Oil microsensor having interdigitated electrodes with rough surfaces and methods of making and using the same
First Claim
Patent Images
1. A method of making an oil sensor comprising the steps of:
- growing silicon dioxide on a silicon wafer;
depositing silicon nitride on the silicon dioxide;
depositing polysilicon on the silicon nitride;
evaporating a material comprising at least one selected from the group consisting of aluminum, copper, silver, nickel and gold, on the polysilicon to form a thin layer;
forming an interdigitated pattern in said layer by photolithography to form electrodes;
exposing the electrodes to a zincate solution comprising ZnO and NaOH; and
thereafter exposing the electrode to an a HNO3 solution.
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Abstract
Disclosed is an oil sensor having roughened electrode surfaces to produce oil condition related output current or voltage from the automotive engine oil as it is used.
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Citations
16 Claims
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1. A method of making an oil sensor comprising the steps of:
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growing silicon dioxide on a silicon wafer; depositing silicon nitride on the silicon dioxide; depositing polysilicon on the silicon nitride; evaporating a material comprising at least one selected from the group consisting of aluminum, copper, silver, nickel and gold, on the polysilicon to form a thin layer; forming an interdigitated pattern in said layer by photolithography to form electrodes; exposing the electrodes to a zincate solution comprising ZnO and NaOH; and thereafter exposing the electrode to an a HNO3 solution. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of making an oil sensor comprising the steps of:
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growing silicon dioxide on a silicon wafer; depositing silicon nitride on the silicon dioxide; depositing polysilicon on the silicon dioxide; evaporating a material comprising at least one selected from the group consisting of aluminum, copper, silver, nickel and gold on the polysilicon to form a thin layer; forming an interdigitated pattern in said layer by photolithography to form electrodes; roughing the surfaces of the electrodes so that upon deploying said oil sensor in an oil comprising electrochemically active species, being used in an automotive engine, the end of the useful life of the oil is quantitatively determinable from the output voltage of said sensor. - View Dependent Claims (12, 13)
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14. A method of making an oil sensor comprising the steps of:
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growing silicon dioxide on a silicon wafer; depositing silicon nitride on the silicon dioxide; depositing polysilicon on the silicon nitride; evaporating a material comprising at least one selected from the group consisting of aluminum, copper, silver, nickel and gold on the polysilicon to form a thin layer; forming an interdigitated pattern in said layer by photolithography to form electrodes; roughing the electrodes an amount sufficient so that said sensor produces a monotonic output voltage or a check mark curve upon deployment in an oil comprising antioxidants and detergents as the oil is being used to lubricate an engine. - View Dependent Claims (15, 16)
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Specification