Die bonding apparatus

• US 5,197,650 A
• Filed: 04/02/1992
• Issued: 03/30/1993
• Est. Priority Date: 09/18/1990
• Status: Expired due to Fees

• Current Assignee: Sharp Kabushiki Kaisha (Hon Hai Precision Industry Co., Ltd.)
• Original Assignee: Sharp Kabushiki Kaisha (Hon Hai Precision Industry Co., Ltd.)
• Inventors: Monzen, Masahiko, Shimoyama, Akio, Iwasaki, Noriki
• Primary Examiner(s): Seidel, Richard K.
• Assistant Examiner(s): Knapp, Jeffrey T.
• Application Number:
  US07/862,181
• Time in Patent Office: 362 Days
• Field of Search: 228/6.2, 228/7, 228/8, 228/102, 228/103, 228/56.5, 156/DIG. 1, 101/483
• US Class Current: 228/6.2
• CPC Class Codes: H01L 21/67282 Marking devices
• CPC Class Codes: H01L 2223/54493 Peripheral marks on wafers, e.g. orientation flats, notches, lot number

Abstract

A die bonding apparatus includes a device for making a coarse surface in a region where an identifier is to be applied to a lead frame; an application device for applying the identifier to the coarse surface region, a dividing device for dividing a wafer into chips, a test device for testing the wafer which has not been divided into chips yet in positions corresponding to the prospective chips, a storage device for storing information about positions of the chips on the wafer and the test results, a die bonding device picking out the chips from the wafer for die-bonding them to the lead frame having the identifier, a reading device for reading the identifier of the lead frame to which the chips are to be die-bonded, an information processing device for adding information which the identifier contains to the test results and position information about each of the chips to make test information, and an output device for outputting the test information.

Claims

1. A die-bonding apparatus comprising:

means for emitting a first laser beam scanning a region on a metal lead frame to etch a coarse surface in the region;

means for emitting a second laser beam scanning the region to etch an identifier into the coarse surface region;

test means for testing a wafer at positions corresponding to the prospective chips and generating test data;

dividing means for dividing the wafer into chips;

storage means for storing information about positions of the chips on the wafer and the test data;

die-bonding means removing divided chips from the wafer and die-bonding the chips to the lead frame;

reading means for reading the identifier of the lead frame to which the chips are die-bonded;

information processing means for correlating information from the identifier with the test data and position information about each of the chips to generate test information; and

output means for outputting the test information.

2. An apparatus according to claim 1, wherein said identifier is a bar code.

3. An apparatus according to claim 1, wherein said identifier is a combination of a plurality of holes made in said lead frame.

4. An apparatus according to claim 1, wherein said application means is a laser marker which employs laser to apply the identifier onto the lead frame.

5. An apparatus according to claim 1, wherein said processing means is a laser marker.

6. An apparatus according to claim 1, wherein the scanning directions of the first and second beams are perpendicular to each other.

7. An apparatus according to claim 1, wherein the power of the first laser beam is less than that of the second laser beam.

8. An apparatus according to claim 1, wherein a scanning speed of the first laser beam is greater than that of the second laser beam.

9. An apparatus according to claim 1, wherein the surface made by the second laser beam is more coarse than the surface made by the first laser beam.

10. An apparatus according to claim 1, wherein the depth of the etching of the first laser beam is less than the etching depth of the second laser beam.

11. An apparatus according to claim 1, wherein the first laser beam etches the coarse region to form a bar code background, and the second laser beam etches a bar code stripe, the width of the bar code background being greater than the width of the bar code stripe.

12. An apparatus according to claim 11, wherein the ratio of width of bar code background to the bar code stripe is in the range of 1.5 to 2.0.