Infrared thermographic method and apparatus for etch process monitoring and control

• US 5,200,023 A
• Filed: 08/30/1991
• Issued: 04/06/1993
• Est. Priority Date: 08/30/1991
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Gifford, George G., O'Neill, James A.
• Primary Examiner(s): Weisstuch, Aaron
• Application Number:
  US07/753,189
• Time in Patent Office: 585 Days
• Field of Search: 204/192.33, 204/298.32, 204/192.13, 204/298.03, 156/626, 156/643
• US Class Current: 216/59
• CPC Class Codes: H01J 37/32871 Means for trapping or directing unwanted particles
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H01J 37/32963 End-point detection
• CPC Class Codes: H01J 37/3299 Feedback systems
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence

Abstract

An infrared television camera (20) monitors the etching of a substrate (26) in-situ in an etch chamber (24). Temporal and spatial resolution of IR emissions is obtained by monitoring the top surface of the substrate (26) in two-dimensions throughout the course of the etching process. Anomalies in temperature detected on the top surface of the substrate (26) can indicate defects in the substrate (26) itself or in the operation of the etching apparatus. Process feedback control is achieved by adjusting various parameters of the etching apparatus (i.e., gas-pressure, flow pattern, magnetic field, coolant flow to electrode, or the like) to compensate for etching anomalies. Etch uniformity and etch endpoint monitoring is achieved by monitoring the IR emissions resulting from exothermic reaction of the film being etched. IR emissions decline at the end of an exothermic etch reaction. Particulate matter which might otherwise harm the substrate (26) can be identified in the gas-phase with a second IR television camera (34) which images the region above the substrate (26). Particulate matter appears as localized "hot spots" within the gas plasma, and the identification of particulate matter allows corrective measures to be taken.

Claims

1. A method for detecting the presence and location of suspended plasma particulates in a plasma etch reactor, comprising the steps of:

positioning a substrate in said plasma etch reactor;

creating a plasma in said plasma etch reactor for etching said substrate;

monitoring infrared emissions emanating from said gaseous plasma during etching of said substrate; and

detecting localized regions within said gaseous plasma which have infrared emission properties which differ from said gaseous plasma.

2. A method as recited in claim 1 further comprising the step of controlling said plasma etch reactor in response to the detection of said localized regions within said gaseous plasma.

3. A method as recited in claim 2 wherein said localized regions within said gaseous plasma have a greater intensity infrared emission than said gaseous plasma.

4. A method as recited in claim 2 wherein said step of controlling said plasma etch reactor includes the step of altering plasma conditions of said plasma in said plasma etch reactor.

5. A method as recited in claim 4 wherein said step of altering plasma conditions includes the step of changing a pressure of process gas inside said plasma etch reactor.

6. A method as recited in claim 4 wherein said step of altering plasma conditions includes the step of changing a flow of process gas inside said plasma etch reactor.

7. An apparatus for detecting the presence and location of suspended plasma particulates in a plasma etch reactor, comprising:

an infrared sensitive device positioned to image an area in said plasma etch reactor where gaseous plasma is generated for etching a substrate;

means for determining an intensity of infrared radiation in said area imaged by said infrared sensitive device;

means for allocating an intensity level for regions within at least two dimensions of said area imaged by said infrared sensitive device based on output from said means for determining;

means for identifying a background level of intensity of said infrared radiation representative of said gaseous plasma in said area imaged by said infrared sensitive device; and

means for identifying localized regions within said area imaged by said infrared sensitive device which have a higher level of intensity than said background level of intensity of said infrared radiation.

8. An apparatus as recited in claim 7 wherein said infrared sensitive device includes a two dimensional array of infrared sensitive elements.

9. An apparatus as recited in claim 7 further comprising a means for cooling said two dimensional array of infrared sensitive elements to reduce background noise.

10. An apparatus as recited in claim 7 wherein said infrared sensitive device is positioned outside said plasma etch reactor behind an infrared radiation transparent window.

