propagation medium, whereby when the propagation medium is acted on by a measurand, the measured characteristics of said electrical signal provide an indication of the measurand. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. An ultrasonic sensor comprising:
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a supporting frame of a first material and a propagation medium comprising a thin planar sheet of a second, different material capable of supporting Lamb waves, supported peripherally by the supporting frame, said sheet having a thickness very much thinner than the wavelength of Lamb waves to be propagated thereon and having some physical characteristic determined by a measurand acting thereon, said physical characteristic determining the propagation characteristics of Lamb waves to be propagated along the propagation medium, electrical means coupled to the propagation medium for producing Lamb waves in the propagation medium, output means for producing an electrical signal representative of the determined propagation characteristics of the Lamb waves propagating along the propagation medium, said electrical means and said output means comprising separate, spaced apart transducers located on said thin planar sheet, and measuring means for measuring selected characteristics of said electrical signal, whereby when said sensor is acted on by a measurand, the physical characteristic of said propagation medium is determined and said electrical signal characteristics are also determined, so that said measuring means provides an indication of the measurand.
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Specification