High performance induction plasma torch with a water-cooled ceramic confinement tube

• US 5,200,595 A
• Filed: 04/12/1991
• Issued: 04/06/1993
• Est. Priority Date: 04/12/1991
• Status: Expired due to Term

• Current Assignee: Tekna Plasma Systems Inc.
• Original Assignee: Universite De Strasbourg (Financière Meeschaert SA)
• Inventors: Jurewicz, Jerzy, Boulos, Maher I.
• Primary Examiner(s): Paschall, Mark H.
• Application Number:
  US07/684,179
• Time in Patent Office: 725 Days
• Field of Search: 219/121.48, 219/121.52, 219/121.49, 219/75, 315/111.21, 315/111.51
• US Class Current: 219/121.52
• CPC Class Codes: H05H 1/28 Cooling arrangements
• CPC Class Codes: H05H 1/30 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/28 takes precedence

Abstract

A high performance induction plasma torch comprises a cylindrical torch body made of cast ceramic or composite polymer, a coaxial cylindrical plasma confinement tube located inside the torch body, a gas distributor head secured to one end of the torch body to supply the confinement tube with gaseous substances, a cylindrical and coaxial induction coil completely embedded in the ceramic or polymer material of the torch body, and a thin annular chamber separating the coaxial torch body and confinement tube. This confinement tube can be made of pure or composite ceramic materials based on sintered or reaction bonded silicon nitride, boron nitride, aluminum nitride or alumina, or any combinations of them with varying additives and fillers. The annular chamber is about 1 mm thick and high velocity cooling water flows therein to efficiently cool the plasma confinement tube.

Claims

1. An induction plasma torch comprising:

a tubular torch body including a machined cylindrical inner surface having a first diameter;

a plasma confinement tube (a) made of ceramic material having a high thermal conductivity, and (b) including a first end, a second end, and a machined cylindrical outer surface having a second diameter slightly smaller than said first diameter;

the plasma confinement tube being mounted within said tubular torch body, and the cylindrical inner and outer surfaces being coaxial to define between said inner and outer surfaces a thin annular chamber of uniform thickness;

a gas distributor head mounted on the torch body at the first end of the plasma confinement tube for supplying at least one gaseous substance into said confinement tube, said at least one gaseous substance flowing through the plasma confinement tube from its first end toward its second end;

an induction coil coaxial with said cylindrical inner and outer surfaces, embedded in the torch body, and supplied with an electric current for inductively applying energy to said at least one gaseous substance flowing through the plasma confinement tube in order to produce and sustain a high temperature plasma in said confinement tube; and

means for establishing a high velocity flow of cooling fluid in the thin annular chamber, the high thermal conductivity of the ceramic material forming the confinement tube and the high velocity flow of cooling fluid both contributing in efficiently transferring heat from the plasma confinement tube, heated by said high temperature plasma, into the cooling fluid to thereby efficiently cool said confinement tube.

2. The plasma torch of claim 1, in which the said ceramic material comprises silicon nitride.

3. The plasma torch of claim 1, in which the said ceramic material comprises sintered or reaction bonded silicon nitride including at least one additive and/or filler.

4. The plasma torch of claim 1, wherein the said ceramic material is selected from the group consisting of boron nitride, aluminum nitride, and alumina.

5. The plasma torch of claim 1, in which the said ceramic material is a dense ceramic material having a high thermal conductivity, a high electrical resistivity and a high thermal shock resistance.

6. The plasma torch of claim 1, in which the said annular chamber has a thickness of about 1 mm.

7. The plasma torch of claim 1, wherein the said cooling fluid comprises water.

8. The plasma torch of claim 1, wherein the high velocity flow of cooling fluid is parallel to the common axis of said cylindrical inner and outer surfaces.

9. The plasma torch of claim 1, in which the said torch body is made of a cast composite polymer in which the induction coil is completely embedded.

10. The plasma torch of claim 1, in which the said torch body is made of a cast ceramic in which the induction coil is completely embedded.

11. The plasma torch of claim 1, wherein the said induction coil is made of an electrically conductive tube supplied with a cooling fluid to cool the said induction coil.

12. The plasma torch of claim 1, wherein the said plasma torch further comprises a plasma exit nozzle mounted on the torch body at the second end of the plasma confinement tube, wherein the said head and nozzle each comprise an inner surface, and wherein the high velocity flow establishing means comprise conduit means in the gas distributor head and the plasma exit nozzle, said cooling fluid flowing at high velocity through the said conduit means which are so positioned as to allow the cooling fluid to cool the inner surfaces of said head and nozzle.