Method of producing flat ECR layer in microwave plasma device and apparatus therefor

• US 5,198,725 A
• Filed: 07/12/1991
• Issued: 03/30/1993
• Est. Priority Date: 07/12/1991
• Status: Expired due to Fees

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Inoue, Takashi, Chen, Ching-Hwa, Yin, Gerald
• Primary Examiner(s): LaRoche, Eugene R.
• Assistant Examiner(s): YOO, DO H
• Application Number:
  US07/729,211
• Time in Patent Office: 627 Days
• Field of Search: 315/111.21, 315/111.41, 315/111.71, 313/231.31, 204/298.38, 204/298.37, 204/298.16
• US Class Current: 315/111.41
• CPC Class Codes: H01J 37/32192 Microwave generated discharge H01J37/32357, H01J37/32366, H01J37/32394, H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32678 Electron cyclotron resonance

Abstract

A microwave plasma generating device including a plasma chamber for generating plasma, a reaction chamber having a specimen stage on which a specimen is treated with the plasma, a gas supply for supplying gas to the plasma generating chamber, a microwave generator for generating a microwave electric field in the plasma and reaction chambers and a plurality of axially spaced apart and concentric electromagnet coils for generating a magnetic field in the plasma and reaction chambers. The microwave electric field and the magnetic field have perpendicularly crossing components and the magnetic field has a strength which decreases in the axial direction from the plasma chamber towards the reaction chamber with constant strength magnetic flux density lines lying in planes which are substantially parallel to each other and perpendicular to the axial direction. The magnetic field produces a flat ECR condition wherein the ECR layer extends perpendicularly to the axial direction over at least 50% of the width of the plasma chamber. In a method of using this device, upper and lower electromagnets produce magnetic fields such that the magnetic field produced by the lower electromagnet is weaker than that produced by the first electromagnet. For instance, the upper electromagnet can be supplied a higher amount of current than the lower electromagnet. Alternatively, the upper and lower electromagnets can be supplied the same amount of current but the lower electromagnet can be larger in diameter than the first electromagnet. This allows the ECR layer to be made thicker in the axial direction than an ECR layer produced by a conventional plasma generating device.

Claims

1. A microwave plasma generating device, comprising:

a plasma chamber for generating plasma;

a reaction chamber having a specimen stage on which a specimen is treated with the plasma;

gas supply means for supplying gas to the plasma generating chamber;

means for generating a microwave electric field in the plasma and reaction chambers;

means comprising axially spaced apart and concentric electromagnet coils for generating a magnetic field in the plasma and reaction chambers, the microwave electric field and magnetic field having perpendicularly crossing components of the magnetic field and electric field, respectively, the magnetic field having a strength which decreases in an axial direction from the plasma chamber towards the reaction chamber and having constant strength magnetic flux density lines lying in planes which are substantially parallel to each other and perpendicular to the axial direction, the magnetic field producing a flat ECR condition wherein an ECR layer extends perpendicular to the axial direction over at least 50% of the width of the plasma chamber.

2. The microwave plasma generating device of claim 1, wherein the magnetic field generating means comprises a plurality of axially spaced apart electromagnets having coils concentric with each other, each of the electromagnets having a substantially equal number of coil turns, the electromagnets located closer to a center of the device having a larger diameter than the electromagnets located further from the center of the device.

3. The microwave plasma generating device of claim 1, wherein the magnetic field generating means includes a first electromagnet extending completely around an end of the plasma chamber located furthest from the reaction chamber, a second electromagnet extending completely around the plasma chamber and located between the first electromagnet and the specimen stage, and a third electromagnet located such that the specimen stage is between the third electromagnet and the plasma chamber.

4. The microwave plasma generating device of claim 2, wherein the magnetic field generating means includes more than three electromagnets, the diameters of the electromagnets becoming progressively smaller towards opposite axial ends of the device.

5. The microwave plasma generating device of claim 3, wherein all of the electromagnets are located outside of the plasma chamber and the reaction chamber.

6. The microwave plasma generating device of claim 1, wherein the magnetic field generating means includes a plurality of electromagnets having coils concentric with each other and means for supplying each of the electromagnets with an adjustable amount of current independent of the other electromagnets.

7. The microwave plasma generating device of claim 1, wherein the magnetic field generating means includes first and second electromagnets having the same diameter, the first and second electromagnets having coils concentric with each other and of identical gage wire, the first and second electromagnets being spaced apart along the axial direction, the first electromagnet having a higher number of coil turns than the second electromagnet and the first electromagnet being further from the specimen stage than the second electromagnet.

