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Micro-machined resonator

  • US 5,198,716 A
  • Filed: 12/09/1991
  • Issued: 03/30/1993
  • Est. Priority Date: 12/09/1991
  • Status: Expired due to Fees
First Claim
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1. A micro-machined resonator, comprising:

  • (a) an upper micro-machinable support member having an upper well connected to an upper electrode means;

    (b) a lower micro-machinable support member having a lower well connected to a lower electrode means, said lower support member opposing said upper support member;

    (c) a resonator capacitively coupled to said electrodes, said resonator having a centrally located energy trapping quartz mesa and supported between said upper well of said upper support member and said lower well of said lower support member;

    (d) an upper diaphragm interposed between said upper well and said resonator;

    (e) a lower diaphragm interposed between said lower well and said resonator;

    (f) spacer means for defining a volume between said micro-machinable support members and said resonator; and

    (g) support means for supporting said resonator in said volume.

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