Apparatus and method for method for spatially- and spectrally-resolved measurements
First Claim
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1. A confocal scanning beam optical microscope for spectrally-resolved measurements comprisingmeans for supporting a specimen to be observed and measured,an illumination source producing a light beam directed along an optical path toward said specimen,means for focusing the light beam to a diffraction-limited spot in a prescribed specimen plane,means for scanning the light beam to move the diffraction-limited spot in a predetermined scan pattern on said specimen plane,a detection arm receiving light reflected, scattered or emitted from said diffraction-limited spot in said specimen plane comprisinga pinhole and a focusing lens for obtaining a focal point for confocal detection of the light returning from said specimen,a detector placed behind said pinhole,means for spectrally resolving said reflected, scattered or emitted light passing from said specimen back toward said focusing lens, pinhole and detector,a beamsplitter reflecting light returning from said specimen into said detection arm,wherein said spectrally-resolving means in said detection arm is selected from the group consisting of diffraction gratings and prisms that can be rotated to direct light of various wavelengths towards said focusing lens, whereby the diffraction-limited spot at the specimen acts like the entrance aperture of an integrated monochromator, and the pinhole in front of the detector acts like its exit aperture,means for measuring the intensity distribution with respect to wavelength of said reflected, scattered or emitted light.
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Abstract
A scanning optical microscope or mapping system for spectrally-resolved measurement of light reflected, emitted or scatttered from a specimen is disclosed, in which the spectrally-resolving element is integrated into the detection arm of the microscope or mapping system to result in good photon collection efficiency as well as good spectral and spatial resolution. A confocal version of the microscope is disclosed which will be of particular interest in fluorescence microscopy, and the non-confocal mapping system will be of particular interest in photoluminescence mapping of semiconductor wafers.
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Citations
8 Claims
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1. A confocal scanning beam optical microscope for spectrally-resolved measurements comprising
means for supporting a specimen to be observed and measured, an illumination source producing a light beam directed along an optical path toward said specimen, means for focusing the light beam to a diffraction-limited spot in a prescribed specimen plane, means for scanning the light beam to move the diffraction-limited spot in a predetermined scan pattern on said specimen plane, a detection arm receiving light reflected, scattered or emitted from said diffraction-limited spot in said specimen plane comprising a pinhole and a focusing lens for obtaining a focal point for confocal detection of the light returning from said specimen, a detector placed behind said pinhole, means for spectrally resolving said reflected, scattered or emitted light passing from said specimen back toward said focusing lens, pinhole and detector, a beamsplitter reflecting light returning from said specimen into said detection arm, wherein said spectrally-resolving means in said detection arm is selected from the group consisting of diffraction gratings and prisms that can be rotated to direct light of various wavelengths towards said focusing lens, whereby the diffraction-limited spot at the specimen acts like the entrance aperture of an integrated monochromator, and the pinhole in front of the detector acts like its exit aperture, means for measuring the intensity distribution with respect to wavelength of said reflected, scattered or emitted light.
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2. A confocal scanning beam optical microscope for spectrally-resolved measurements comprising
means for supporting a specimen to be observed and measured, an illumination source producing a light beam directed along an optical path toward said specimen, means for focusing the light beam to a diffraction-limited spot in a prescribed specimen plane, means for scanning the light beam to move the diffraction-limited spot in a predetermined scan pattern on said specimen plane, a detection arm receiving light reflected, scattered or emitted from said diffraction-limited spot in said specimen plane comprising a pinhole and a focusing lens for obtaining a focal point for confocal detection of the light returning from said specimen, a detector placed behind said pinhole, means for spectrally resolving said reflected, scattered or emitted light passing from said specimen back toward said second focusing lens, pinhole and detector, a beamsplitter reflecting light returning from said specimen into said detection arm, wherein said spectrally-resolving means in said detection arm is selected from the group consisting of Fabry-Perot interferometers and Fourier Transform spectrometers, means for measuring the intensity distribution with respect to wavelength of said reflected, scattered or emitted light.
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3. A confocal scanning stage optical microscope for spectrally-resolved measurements comprising
means for supporting a specimen to be observed and measured, an illumination source producing a light beam directed along an optical path toward said specimen, means for focusing the light beam to a diffraction-limited spot in a prescribed specimen plane, means for translating the specimen such that said diffraction-limited spot moves relative to the specimen in a raster scan confined to said prescribed specimen plane, a detection arm receiving light reflected, scattered or emitted from said diffraction-limited spot in said specimen plane comprising a pinhole and a focusing lens for obtaining a focal point for confocal detection of the light returning from said specimen, a detector placed behind said pinhole, means for spectrally resolving said reflected, scattered or emitted light passing from said specimen back toward said focusing lens, pinhole and detector, a beamsplitter reflecting light returning from said specimen into said detection arm, wherein said spectrally-resolving means in said detection arm is selected from the group consisting of diffraction gratings and prisms that can be rotated to direct light of various wavelengths towards said focusing lens, whereby the diffraction-limited spot at the specimen acts like the entrance aperture of an integrated monochromator, and the pinhole in front of the detector acts like its exit aperture, means for measuring the intensity distribution with respect to wavelength of said reflected, scattered or emitted light.