8. The microwave plasma generating device of claim 1, wherein the magnetic field generating means includes first and second electromagnets having coils concentric with each other having the same diameter, the first and second electromagnets having coils of identical gage wire, the first and second electromagnets being spaced apart along the axial direction, the first and second electromagnets having the same number of coil turns, the first electromagnet being further from the specimen stage than the second electromagnet, the magnetic field generating means including a first direct current power supply electrically connected to the first electromagnet and a second direct current power supply electrically connected to the second electromagnet, and the first power supply supplying an amount of electrical current to the first electromagnet which is greater than an amount of electrical current supplied by the second power supply to the second electromagnet.

9. The microwave plasma generating device of claim 1, wherein the magnetic field generating means includes first and second electromagnets having coils concentric with each other and of identical gage wire, the first and second electromagnets being spaced apart in the axial direction with the first electromagnet being further from the specimen stage than the second electromagnet, the first and second electromagnets having the same number of coil turns, the magnetic field generating means including direct current power supply electrically connected to the first and second electromagnets, the power supply means supplying the first and second electromagnets with the same amount of electrical current, and the second electromagnet having a diameter which is greater than a diameter of the first electromagnet.

10. A method of forming a flat ECR layer in a microwave plasma generating device, the device including a plasma generating chamber into which gas is introduced for generating plasma therein, a microwave introducing system for supplying microwave energy into the plasma generating chamber, a specimen chamber communicated with the plasma generating chamber, a substrate holder in the specimen chamber for supporting a specimen to be treated by plasma generated in the plasma generating chamber, and at least first and second electromagnets, the first electromagnet being located further from the substrate holder than the second electromagnet, the first and second electromagnets being spaced apart in an axial direction, the first electromagnet having coils which are concentric with coils of the second electromagnet for generating a magnetic field in the plasma and specimen chambers, the method comprising the steps of:

introducing gas into the plasma generating chamber;

introducing microwave energy into the plasma generating chamber and generating plasma in the plasma generating chamber; and

supplying a first amount of direct current to the first electromagnet and supplying a second amount of direct current to the second electromagnet so as to form constant strength magnetic field flux density lines lying in planes which are substantially parallel to each other and perpendicular to the axial direction and a flat ECR layer in the plasma wherein the ECR layer extends perpendicular to the axial direction over at least 50% of the width of the plasma chamber.

11. The method of claim 10, wherein the first and second electromagnets are supplied with different amounts of current.

12. The method of claim 10, wherein the first and second electromagnets are supplied with the same amounts of current.

13. The method of claim 10, wherein the first and second electromagnets have the same diameter, the first and second electromagnets have coils concentric with each other and of identical gage wire, the first electromagnet has a higher number of coil turns than the second electromagnet and the same amount of current is supplied to the first and second electromagnets.

14. The method of claim 10, wherein the first and second electromagnets have the same diameter, the first and second electromagnets have coils concentric with each other and of identical gage wire, the first electromagnets have the same number of coil turns, and the amount of electrical current supplied to the first electromagnet is greater than the amount of electrical current supplied to the second electromagnet.

15. The method of claim 10, wherein the first and second electromagnets have coils concentric with each other and of identical gage wire, the first and second electromagnets have the same number of coil turns, the second electromagnet has a diameter which is greater than a diameter of the first electromagnet, and the first and second electromagnets are supplied with the same amount of electrical current.

16. The method of claim 10, wherein the first and second electromagnets have the same diameter, the first and second electromagnets have coils concentric with each other and of identical gage wire, the first electromagnet has a higher number of coil turns than the second electromagnet and the amount of current supplied to the first electromagnet is less than the amount of current supplied to the second electromagnet.

17. The method of claim 10, wherein the first and second electromagnets have the same diameter, the first and second electromagnets have coils concentric with each other and of identical gage wire, the first electromagnet has a higher number of coil turns than the second electromagnet and the amount of current supplied to the first electromagnet is greater than the amount of current supplied to the second electromagnet.

18. The method of claim 10, wherein the first and second electromagnets have coils concentric with each other and of identical gage wire, the first and second electromagnets have the same number of coil turns, the second electromagnet has a diameter which is greater than a diameter of the first electromagnet, and the amount of current supplied to the first electromagnet is less than the amount of current supplied to the second electromagnet.

19. The method of claim 10, wherein the first and second electromagnets have coils concentric with each other and of identical gage wire, the first and second electromagnets have the same number of coil turns, and the second electromagnet has a diameter which is greater than a diameter of the first electromagnet, and the amount of current supplied to the first electromagnet is greater than the amount of current supplied to the second electromagnet.

20. The method of claim 10, wherein the flat ECR layer extends perpendicularly with respect to the axial direction and covers at least 75% of the width of the plasma generating chamber.

21. The method of claim 10, wherein the flat ECR layer extends perpendicularly with respect to the axial direction and covers at least 85% of the width of the plasma generating chamber.