Optical submicron aerosol particle detector

• US 5,192,870 A
• Filed: 01/14/1992
• Issued: 03/09/1993
• Est. Priority Date: 01/14/1992
• Status: Expired due to Term

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Hobbs, Philip C. D., Batchelder, John S., DeCain, Donald M.
• Primary Examiner(s): Nelms, David C.
• Application Number:
  US07/820,709
• Time in Patent Office: 420 Days
• Field of Search: 250/573, 250/574, 250/575, 250/225, 356/28.5, 356/28, 356/336, 356/338, 356/342, 356/343
• US Class Current: 250/574
• CPC Class Codes: G01N 15/0205 by optical means
• CPC Class Codes: G01N 15/1434 Optical arrangements
• CPC Class Codes: G01N 2015/0238 Single particle scatter
• CPC Class Codes: G01N 2015/145 by pattern of light, e.g. fringe pattern
• CPC Class Codes: G01N 21/94 Investigating contamination, e.g. dust G01N21/85 takes precedence

Abstract

A particle detector that determines the presence of particles in an enclosed volume includes a laser that directs a coherent optical beam to a beam splitter that produces first and second divergent beams. An optical system images the point of origin of the two divergent beams within the beam splitter into the enclosed volume, whereby the first and second beams are caused to intersect and interfere at an inspection region within the volume. A detector is positioned adjacent the volume and is responsive to light scattered from one of the beams, as a result of a particle passing through the inspection region, to produce an electrical signal indicative of the intensity of the scattered light. A signal processor analyzes the electrical signals and to determine the presence of the particle. An embodiment of the invention includes an acousto-optic modulator to enable one of the beams to be frequency shifted from the other beam so as to enable the presence of a carrier signal on which a particle'"'"'s Doppler frequency is modulated. Another embodiment relies upon the Doppler modulation of a reflected optical beam to create an interference pattern at a detector.

Claims

1. A particle detector for detecting particles within an enclosed volume, the detector comprising:

beam splitter means;

laser means for directing a coherent optical beam along a path to said beam splitter means, said beam splitter means splitting said coherent optical beam into at least first and second beams, the first beam deflected from the path of said second beam, both said first and second beams having a point of origin in the vicinity of said beam splitter means;

optical means for imaging said point of origin into said enclosed volume, whereby said first and second beams are caused to cross and interfere at an interaction region within said enclosed volume;

detector means responsive to at least one said beam for sensing optical energy scattered by a particle'"'"'s passage through said interaction region, said particle creating a Doppler shifted burst in said optical energy, said detector means producing an electrical signal including a Doppler tone burst analogue of said Doppler shifted burst; and

means for processing said electrical signal to determine the presence of said particle in said interaction region.

2. The particle detector as recited in claim wherein said optical means images said first and second beams through one portal in said, enclosed volume and said detector means is positioned to detect forward scattered optical energy that passes outside said enclosed volume through another portal.

3. The particle detector as recited in claim wherein said processing means includes filter means for isolating said Doppler tone burst and threshold means for determining if an envelope of said Doppler tone burst exceeds a preselected limit and indicates the presence of a particle.

4. A particle detector for detecting particles within an enclosed volume, said particle detector comprising:

a modulation frequency source of frequency f;

acousto-optic (A/0) means connected to said modulation frequency source;

laser means for directing a coherent optical beam along a path to said A/O means, said A/O means splitting said coherent optical beam at a point of origin into at least first and second optical beams, said first optical beam exhibiting a frequency that is offset from the frequency of said second optical beam by the frequency of said modulation frequency source, said first optical beam deflected by said A/0 means from the path of said second optical beam;

optical means for imaging said point of origin into said enclosed volume, whereby said first and second optical beams are caused to intersect and interfere at an interaction region within said enclosed volume;

detector means responsive to scattered optical energy that results when a particle passes through said interaction region, for sensing a Doppler shifted light burst therein and producing an electrical signal that includes a Doppler tone burst analogue of said Doppler shifted light burst; and

means for processing said electrical signal to extract the Doppler tone burst'"'"'s envelope to enable determination of the presence of a particle in said interaction region.

