Method of reading optical image of inspected surface and image reading system employabale therein

• US 5,197,105 A
• Filed: 05/29/1991
• Issued: 03/23/1993
• Est. Priority Date: 05/30/1990
• Status: Expired due to Fees

• Current Assignee: SCREEN Holdings Co., Ltd.
• Original Assignee: SCREEN Holdings Co., Ltd.
• Inventors: Uemura, Haruo, Hoki, Tetsuo
• Primary Examiner(s): Mancuso, Joseph
• Application Number:
  US07/706,801
• Time in Patent Office: 664 Days
• Field of Search: 382/8, 382/65, 382/58, 382/62, 382/66-68, 358/101, 358/106, 358/107, 356/435, 356/382, 356/384, 356/386, 356/237
• US Class Current: 382/147
• CPC Class Codes: G01N 2021/8845 Multiple wavelengths of illumination or detection
• CPC Class Codes: G01N 2021/95638 for PCB's
• CPC Class Codes: G01N 2021/95653 Through-holes
• CPC Class Codes: G01N 21/956 Inspecting patterns on the surface of objects contactless testing of electronic circuits G01R31/308; testing currency G07D; manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10
• CPC Class Codes: G01R 31/309 of printed or hybrid circuits or circuit substrates

Abstract

A set of red light sources (111-113) are provided above a printed board (20). One (111) of the light sources located in the angular aperture of an imaging lens system (140). The red light is applied to the printed board and reflected on a wiring pattern (22) provided thereon. Another light source (120) is provided under the printed board, and emits infrared light to the back surface of the printed board. The infrared light passes through a through hole (25) formed in the printed board and then enters the imaging lens system together with the red light reflected. Compound light consisting of the red light and the infrared light passes through the imaging lens system and is then splitted into the red light and the infrared light at a cold mirror (150). The respective lights are detected by image sensors (161, 162), to thereby obtain respective images of the wiring pattern and the through hole.

Claims

1. A method of reading an image of an object with an imaging optical system having a respective angular aperture associated therewith and with an image sensor, comprising the steps of:

(a) providing a light source at a position located within only a portion of said angular aperture of said imaging optical system;

(b) locating said object in a visual field of said imaging optical system;

(c) applying illumination light from said light source to said object, wherein said illumination light reflects on said object to obtain a reflected light; and

(d) receiving said reflected light by said image sensor through said imaging optical system to thereby obtain an image of said object.

2. The method of claim 1, wherein

said step (a) comprises the step of:

(a-1) positioning an edge of said light source on an optical axis of said imaging optical system.

3. The method of claim 2, wherein

said step (a) further comprises the step of:

(a-2) covering half said angular aperture of said imaging optical system with said light source.

4. An image reading system for reading an image of an object, comprising:

(a) an imaging optical system having a respective angular aperture and facing said object;

(b) light source means located within only a portion of said angular aperture of said imaging optical system and effective for emitting illumination light toward said object, wherein said illumination light;

is reflected on said object to become a reflected light; and

(c) image sensor means provided in the opposite side of said object across said imaging optical system, for receiving said reflected light through said imaging optical system to obtain an image of said object.

5. The image reading system of claim 4, wherein

said light source means has an edge located on an optical axis of said imaging optical system.

6. The image reading system of claim 5, wherein

said light source means has a body covering half said angular aperture of said imaging optical system.

7. The image reading system of claim 6, wherein

said light source means is a first light source means;

said illumination light is a first illumination light;

said reflected light is a first reflected light; and

said image reading system further comprises;

(d) a second light source means provided out of said angular aperture, for emitting a second illumination light toward said object, wherein said second illumination light is reflected on said object to become a second reflected light, said second reflected light being received by said image sensor.

8. The image reading system of claim 7, which is provided for inspecting a printed board having an insulating substrate on which a wiring pattern is formed and through which a through hole is provided:

wherein

said printed board is said object;

said imaging optical system is located to face said wiring pattern;

said first and second light source means are located between said printed board and said imaging optical system for applying said first and second illumination lights for illuminating said wiring pattern.

