Angular velocity sensor with displacement scale and sensor means

• US 5,198,663 A
• Filed: 03/19/1992
• Issued: 03/30/1993
• Est. Priority Date: 04/03/1991
• Status: Expired due to Fees

• Current Assignee: Mitutoyo Corporation
• Original Assignee: Mitutoyo Corporation
• Inventors: Horikawa, Toshiro, Ichikawa, Souji, Suzuki, Mikio, Kuroki, Shingo, Ishibashi, Wataru
• Primary Examiner(s): Nelms, David C.
• Application Number:
  US07/854,008
• Time in Patent Office: 376 Days
• Field of Search: 250/231.1, 250/237 G, 73/505, 73/499, 73/496, 73/504, 73/516 R, 73/517 R, 73/517 AV, 73/517 B, 73/861.37, 73/861.38
• US Class Current: 250/231.1
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Abstract

In one type of an angular velocity sensor, a constant vibration is applied in an X direction to one end of a vibrator which is fixed at another end and the vibrator vibrates in a Y direction perpendicular to the X direction by an action of Coriolis force caused by the angular velocity of the vibrator about the Z axis with an amplitude proportional to an angular velocity about a Z axis. An angular velocity sensor of this invention utilizes a photoelectric encoder for measurement of the vibration amplitude of the vibrator in the Y direction. The encoder includes a main scale mounted on the free end of the vibrator; an index scale mounted on a housing of the sensor to face the main scale; and a photoelectric element for sensing light reflected from the main scale and passing through the index scale. The angular velocity sensor utilizing the photoelectric encoder is less subject to influence of variation in the temperature in comparison with the conventional sensor utilizing piezoelectric elements and a higher precision can be attained.

Claims

1. An angular velocity sensor comprising:

a rod-like shaft having a specified portion thereof supported on a housing;

excitation means for vibrating a free end portion of said shaft in an X direction with a lengthwise axis of said shaft set in a Z direction of an XYZ rectangular coordinate system;

displacement sensing means for producing an output by sensing a displacement of the free end portion of said shaft in a Y direction; and

operation means for deriving an angular velocity about said shaft based on the output from said displacement sensing means;

wherein said displacement sensing means includes a main scale fixed on the free end portion of said shaft, an index scale fixed on said housing and confronting said main scale, a light emitting element for emitting light to illuminate said main scale, and a plurality of light sensors for sensing light which is reflected by said main scale and passed through said index scale.

2. An angular velocity sensor comprising:

a rod-like shaft having a specified portion thereof supported on a housing;

excitation means for vibrating a free end portion of said shaft in an X direction with a lengthwise axis of said shaft set in a Z direction of an XYZ rectangular coordinate system;

displacement sensing means for producing an output by sensing a displacement of the free end portion of said shaft in the X direction and a Y direction; and

operation means for deriving an angular velocity about said shaft based on the output from said displacement sensing means;

wherein said displacement sensing means includes a main scale fixed on the free end portion of said shaft, an index scale fixed on said housing and confronting said main scale, a light emitting element for emitting light to illuminate said main scale, and a plurality of light sensors for sensing light which is reflected by said main scale and passed through said index scale.

3. An angular velocity sensor comprising:

a rod-like shaft having a specified portion thereof supported on a housing;

excitation means for vibrating a free end portion of said shaft in an X direction with a lengthwise axis of said shaft set in a Z direction of an XYZ rectangular coordinate system;

displacement sensing means for producing an output by sensing a displacement of the free end portion of said shaft in the X direction and a Y direction;

control means for controlling said excitation means to keep constant a first signal of the output from said displacement sensing means, the first signal indicating a displacement in the X direction; and

operation means for deriving an angular velocity about said shaft based on a second signal of the output from said displacement sensing means, the second signal indicating a displacement in the Y direction;

wherein said displacement sensing means includes a main scale fixed on the free end portion of said shaft, an index scale disposed to face said main scale, a light emitting element for emitting light to illuminate said main scale, and a plurality of light sensors for sensing light which is reflected by said main scale and passed through said index scale.

4. An angular velocity sensor according to claim 3, wherein said index scale includes a plurality of first index scale gratings, each of said plurality of first index scale gratings being arranged between said light emitting element and said main scale.

5. An angular velocity sensor according to claim 3, wherein the specified portion of said shaft is one end portion of said shaft and said main scale is mounted on the other end portion of said shaft.

6. An angular velocity sensor according to claim 3, wherein the specified portion of said shaft is fixed to said housing with an elastic member disposed therebetween.

7. An angular velocity sensor according to claim 3, wherein the specified portion of said shaft is substantially the central portion of said shaft, the specified portion being fixed to said housing with an elastic member disposed therebetween.

8. An angular velocity sensor according to claim 3, wherein a cross section of said shaft is symmetrical with respect to the Z axis, the cross section being perpendicular to the Z axis.

9. An angular velocity sensor according to claim 3, wherein said excitation means includes a magnetic member mounted on said shaft;

magnetic field generation means mounted on said housing near said magnetic member for providing a magnetic field; and

a current source for driving said magnetic field generation means.

10. An angular velocity sensor according to claim 3, wherein said excitation means includes a column-shaped magnet mounted on said shaft with the central axis of said magnet aligned with the lengthwise axis of said shaft and with opposite end portions of said magnet in the X-axis direction magnetized to have like magnetic poles;

two air-core coils fixed on said housing near corresponding ones of the opposite end portions of said magnet in the X-axis direction; and

an exciting power source for said air-core coils.

11. An angular velocity sensor according to claim 3, wherein said excitation means includes a magnet mounted on said shaft with a central axis of said magnet aligned with the lengthwise axis of said shaft and with opposite end portions of said magnet in the X-axis direction magnetized to have different magnetic poles;

an air-core coil mounted on an inner wall surface of said housing to surround said magnet; and

an exciting power source for said air-core coil.

12. An angular velocity sensor according to claim 3, wherein said main scale and index scale each include a plurality of grating groups, representative gratings from different grating groups having grating directions that intersect at right angles.

13. An angular velocity sensor according to claim 3, wherein said index scale includes a plurality of second index scale gratings, each of said plurality of second index scale gratings being arranged between said main scale and said plurality of light sensors.

14. An angular velocity sensor according to claim 9, wherein said magnetic member is a ferromagnetic member.

15. An angular velocity sensor according to claim 9, wherein said magnetic member is a magnet.

16. An angular velocity sensor according to claim 11, wherein the magnet is a column-shaped magnet.

17. An angular velocity sensor according to claim 11, wherein the magnet is a polygonal pole-shaped magnet.