Method of forming an optical channel waveguide by gettering

• US 5,196,041 A
• Filed: 02/04/1992
• Issued: 03/23/1993
• Est. Priority Date: 09/17/1991
• Status: Expired due to Term

• Current Assignee: Charles Stark Draper Laboratory Incorporated
• Original Assignee: Charles Stark Draper Laboratory Incorporated
• Inventors: Tumminelli, Richard P., Hakimi, Farhad, Haavisto, John R.
• Primary Examiner(s): LINDSAY JR, ROBERT
• Application Number:
  US07/830,618
• Time in Patent Office: 413 Days
• Field of Search: 65/31, 65/3.11, 65/30.1, 65/60.53, 65/3.14, 65/60.2, 65/117, 65/102, 156/663, 219/121.29, 219/121.8, 427/35, 427/36, 427/162, 427/167, 427/53.1, 427/372.2, 427/375, 427/376.2, 427/397.7, 385/129, 385/130
• US Class Current: 65/386
• CPC Class Codes: C03C 17/23 Oxides C03C17/02 takes precedence
• CPC Class Codes: C03C 17/36 at least one coating being a metal
• CPC Class Codes: C03C 17/3607 Coatings of the type glass/inorganic compound/metal
• CPC Class Codes: C03C 17/3642 the multilayer coating containing a metal layer
• CPC Class Codes: C03C 17/3657 the multilayer coating having optical properties
• CPC Class Codes: C03C 2217/213 SiO2
• CPC Class Codes: C03C 2217/24 Doped oxides
• CPC Class Codes: C03C 2217/425 consisting of a porous layer
• CPC Class Codes: C03C 2218/32 After-treatment
• CPC Class Codes: C03C 23/0025 by a laser beam
• CPC Class Codes: C03C 23/007 by thermal treatment
• CPC Class Codes: G02B 2006/12171 using a laser beam
• CPC Class Codes: G02B 6/13 Integrated optical circuits characterised by the manufacturing method

Abstract

A method of forming an optical channel waveguide by gettering includes forming on a substrate a porous waveguide layer containing an index of refraction raising dopant in a compound; sealing a portion of the waveguide layer along a path; and reacting the component, including the index of refraction raising dopant, with a reactant in the unsealed portion of the waveguide layer to form a volatile product from the reactant and dopant to deplete the dopant in the unsealed portion of the waveguide layer and reduce its index of refraction relative to that in the path to produce a channel waveguide along the path.

Claims

1. A method of forming an optical channel waveguide by gettering, comprising:

preparing a compound including an index of refraction raising dopant;

forming on a substrate a porous waveguide layer including said compound;

sealing a portion of the waveguide layer along a path; and

reacting the compound including the index of refraction raising dopant with a reactant in the unsealed portion of said waveguide layer to form a volatile product from the reactant and dopant to deplete the dopant in the unsealed portion of the waveguide layer and reduce its index of refraction relative to that in the path to produce a channel waveguide along the path.

2. The method of claim 1 in which said porous waveguide layer is formed of unsintered soot.

3. The method of claim 2 in which said unsintered soot is a flame hydrolysis deposition unsintered soot.

4. The method of claim 1 in which said waveguide layer is silica.

5. The method of claim 1 in which the step of sealing includes at least partially sintering said waveguide layer along said path.

6. The method of claim 1 in which the step of sealing includes applying a non-porous coating along said path.

7. The method of claim 6 in which said non-porous coating is platinum.

8. The method of claim 1 in which said dopant is antimony.

9. The method of claim 8 in which said compound is antimony chloride.

10. The method of claim 9 in which said reactant is chlorine.

11. The method of claim 5 in which the step of at least partially sintering includes irradiating said path with a particle beam.

12. The method of claim 1 in which said particle beam is a photon beam.

13. The method of claim 1 in which said photon beam is a laser beam.

14. The method of claim 1 further including the step of consolidating the remaining porous portions of said waveguide layer.