9. The image reading system of claim 8, wherein

said image sensor means is a first image sensor;

and

said image reading system further comprises;

(e) a third light source means provided in the opposite side of said imaging optical system across said printed board, for emitting a third illumination light to said through hole, wherein said third illumination light is transmitted through said through hole to become a transmitted light which then meets said first and second reflected lights and passes through said imaging optical system in the form of a compound light consisting of said first and second reflected lights and said transmitted light;

(f) a second image sensor provided in a different position from said first image sensor; and

(g) light splitting means provided in the opposite side of said printed board across said imaging optical system, for splitting said compound light into;

said first and second reflected lights and;

said transmitted light, and for directing;

said first and second reflected lights to said first image sensor; and

said transmitted light to said second image sensor.

10. The image reading system of claim 9, wherein

said first and second illumination lights have a first wavelength;

said third illumination light has a second wavelength; and

said light splitting means comprises;

(g-1) optical means for splitting said compound light into said first and second reflected lights and said transmitted light according to respective wavelength thereof.

11. The image reading system of claim 9, wherein

said first and second illumination lights are polarized in a first direction;

said third illumination light is polarized in a second direction; and

said light splitting means comprises;

(g-2) optical means for splitting said compound light into said first and second reflected lights and said transmitted light according to respective directions.

12. The image reading system of claim 9, wherein

said imaging optical system is telecentric in at least a side of said printed board.

13. A method of reading respective images of a wiring pattern and a through hole of an printed board having first and second surfaces opposite to each other, in which said wiring pattern is formed on said first surface and said through hole is provided between said first and second surfaces, said method comprising the steps of:

(a) applying a first light having a first wavelength to said first surface of said printed board, wherein said first light is reflected on said wiring pattern to become a reflected light;

(b) applying a second light having a second wavelength to said second surface of said printed board, wherein said second light is transmitted through said through hole to become a transmitted light;

(c) obtaining a compound light consisting of said reflected light and said transmitted light;

(d) leading said compound light to an imaging optical system;

(e) receiving with a light splitter said compound light which has passed through said imaging optical system to split said compound light into said reflected light and said transmitted light;

(f) receiving said reflected light with a first image sensor to obtain an image of said wiring pattern; and

(g) receiving said transmitted light with a second image sensor to obtain an image of said through hole;

wherein said step (a) comprises the steps of;

(a-1) applying a first component of said first light from a position located within only a portion of an angular aperture of said imaging optical system to said first surface of said printed board; and

(a-2) applying a second component of said first light from a position outside said angular aperture of said imaging optical system to said first surface of said printed board.

14. The method of claim 13, wherein

said step (a-1) comprises the steps of:

providing a light source having a body whose edge is on an optical axis of said imaging optical axis; and

enabling said light source to emit said first component of said first light.

15. The method of claim 14, wherein

said first light is red light and said second light is infrared light;

and

said light splitter is a cold mirror reflecting said red light and transmitting said infrared light.

16. An image reading system for reading respective images of a wiring pattern and a through hole of an printed board having first and second surfaces opposite to each other, in which said wiring pattern is formed on said first surface and said through hole is provided between said first and second surfaces, said image reading system comprising:

(a) an imaging optical system facing said first surface of said printed board;

(b) first light source means facing said first surface of said printed board to emit a first light having a first wavelength to said first surface of said printed board, wherein said first light is reflected on said wiring pattern to become a reflected light;

(c) second light source means facing said second surface of said printed board to emit a second light having a second wavelength to said second surface of said printed board, wherein said second light is transmitted through said through hole to become a transmitted light which is overlapped with said reflected light to obtain a compound light entering said imaging optical system;

(d) light splitter means for receiving said compound light which has passed through said imaging optical system to split said compound light into said reflected light and said transmitted light;

(e) first image sensor means for receiving said reflected light to obtain an image of said wiring pattern; and

(f) second image sensor means for receiving said transmitted light to obtain an image of said through hole;

wherein said first light source means comprises;

(b-1) first illumination means provided in a position located within only a portion of an angular aperture of said imaging optical system to emit a first component of said first light; and

(b-2) second illumination means located outside said angular aperture of said imaging optical system to emit a second component of said first light.

17. The image reading system of claim 16, wherein

said first illumination means has a body whose edge is located on an optical axis of said imaging optical system.

18. The image reading system of claim 17, wherein

said body of said first illumination means covers half said angular aperture of said imaging optical system.

