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System and method for exhausting vapor from a heated pressure chamber

  • US 5,195,048 A
  • Filed: 02/26/1991
  • Issued: 03/16/1993
  • Est. Priority Date: 02/26/1991
  • Status: Expired due to Fees
First Claim
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1. A method for exhausting vapor from a pressure chamber for processing loads following a vapor exposure period under superatmospheric pressure conditions, said method comprising the steps of:

  • (a) measuring chamber pressure at the conclusion of the exposure period to determine an initial chamber pressure;

    (b) exhausting vapor from the chamber for a predetermined first period of time to lower the chamber pressure;

    (c) measuring chamber pressure at the conclusion of said first period of time to determine a second chamber pressure;

    (d) calculating a difference between said initial chamber pressure and said second chamber pressure to determine an optimal pressure differential;

    (e) calculating a difference between said second chamber pressure and said optimal pressure differential to predetermine a target chamber pressure to be reached at the conclusion of one interval of a predetermined second period of time;

    (f) exhausting vapor from the chamber for said one interval of said second period of time to lower the chamber pressure to said target chamber pressure predetermined in the immediately preceding calculating step;

    (g) measuring the chamber pressure during said one interval of said second period of time to determine whether said target chamber pressure has been reached;

    (h) discontinuing the exhaustion of vapor from the chamber when said target chamber pressure has been reached;

    (i) if said target chamber pressure has not been reached by the conclusion of said one interval of said second period of time, calculating a difference between the chamber pressure measured in step (g) and said pressure differential to predetermine a further target chamber pressure to be reached at the conclusion of an additional interval of said second period of time and repeating steps (f) through (i) to reach progressively lower chamber pressures over successive intervals of said second period of time until a predetermined final chamber pressure is reached;

    or(j) if said target chamber pressure has been reached by the conclusion of said one interval of said second period of time, calculating a difference between said target chamber pressure predetermined in step (e) and said pressure differential to predetermine a further target chamber pressure to be reached at the conclusion of an additional interval of said second period of time and repeating steps (f) through (j) to reach progressively lower chamber pressures over successive intervals of said second period of time until a predetermined final chamber pressure is reached.

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