Pressure sensor
First Claim
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1. A pressure sensor, comprising:
- a ceramic substrate formed from a first unsintered ceramic material;
a diaphragm capable of deformation under pressure, and formed of a second unsintered ceramic material having a factor of shrinkage upon sintering small than that of the first material, wherein said diaphragm is fixed to the periphery of a surface of said ceramic substrate to form an integral assembly having a hollow space formed therebetween upon sintering due to the difference in the factor of shrinkage of the first and second materials; and
pressure sensing means for sensing pressure variations based on the deformation of said diaphragm.
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Abstract
A pressure sensor having a ceramic substrate formed from a first unsintered ceramic material, and a diaphragm capable of deformation under pressure, and formed of a second unsintered ceramic material having a factor of shrinkage upon sintering smaller than that of the first material. The diaphragm is fixed to the periphery of a surface of the ceramic substrate to form an integral assembly having a hollow space formed therebetween upon sintering due to the difference in the factor of shrinkage of the first and second materials.
31 Citations
25 Claims
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1. A pressure sensor, comprising:
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a ceramic substrate formed from a first unsintered ceramic material; a diaphragm capable of deformation under pressure, and formed of a second unsintered ceramic material having a factor of shrinkage upon sintering small than that of the first material, wherein said diaphragm is fixed to the periphery of a surface of said ceramic substrate to form an integral assembly having a hollow space formed therebetween upon sintering due to the difference in the factor of shrinkage of the first and second materials; and pressure sensing means for sensing pressure variations based on the deformation of said diaphragm.
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2. A pressure sensor, comprising:
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a ceramic substrate formed from a first unsintered ceramic material; a diaphragm capable of deformation under pressure, and formed of a second unsintered ceramic material having a factor of shrinkage upon sintering smaller than that of the first material, wherein said diaphragm is fixed to the periphery of a surface of said ceramic substrate to form an integral assembly having a hollow space formed therebetween upon sintering due to the difference in the factor of shrinkage of the first and second materials; a first electrode formed on a surface of said ceramic substrate which faces said diaphragm; and a second electrode formed on said diaphragm in opposition to said first electrode. - View Dependent Claims (3, 4, 5)
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6. A pressure sensor, comprising:
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a ceramic substrate formed from a first unsintered ceramic material; a diaphragm capable of deformation under pressure, and formed of a second unsintered ceramic material having a factor of shrinkage upon sintering smaller than that of the first material, wherein said diaphragm is fixed to the periphery of a surface of said ceramic substrate to form an integral assembly having a hollow space formed therebetween upon sintering due to the difference in the factor of shrinkage of the first and second materials; and a resistor formed on an outer surface of said diaphragm, wherein the resistance of said resistor varies upon being distorted. - View Dependent Claims (7)
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8. A pressure sensor, comprising:
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a ceramic substrate formed from a first unsintered ceramic material; a diaphragm capable of deformation under pressure, and formed of a second unsintered ceramic material having a factor of shrinkage upon sintering smaller than that of the first material, wherein said diaphragm is fixed to the periphery of a surface of said ceramic substrate to form an integral assembly having a hollow space formed therebetween upon sintering due to the difference in the factor of shrinkage of the first and second materials; pressure sensing means, formed on an outer surface of said diaphragm, for sensing pressure variations based on the deformation of said diaphragm; and a protective layer formed over said pressure sensing means and the outer surface of said diaphragm.
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9. A pressure sensor, comprising:
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a ceramic substrate formed from a first unsintered ceramic material; a diaphragm capable of deformation under pressure, and formed of a second unsintered ceramic material having a factor of shrinkage upon sintering smaller than that of the first material, wherein said diaphragm is fixed to the periphery of a surface of said ceramic substrate to form an integral assembly having a hollow space formed therebetween upon sintering due to the difference in the factor of shrinkage of the first and second materials; pressure sensing means for sensing pressure variations based on the deformation of said diaphragm; and compensating means, formed between said ceramic substrate and said diaphragm, for adjusting the difference in the factor of shrinkage between said diaphragm and said ceramic substrate. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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Specification