19. A method of reading respective images of a wiring pattern and a through hole of an printed board having wiring and second surfaces opposite to each other, in which said wiring pattern is formed on said first surface and said through hole is provided between said first and second surfaces, said method comprising the steps of:

(a) applying a first light polarized in a first direction to said first surface of said printed board, wherein said first light is reflected on said wiring pattern to become a reflected light;

(b) applying a second light polarized in a second direction to said second surface of said printed board, wherein said second light is transmitted through said through hole to become a transmitted light;

(c) obtaining a compound light consisting of said reflected light and said transmitted light;

(d) leading said compound light to an imaging optical system;

(e) receiving with a light splitter said compound light which has passed through said imaging optical system to split said compound light into said reflected light and said transmitted light;

(f) receiving said reflected light with a first image sensor to obtain an image of said wiring pattern; and

(g) receiving said transmitted light with a second image sensor to obtain an image of said through hole;

wherein said step (a) comprises the steps of;

(b-1) applying a first component of said first light from a position located within only a portion of an angular aperture of said imaging optical system to said first surface of said printed board; and

(b-2) applying a second component of said first light from a position outside said angular aperture of said imaging optical system to said first surface of said printed board.

20. The method of claim 19, wherein

said step (a-1) comprises the steps of:

providing a light source having a body whose edge is on an optical axis of said imaging optical axis; and

enabling said light source to emit said first component of said first light.

21. An image reading system for reading respective images of a wiring pattern and a through hole of a printed board having first and second surfaces opposite to each other, in which said wiring pattern is formed on said first surface and said through hole is provided between said first and second surfaces, said image reading system comprising:

(a) an imaging optical system facing said first surface of said printed board;

(b) first light source means facing said first surface of said printed board to emit a first light polarized in a first direction to said first surface of said printed board, wherein said first light is reflected on said wiring pattern to become a reflected light;

(c) second light source means facing said second surface of said printed board to emit a second light polarized in a second direction to said second surface of said printed board, wherein said second light is transmitted through said through hole to become a transmitted light which is overlapped with said reflected light to obtain a compound light entering said imaging optical system;

(d) light splitter means for receiving said compound light which has passed through said imaging optical system to split said compound light into said reflected light and said transmitted light;

(e) first image sensor means for receiving said reflected light to obtain an image of said wiring pattern; and

(f) second image sensor means for receiving said transmitted light to obtain an image of said through hole;

wherein said first light source means comprises;

(b-1) first illumination means provided in a position located within only a portion of an angular aperture of said imaging optical system to emit a first component of said first light; and

(b-2) second illumination means located outside said angular aperture of said imaging optical system to emit a second component of said first light.

22. The image reading system of claim 21, wherein

said first illumination means has a body whose edge is located on an optical axis of said imaging optical system.

23. The image reading system of claim 22, wherein

said body of said first illumination means covers half said angular aperture of said imaging optical system.

24. A method of reading respective images of a wiring pattern and a through hole of an printed board having first and second surfaces opposite to each other, in which said wiring pattern is formed on said first surface and said through hole is provided between said first and second surfaces, said method comprising the steps of:

(a) providing an imaging optical system;

(b) providing a selective reflection mirror covering the entirety of an angular aperture of said imaging optical system, wherein

said selective reflecting mirror having a surface which consists of;

a first region capable of reflecting a first light of a first optical character and capable of transmitting a second light of a second optical character; and

a second region capable of reflecting said first and second lights; and

said angular aperture of said imaging optical system is divided into two part with a boundary of said first and second regions;

(b) applying said first light from out of an angular aperture of said imaging optical system to said selective reflection mirror to direct said first light to said first surface of said printed board, thereby obtaining a reflected light through reflection of said first light on said wiring pattern;

(c) applying said second light to said second surface of said printed board, thereby obtaining a transmitted light through transmittance of said second light through said through hole;

(d) obtaining a compound light consisting of said reflected light and said transmitted light;

(e) leading said compound light to said imaging optical system through said selective reflection mirror,

(f) receiving with a light splitter said compound light having passed through said imaging optical system to split said compound light into said reflected light and said transmitted light;

(g) receiving said reflected light with a first image sensor to obtain an image of said wiring pattern; and

(h) receiving said transmitted light with a second image sensor to obtain an image of said through hole.

