Corona discharge treatment

• US 5,194,291 A
• Filed: 04/22/1991
• Issued: 03/16/1993
• Est. Priority Date: 04/22/1991
• Status: Expired due to Fees

• Current Assignee: General Atomics San Diego CA
• Original Assignee: General Atomics, Inc.
• Inventors: D'Aoust, James R., Ohkawa, Tihiro
• Primary Examiner(s): BUEKER, RICHARD R
• Application Number:
  US07/689,295
• Time in Patent Office: 694 Days
• Field of Search: 118/723, 427/39, 422/186.05, 422/186.06, 174/77 R, 174/74 A
• US Class Current: 148/278
• CPC Class Codes: C23C 16/505 using radio frequency discharges
• CPC Class Codes: H01T 19/00 Devices providing for corona discharge for charging electrographic elements G03G15/02

Abstract

Corona discharge treatment apparatus for treating or coating a surface of a conductive substrate includes a high voltage radio frequency power supply and a cable having a number of flexible conductors and other components. The cable has a first end connected to the power supply and a second end wherein the other cable components have been removed and the conductors extend from the remainder of the cable. The free ends of the conductors at the second end are disposed in a general non-parallel arrangement and the free end of each conductor is held in a separate insulator which extends beyond the free end it holds. Each free end is movable independently of the other free ends. The conductive substrate is held beneath the cable second end so that the upper surface is engaged by the insulators. The conductive substrate is grounded, and relative movement is effected between the second cable end and the conductive substrate while a gas mixture is introduced into the area of engagement between the upper surface and insulators.

Claims

1. Corona discharge treatment apparatus for treating a surface of a conductive substrate, said apparatus comprising:

a high voltage, radio frequency power supply;

a cable including a plurality of flexible conductors and other components, said cable having a first end connected to said power supply, said cable having a second end wherein said other components of said cable have been removed with said conductors depending from the remainder of said cable, the free ends of said conductors at said second cable end being disposed in general non-parallel arrangement, and the free end of each conductor being held in a separate insulator which extends beyond the free end which it holds, each free end being movable independently of the other free ends;

means for holding the conductive substrate beneath said cable second end so that the upper surface of said substrate is engaged by said insulators;

means for connecting said conductive substrate to ground; and

means for effecting relative movement between said cable second end and said conductive substrate.

2. Corona discharge treatment apparatus as set forth in claim 1 wherein said conductors disposed between said first and second cable ends are relatively so disposed that each conductor takes up numerous possible positions in the cross section of said cable so as to prevent coupling of electromagnetic fields between said conductors, thereby offering lower resistance to high frequency current and assuring more equal current sharing among said conductors.

3. Corona discharge treatment apparatus as set forth in claim 1 further comprising an enclosure of insulating material enclosing said cable second end and overlying the portion of the conductive substrate to be treated, said apparatus further including a gas inlet extending inside said enclosure.

4. Corona discharge treatment apparatus as set forth in claim 3 further including means for supplying a gas mixture to said gas inlet.

5. Corona discharge treatment apparatus as set forth in claim 4 wherein said gas mixture includes titanium tetrachloride.

6. Corona discharge treatment apparatus as set forth in claim 3 further including means for elevating the temperature within said enclosure of insulating material.

7. Corona discharge treatment apparatus as set forth in claim 6 wherein said means for elevating the temperature within said enclosure of insulating material comprises at least one arc lamp.

8. Corona discharge treatment apparatus as set forth in claim 7 further including a thermal radiation reflector/shield inside of said enclosure of insulating material for directing radiant energy emitted from said at least one arc lamp to the conductive substrate to be treated.

9. Corona discharge treatment apparatus as set forth in claim 1 wherein the free ends of said conductors at said second cable end are disposed in a transposed arrangement comprising a first row of conductor free ends slanting in one direction, a second row of conductor free ends slanting in another direction, and so on, with adjacent rows of said conductor free ends slanting in different directions.

10. Corona discharge treatment apparatus as set forth in claim 1 wherein each insulator comprises a sleeve sized to receive one of said conductors and having a closed end.

11. Corona discharge treatment apparatus as set forth in claim 10 wherein said insulators are formed of alumina.

12. Corona discharge treatment apparatus as set forth in claim 10 wherein said insulators are formed of silica.

13. Corona discharge treatment apparatus as set forth in claim 10 wherein the closed ends of said sleeves have a common length so that with the conductors inserted into the sleeves and the sleeves contacting the conductive substrate, the free ends of the conductors are uniformly spaced from the upper surface of the conductive substrate.

14. Corona discharge treatment apparatus as set forth in claim 1 wherein the output frequency of said power supply is greater than 500 kHz, whereby a corona plasma is achieved without the formation of an arc-style discharge.

15. Corona discharge treatment apparatus as set forth in claim 14 wherein the output frequency of said power supply is at least about 13 MHz.

16. Corona discharge treatment apparatus as set forth in claim 1 wherein the output voltage of said power supply is about 5 kV.

17. A cable for use in corona discharge treatment apparatus, said cable comprising:

a plurality of discrete flexible electrical conductors and other components;

said cable having a first end for connection to a source of high voltage, radio frequency power;

said cable having a second end wherein said other components have been removed and said conductors depend from the remainder of said cable, said conductors having free ends at said second end with said free ends being disposed in a transposed arrangement, each of said free ends being held in an insulator which extends beyond the free end it holds, all of said insulators extending substantially the same distance from the corresponding free ends, whereby with said dielectrics engaging the upper surface of a conductive substrate to be treated, said free ends of the conductors are spaced substantially uniformly from said upper surface.

18. A method of treating the upper surface of a length of conductive material, such as a strip or plate of steel, to improve characteristics of said material by causing the formation of a diffusion layer of an element at or adjacent said upper surface, said method comprising the following steps:

providing a cable having at one end thereof a plurality of flexible conductors depending from the remainder of said cable, said conductors having free ends with each free end held in an insulator which extends beyond its free end away from the remainder of said cable, each said insulator extending substantially the same distance beyond the free end it holds;

connecting the other end of said cable to a source of high voltage, radio frequency power;

causing the insulators to engage said upper surface of said length of material;

grounding said length of material so that a corona discharge will be formed between said conductor free ends and said upper surface;

introducing into the area of said corona discharge a gas mixture comprising a halide gas containing the element of which said diffusion layer is to be formed and a reducing gas, such as hydrogen; and

effecting relative movement between the insulators and said upper surface so that said insulators are maintained in substantially continuous engagement with said upper surface.

19. The method as set forth in claim 18 further including elevating the temperature of the length of material in the area of said corona discharge to a prescribed temperature.

20. The method as set forth in claim 19 wherein the conductive material comprises steel containing 0.5 or more weight percent carbon, the diffusion layer comprises titanium carbide, the gas mixture includes titanium tetrachloride and hydrogen, and the prescribed temperature comprises about 900°

C.