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Oil microsensor having interdigitated electrodes with rough surfaces and methods of making and using the same

  • US 5,200,027 A
  • Filed: 11/12/1991
  • Issued: 04/06/1993
  • Est. Priority Date: 11/12/1991
  • Status: Expired due to Term
First Claim
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1. A method of making an oil sensor comprising the steps of:

  • growing silicon dioxide on a silicon wafer;

    depositing silicon nitride on the silicon dioxide;

    depositing polysilicon on the silicon nitride;

    evaporating a material comprising at least one selected from the group consisting of aluminum, copper, silver, nickel and gold, on the polysilicon to form a thin layer;

    forming an interdigitated pattern in said layer by photolithography to form electrodes;

    exposing the electrodes to a zincate solution comprising ZnO and NaOH; and

    thereafter exposing the electrode to an a HNO3 solution.

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