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Method of providing images of surfaces with a correlation microscope by transforming interference signals

  • US 5,194,918 A
  • Filed: 05/14/1991
  • Issued: 03/16/1993
  • Est. Priority Date: 05/14/1991
  • Status: Expired due to Term
First Claim
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1. The method of providing images of a surface of a sample using a correlation microscope comprising the steps ofat each of a plurality of x,y locations of said sample, focusing an illumination beam at a multiplicity of distinct z positions ranging from a position above the sample to a position below the sample;

  • generating interference signals for each x,y,z location at which said illumination beam is focused by said focusing step;

    storing the interference signals for each of said x,y,z locations as the object is moved in the z plane, andtransforming the stored interference signals at each x,y location in the z direction to obtain an intensity envelope of interfering signals in the z direction for each x,y location.

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