11. An apparatus as recited in claim 7 further comprising a means for controlling said plasma etch reactor in response to detecting said localized regions within said area imaged by said infrared sensitive device.

12. An apparatus as recited in claim 11 wherein said means for controlling produces a control signal which regulates a field between electrodes used for creating said gaseous plasma in said plasma etch reactor.

13. An apparatus as recited in claim 12 wherein said means for controlling produces a control signal which regulates a process gas used inside said plasma etch reactor.

14. A method for controlling plasma etching in a plasma etch reactor, comprising the steps of:

providing a substrate in said plasma etch reactor having at least two layers of film where an etch reaction exothermicity of a first layer of film is detectably greater than for a second layer of film on said substrate;

creating a plasma in said plasma etch reactor;

monitoring infrared emissions emanating from said substrate during plasma etching of said substrate;

detecting heating of said substrate caused by said etch reaction exothermicity of said first layer of film from said infrared emissions during plasma etching;

adjusting conditions in said plasma etch reactor in response to detected heating of said substrate caused by said etch reaction exothermicity of said first layer of film.

15. A method as recited in claim 14 wherein said step of adjusting includes the step of terminating plasma etching upon sensing a decline in etch reaction exothermicity.

16. A method as recited in claim 15 wherein said step of adjusting includes the step of controlling a field between electrodes used for creating said plasma in said plasma etch reactor.

17. A method as recited in claim 15 wherein said step of adjusting includes the step of controlling plasma gas parameters within said plasma etch reactor.

18. A method as recited in claim 15 wherein said step of adjusting includes the step of controlling cooling of equipment within said plasma etch reactor.

19. A method as recited in claim 15 wherein said step of monitoring includes the step of producing a spatial image of said infrared radiation emissions with respect to a surface of said substrate.

20. A method as recited in claim 19 further comprising the step of determining when regions of said surface of said substrate have divergent exothermic heating.

21. A method as recited in claim 15 wherein said step of detecting heating caused by etch reaction exothermicity includes the step of determining an initial rate of heating of said substrate.

22. An apparatus for controlling plasma etching of a substrate in a plasma etch reactor wherein said substrate in said plasma etch reactor has at least two layers of film where an etch reaction exothermicity of a first layer of film is detectably greater than for a second layer of film, comprising:

means for creating a plasma in said plasma etch reactor for etching said substrate;

means for monitoring infrared emissions emanating from said substrate during plasma etching;

means for detecting heating of said substrate caused by said etch reaction exothermicity of said first layer of film of said substrate from said infrared emissions occuring during plasma etching; and

means for adjusting conditions in said plasma etch reactor in response to detected heating of said substrate caused by said etch reaction exothermicity of said first layer of film of said substrate.

23. An apparatus as recited in claim 22 wherein said means for monitoring comprises a two dimensional array of infrared sensitive elements.

24. An apparatus as recited in claim 23 further comprising a means for cooling said two dimensional array of infrared sensitive elements to reduce background noise.

25. An apparatus as recited in claim 23 wherein said means for monitoring is positioned outside said plasma etch reactor behind an infrared transparent window.

26. An apparatus as recited in claim 23 wherein said means for adjusting includes a means for terminating plasma etching in said plasma reactor upon sensing a decline in etch reaction exothermicity.

27. An apparatus as recited in claim 23 wherein said means for adjusting includes a means for controlling a field between electrodes used for creating said plasma.

28. An apparatus as recited in claim 23 wherein said means for adjusting includes a means for controlling plasma gas parameters within said plasma etch reactor.

29. An apparatus as recited in claim 23 wherein said means for adjusting includes a means for controlling cooling of equipment within said plasma etch reactor.

30. An apparatus as recited in claim 23 wherein said means for monitoring includes a means for producing a spatial image of said infrared radiation emissions with respect to a surface of said substrate.

32. An apparatus as recited in claim 23 wherein said means for detecting heating caused by etch reaction exothermicity includes a means for determining an initial rate of heating of said substrate.

31. An apparatus as recited in claim 31 further comprising a means for determining when regions of said surface of said substrate have divergent exothermic heating.