Method and apparatus for high resolution inspection of electronic items

• US 5,199,054 A
• Filed: 08/30/1990
• Issued: 03/30/1993
• Est. Priority Date: 08/30/1990
• Status: Expired due to Term

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Four Pi Systems Corp. (HP Inc.)
• Inventors: Reynolds, David C., Ganz, Brian L., Sexton, Christopher S., Brown, Kerry L., Adams, John A., Russell, Gerald S., Baker, Bruce D., Corey, Robert L., Ross, Edward W.
• Primary Examiner(s): Hannaher, Constantine
• Assistant Examiner(s): WONG, DON KITSUN
• Application Number:
  US07/575,550
• Time in Patent Office: 943 Days
• Field of Search: 378/19, 378/21, 378/22, 378/138, 378/205, 378/10, 378/62, 378/143, 378/144, 378/145, 378/119, 378/124, 378/123, 250/310, 250/307
• US Class Current: 378/21
• CPC Class Codes: G01N 23/043 using fluoroscopic examination, with visual observation or video transmission of fluoroscopic images
• CPC Class Codes: G01N 23/044 using laminography or tomosynthesis
• CPC Class Codes: G01R 31/302 Contactless testing G01R31/66 takes precedence
• CPC Class Codes: H05G 1/26 Measuring, controlling or protecting measuring X-ray radiation G01T

Abstract

A high resolution laminography system for the inspection of integrated circuits wherein a beam of highly focused electrons is traced in a circular pattern on a flat target within a vacuum chamber. The target converts the electron beam into X-rays, so that a source of X-rays is produced which rotates in synchronization with a rotating detector assembly. An object is placed within the vacuum chamber, between the X-ray source and the detector so that an X-ray cross sectional image of a cutting plane of the object is produced. A computer and feedback system controls image acquisition and an automated positioning system. The computer system can also operate under program control to automatically analyze data, measure characteristics of the object under inspection, and make decisions regarding the acceptability of the object'"'"'s quality. The invention also employs a channeltron imager to directly image the target so that the condition of the target may be monitored, and electron drift within the system can be compensated for.

Claims

1. A high resolution laminography system comprising:

a source of X-rays wherein said source of X-rays further comprises;

a source of electrons which generates an electron beam;

a deflector for steering said electron beam;

a target wherein X-rays are emitted from said target when said electron beam impinges upon said target, said target further comprising an imagable feature;

an SEM detector for producing an SEM micrograph of said target imagable feature in response to illumination of said feature by said electron beam;

an image analysis system for analyzing characteristics of said SEM micrograph image of said target imagable feature, and providing an output signal in response to said analysis; and

a feedback system which receives said output signal from said image analysis system, processes said output signal and provides a control signal to said electron beam deflector; and

a laminographic detector for producing a cross sectional image of a cutting plane of an object illuminated by said X-rays emitted by said target.

2. A system as defined in claim 1, wherein said feedback system comprises a digital Look-Up-Table.

3. A system as defined in claim 1, wherein said imagable feature on said target comprises four points, wherein two of said points lie on a line which is perpendicular to a line defined by two others of said points.

4. A system as defined in claim 1, wherein said target comprises a plurality of concentric rings.

5. A system as defined in claim 1, wherein said target has a cylindrical interior surface.

6. A system as defined in claim 1, wherein said SEM detector comprises a channeltron imager.

7. A system as defined in claim 1, further comprising an electron collector for preventing electrons from striking said object.

8. A system as defined in claim 1, further including a piezoelectric translation stage for vertically positioning said object.

9. A system as defined in claim 1, wherein said detector comprises a fluorescent screen, an optical derotation device and a camera.

10. A system as defined in claim 9, wherein aid fluorescent screen comprises Gadolinium Oxysulfide.

11. A method of producing high resolution laminographs, comprising the steps of:

producing a source of X-rays, wherein said step of producing X-rays further comprises the steps of;

generating an electron beam;

steering said electron beam with a deflector;

striking a target with said electron beam, wherein X-rays are emitted from said target when said electron beam impinges upon said target, said target having an imagable feature;

producing an SEM micrograph of said target imagable feature in response to illumination of said feature by said electron beam;

analyzing characteristics of said SEM micrograph image of said feature, and providing an output signal in response to said analysis; and

providing a feedback system which receives said output signal from said image analysis system, processes said output signal and provides a control signal to said electron beam deflector; and

producing a cross sectional image of a cutting plane of an object illuminated by said X-rays using a laminographic detector.

12. A method as defined in claim 11, wherein said analyzing step comprises the steps of:

determining the location of said feature image within said micrograph;

calculating the distance between the determined location of said feature image and the center of said micrograph; and

producing a voltage signal as a function of said calculated distance appropriate to cause said feature image to be centered within said micrograph.

13. A high resolution laminography system comprising:

a source of X-rays wherein said source of X-rays further comprises;

a source of electrons which generates an electron beam;

a deflector for steering said electron beam;

a target wherein X-rays are emitted from said target when said electron beam impinges upon said target, said target further comprising a target imagable feature;

a first detector for producing an image of said target imagable feature;

an image analysis system for analyzing characteristics of said image of said target imagable feature, and providing an output signal in response to said analysis; and

a feedback system which receives said output signal from said image analysis system, processes said output signal and provides a control signal to said electron beam deflector; and

a laminographic detector for producing a cross sectional image of a cutting plane of an object illuminated by said X-rays emitted by said target.

14. A system as defined in claim 13, wherein said first detector further comprises an SEM detector and produces a micrograph of said target imagable feature.