25. The method of claim 24, wherein

said first light is a light having a first wavelength;

said second light is a light having a second wavelength; and

said light splitter is a mirror reflecting only one of said first light and said second light in said compound light.

26. The method of claim 25, wherein

said first light is a light polarized in a first direction;

said second light is a light polarized in a second direction; and

said light splitter is a polarization beam splitter mirror reflecting only one of said first light and said second light in said compound light.

27. The method of claim 24, wherein

said boundary substantially divides said angular aperture into two equal parts.

28. The method of claim 27, wherein

said selective reflection mirror comprises a transparent substrate and a selective photo-reflection film selectively formed on said transparent substrate;

said first region is an exposed surface of said selective photo-reflection film; and

said second region is an exposed surface of said transparent substrate.

29. An image reading system for reading respective images of a wiring pattern and a through hole of an printed board having first and second surfaces opposite to each other, in which said wiring pattern is formed on said first surface and said through hole is provided between said first and second surfaces, said image reading system comprising:

(a) an imaging optical system;

(b) a selective reflection mirror covering whole of an angular aperture of said imaging optical system and comprising a surface which consists of;

a first region capable of reflecting a first light of a first optical character and capable of transmitting a second light of a second optical character; and

a second region capable of reflecting said first and second lights;

wherein said angular aperture of said imaging optical system is divided into two part with a boundary of said first and second regions;

(c) first light source means provided out of an angular aperture of said imaging optical system, for emitting said first light toward said selective reflection mirror to direct said first light to said first surface of said printed board to obtain a reflected light through reflection of said first light on said wiring pattern;

(d) second light source means provided in the said second surface side, for emitting said second light toward said second surface of said printed board to obtain a transmitted light through transmittance of said second light through said through hole;

wherein said reflected light and said transmitted light are overlapped with each other to form a compound light; and

said compound light enters said selective reflection mirror and then passes through said imaging optical system;

(e) light splitter means for receiving said compound light having passed through said imaging optical system to split said compound light into said reflected light and said transmitted light;

(f) first image sensor means for receiving said reflected light to obtain an image of said wiring pattern; and

(g) second image sensor means for receiving said transmitted light to obtain an image of said through hole.

30. The image reading system of claim 29, wherein

said first light source means comprises:

(c-1) a first illuminator means for emitting light having a first wavelength as said first light;

said second light source means comprises;

(b-1) a second illuminator means for emitting light having a second wavelength as said second light; and

said light splitter means comprises;

(e-1) a mirror reflecting only one of said first light and said second light in said compound light.

31. The image reading system of claim 29, wherein

said first light source means comprises:

(c-2) a first illuminator means for emitting light polarized in a first direction as said first light;

said second light source means comprises;

(b-2) a second illuminator means for emitting light polarized in a second direction as said second light; and

said light splitter means comprises;

(e-2) a polarization beam splitter reflecting only one of said first light and said second light in said compound light.

32. The image reading system of claim 29, wherein

said boundary substantially divides said angular aperture into two equal parts.

33. The image reading system of claim 32, wherein

said selective reflection mirror comprises:

(b-1) a transparent substrate; and

(b-2) a selective photo-reflection film selectively formed on said transparent substrate;

and wherein said first region is an exposed surface of said selective photo-reflection film; and

said second region is an exposed surface of said transparent substrate.

34. The image reading system of claim 33, wherein

said first light source means emits said first light in a direction perpendicular to said optical axis;

and

said selective reflection mirror is inclined from said optical axis by 45°

.

35. A method of reading respective images of a wiring pattern and a through hole of an printed board having first and second surfaces opposite to each other, in which said wiring pattern is formed on said first surface and said through hole is provided between said first and second surfaces, said method comprising the steps of:

(a) providing an imaging optical system;

(b) providing a selective reflection mirror covering only a part of an angular aperture of said imaging optical system, wherein said selective reflecting mirror is capable of reflecting a first light of a first optical character and capable of transmitting a second light of a second optical character;

(c) applying said first light from out of an angular aperture of said imaging optical system to said selective reflection mirror to direct said first light to said first surface of said printed board, thereby obtaining a reflected light through reflecting of said first light on said wiring pattern;

(d) applying said second light to said second surface of said printed board, thereby obtaining a transmitted light through transmittance of said second light through said through hole;