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4. A confocal scanning stage optical microscope for spectrally-resolved measurements comprising
means for supporting a specimen to be observed and measured, an illumination source producing a light beam directed along an optical path toward said specimen, means for focusing the light beam to a diffraction-limited spot in a prescribed specimen plane, means for translating the specimen such that said diffraction-limited spot moves relative to the specimen in a raster scan confined to said prescribed specimen plane, a detection arm receiving light reflected, scattered or emitted from said diffraction-limited spot in said specimen plane comprising a pinhole and a focusing lens for obtaining a focal point for confocal detection of the light returning from said specimen, a detector placed behind said pinhole, means for spectrally resolving said reflected, scattered or emitted light passing from said specimen back toward said focusing lens, pinhole and detector, a beamsplitter reflecting light returning from said specimen into said detection arm, wherein said spectrally-resolving means in said detection arm is selected from the group consisting of Fabry-Perot interferometers and Fourier Transform spectrometers, means for measuring the intensity distribution with respect to wavelength of said reflected, scattered or emitted light.
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5. A scanning beam optical microscope or mapping system for spectrally-resolved measurements comprising
means for supporting a specimen to be observed and measured, an illumination source producing a light beam directed along an optical path toward said specimen, means for focusing the light beam to an illuminated spot in a prescribed specimen plane, means for scanning the light beam to move said illuminated spot in a predetermined scan pattern on said specimen plane, a detection arm receiving light reflected, scattered or emitted from said illuminated spot in said specimen plane comprising an aperture and focusing lens, a detector placed behind said aperture, means for spectrally-resolving said reflected, scattered or emitted light passing form said illuminated spot in said specimen plane back towards said focusing lens, aperture and detector, a beamsplitter reflecting light returning from said specimen into said detection arm wherein said spectrally-resolving means in said detection arm is selected from the group consisting of diffraction gratings and prisms that can be rotated to direct light of various wavelengths towards said focusing lens, whereby the illuminated spot at the specimen acts like the entrance aperture of an integrated monochromator, and said aperture acts like its exit aperture, means for measuring the intensity distribution with respect to wavelength of said reflected, scattered or emitted light.
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6. A scanning beam optical microscope or mapping system for spectrally-resolved measurements comprising
means for supporting a specimen to be observed and measured, an illumination source producing a light beam directed along an optical path toward said specimen, means for focusing the light beam to an illuminated spot in a prescribed specimen plane, means for scanning the light beam to move said illuminated spot in a predetermined scan pattern on said specimen plane, a detection arm receiving light reflected, scattered or emitted from said illuminated spot in said specimen plane comprising an aperture and focusing lens, a detector placed behind said aperture, means for spectrally-resolving said reflected, scattered or emitted light passing from said illuminated spot in said specimen plane back towards said focusing lens, aperture and detector, a beamsplitter reflecting light returning from said specimen into said detection arm wherein said spectrally-resolving means in said detection arm is selected from the group consisting of Fabry-Perot interferometers and Fourier Transform spectrometers, means for measuring the intensity distribution with respect to wavelength of said reflected, scattered or emitted light.
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7. A scanning stage optical microscope or mapping system for spectrally-resolved measurements comprising
means for supporting a specimen to be observed and measured, an illumination source producing a light beam directed along an optical path toward said specimen, means for focusing the light beam to an illuminated spot in a prescribed specimen plane, means for translating the specimen such that said illuminated spot moves relative to the specimen in a raster scan in the prescribed specimen plane, a detection arm receiving light reflected, scattered or emitted from said illuminated spot in said specimen plane comprising an aperture and focusing lens, a detector placed behind said aperture, means for spectrally-resolving said reflected, scattered or emitted light passing from said illuminated spot in said specimen plane back towards said focusing lens, aperture and detector, a beamsplitter reflecting light returning from said specimen into said detection arm wherein said spectrally-resolving means in said detection arm is selected from the group consisting of Fabry-Perot interferometers and Fourier Transform spectrometers, means for measuring the intensity distribution with respect to wavelength of said reflected, scattered or emitted light.
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8. A scanning stage optical microscope or mapping system for spectrally-resolved measurements comprising
means for supporting a specimen to be observed and measured, an illumination source producing a light beam directed along an optical path toward said specimen, means for focusing the light beam to an illuminated spot in a prescribed specimen plane, means for translating the specimen such that said illuminated spot moves relative to the specimen in a raster scan in the prescribed specimen plane, a detection arm receiving light reflected, scattered or emitted from said illuminated spot in said specimen plane comprising an aperture and focusing lens, a detector placed behind said aperture, means for spectrally-resolving said reflected, scattered or emitted light passing from said illuminated spot in said specimen plane back towards said focusing lens, aperture and detector, a beamsplitter reflecting light returning from said specimen into said detection arm wherein said spectrally-resolving means in said detection arm is selected from the group consisting of diffraction gratings and prisms that can be rotated to direct light of various wavelengths towards said focusing lens, whereby the illuminated spot at the specimen acts like the entrance aperture of an integrated monochromator, and said aperture acts like its exit aperture, means for measuring the intensity distribution with respect to wavelength of said reflected, scattered or emitted light.
Specification
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Current AssigneeBiomedical Photometrics Incorporated (Confocal, Inc.)
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Original AssigneeA. E. Dixon
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InventorsDixon, Arthur E., Bowron, John W., Damaskinos, Savvas
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Primary Examiner(s)EVANS, FANNIE L
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Application NumberUS07/721,282Time in Patent Office622 DaysField of Search356/301, 356/317, 356/318, 356/326, 356/328, 356/346, 356/381, 356/382, 356/334, 250/458.1, 250/459.1, 250/461.1, 250/461.2US Class Current356/326CPC Class CodesG01J 3/2889 Rapid scan spectrometers; T...G01J 3/30 Measuring the intensity of ...G01N 21/6489 Photoluminescence of semico...G02B 21/0072 details concerning resoluti...G02B 21/0076 arrangements using fluoresc...