5. The particle detector as recited in claim wherein said detector means is positioned to detect forward scattered optical energy from a particle in said interaction region between said first and second beams.

6. The particle detector as recited in claim 5 wherein said A/0 means is a Bragg cell.

7. The particle detector as recited in claim 5 wherein said optical means images said first and second beams through one portal in said enclosed volume and said detector means is positioned to detect forward scattered energy originating at said interaction region as it passes outside said enclosed volume through another portal.

8. The particle detector as recited in claim 5 wherein interference between said first and second beams at said interaction regions is manifested by a fringe pattern whose fringe edges move in accordance with said frequency f, whereby a particle passing through said interaction region creates a Doppler tone burst whose frequency is dependent upon the rate of movement of said particle through said interaction region.

9. The particle detector as recited in claim wherein said processing means includes filter means for isolating said Doppler tone burst and threshold means for determining if the envelope of said Doppler tone burst exceeds a pre-established limit.

10. The particle detector as recited in claim 9 wherein said processor means further includes a pair of parallel-connected mixers, each receiving said electrical signal, and local oscillator means for applying signals of frequency f displaced from each other by 90°

to said mixers, and further means for summing the outputs of said mixers to produce a smoothed Doppler tone burst envelope for application to said threshold means.

11. A particle detector for detecting particles within an enclosed volume, said detector comprising:

laser means for producing a polarized optical beam and directing it along a path;

polarizing beam splitting means in said path for dividing said polarized optical beam into first and second linearly polarized beams

quarter wave means for altering the linear polarization of said first beam into a circular polarization of first helicity and directing said altered first beam into said volume to interact with a particle and acquire a resultant Doppler shifted light burst, said quarter wave means responsive to back scattered optical energy of opposite helicity originating from said first beam'"'"'s interaction with said particle, to alter said back scattered optical energy to a linear polarization having a polarization vector orthogonal to a direction of polarization of said second beam, and to direct said linearly polarized back scattered optical energy to said polarizing beam splitter for combination with said second beam;

polarizing beam splitting means positioned in the path of said combined second beam and back scattered optical energy, and having orthogonal axes oriented at an angle with respect to the orthogonal polarization states of said combined second beam and back scattered optical energy; and

optical detection means responsive to a pair of beams emanating from said polarizing beam splitting means for detecting the presence of a Doppler shift in said beams which indicates the presence of a particle in said enclosed volume..

12. The particle detector as recited in claim 11 further comprising an internally reflective retro reflector associated with said polarizing beam splitting means and positioned in the path of said second beam, to direct said second beam back through said polarizing beam splitter for combination with said back scattered optical energy, said retro reflector rotatable so as to enable a change in orientation of the polarization state of said second beam.

13. The particle detector as recited in claim 11 wherein said optical detection means includes filter means for isolating said Doppler tone burst and threshold means for determining if the envelope of said Doppler tone burst exceeds a pre-established limit.

14. The particle detector as recited in claim 11 wherein the axes of said polarizing beam splitting means are oriented at a 45°

rotational offset from the orthogonal polarization states of said combined second beam and back scattered optical energy.

15. The particle detector as recited in claim 14 wherein said optical detection means includes a photo detector for each said beam from said polarizing beam splitting means, one said photo detector providing a signal indicative of a subtraction of optical energies parallel to one axis of said polarizing beam splitting means and a second said photo detector providing a signal indicative of an addition of optical energies parallel to an orthogonal axis of said polarizing beam splitting means.

16. The particle detector as recited in claim 15 further comprising:

means for deriving a sample signal from said laser means and subtracting said signal from signals produced by said photo detection to reduce laser noise included therein.