(e) obtaining a compound light consisting of said reflected light and said transmitted light;

(f) leading said compound light to said imaging optical system through a space in which said selective reflection mirror is located, wherein;

with respect to said reflected light included in said compound light, only a part thereof bypassing said selective reflection mirror is received by said selective reflection mirror; and

with respect to said transmitted light included in said compound light, both of a first thereof passing through said selective reflection mirror and a second part bypassing said selective reflection mirror are received by said selective reflection mirror;

(g) receiving with a light splitter said compound light having passed through said space to split said compound light into said reflected light and said transmitted light;

(h) receiving said reflected light with a first image sensor to obtain an image of said wiring pattern; and

(i) receiving said transmitted light with a second image sensor to obtain an image of said through hole.

36. The method of claim 35, wherein

said first light is a light having a first wavelength;

said second light is a light having a second wavelength; and

said light splitter is a mirror reflecting only one of said first light and said second light in said compound light.

37. The method of claim 35, wherein

said first light is a light polarized in a first direction;

said second light is a light polarized in a second direction; and

said light splitter is a polarization beam splitter mirror reflecting only one of said first light and said second light in said compound light.

38. The method of claim 35, wherein

said selective reflection mirror has an edge located on an optical axis of said imaging optical system.

39. The method of claim 38, wherein

said selective reflection mirror comprises a transparent substrate and a selective photo-reflection film formed on said transparent substrate.

40. The method of claim 39, wherein said edge of said selective reflection mirror is processed into a wedge.

41. The method of claim 39, wherein

said edge of said selective reflection mirror is processed into a wedge.

42. An image reading system for reading respective images of a wiring pattern and a through hole of an printed board having first and second surfaces opposite to each other, in which said wiring pattern is formed on said first surface and said through hole is provided between said first and second surfaces, said image reading system comprising:

(a) imaging optical system;

(b) a selective reflection mirror covering only a part of an angular aperture of said imaging optical system and capable of reflecting a first light of a first optical characters and capable of transmitting a second light of a second optical character;

(c) first light source means provided out of an angular aperture of said imaging optical system, for emitting said first light toward said selective reflection mirror to direct said first light to said first surface of said printed board and to obtain a reflected light through reflection of said first light on said wiring pattern;

(d) second light source means provided in the said second surface side, for emitting said second light toward said second surface of said printed board to obtain a transmitted light through transmittance of said second light through said through hole;

wherein said reflected light and said transmitted light are overlapped with each other to form a compound light;

said compound light passes through a space in which said selective reflection mirror is provided and then enters said imaging optical system;

with respect to said reflected light includes in said compound light, only a part thereof bypassing said selective reflection mirror is received by said selective reflection mirror; and

with respect to said transmitted light included in said compound light, both of a first part thereof passing through said selective reflection mirror and a second part bypassing said selective reflection mirror are received by said selective reflection mirror;

(e) light splitter means for receiving said compound light having passed through said imaging optical system to split said compound light into said reflected light and said transmitted light;

(f) first image sensor means for receiving said reflected light with to obtain an image of said wiring pattern; and

(g) second image sensor means for receiving said transmitted light to obtain an image of said through hole.

43. The image reading system of claim 42, wherein

said first light source means comprises:

(c-1) a first illuminator means for emitting light having a first wavelength as said first light;

said second light source means comprises;

(b-1) a second illuminator means for emitting light having a second wavelength as said second light; and

said light splitter means comprises;

(e-1) a mirror reflecting only one of said first light and said second light in said compound light.

44. The image reading system of claim 42, wherein

said first light source means comprises:

(c-2) a first illuminator means for emitting light polarized in a first direction as said first light;

said second light source means comprises;

(b-2) a second illuminator means for emitting light polarized in a second direction as said second light; and

said light splitter means comprises;

(e-2) a polarization light splitter reflecting only one of said first light and said second light in said compound light.

45. The image reading system of claim 42, wherein

said selective reflection mirror has an edge located on an optical axis of said imaging optical system.

46. The image reading system of claim 45, wherein

said edge substantially divides said angular aperture into two equal parts.

47. The image reading system of claim 45, wherein

said selective reflection mirror comprises a transparent substrate and a selective photo-reflection film formed on said transparent substrate.