×

Method of making a digital flexure beam accelerometer

  • US 5,192,395 A
  • Filed: 10/12/1990
  • Issued: 03/09/1993
  • Est. Priority Date: 10/12/1990
  • Status: Expired due to Term
First Claim
Patent Images

1. A process for fabrication of sensor elements comprising the following:

  • a) forming a ground plane layer upon a substrate;

    b) fabricating addressing circuitry and electrical contacts upon said ground plane;

    c) spinning a spacer layer upon the entire substrate;

    d) depositing a layer of thin metal upon said spacer layer;

    e) patterning said thin metal layer;

    g) depositing a layer of heavy metal upon said thin metal layer;

    h) patterning and forming said heavy metal layer so each sensor element has a different mass;

    i) dividing said substrate into individual chips; and

    j) undercutting said spacer layer.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×