Polarization independent optical coherence-domain reflectometry

• US 5,202,745 A
• Filed: 03/02/1992
• Issued: 04/13/1993
• Est. Priority Date: 11/07/1990
• Status: Expired due to Term

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Hewlett-Packard Company (HP Inc.)
• Inventors: Sorin, Wayne V., Heffner, Brian L.
• Primary Examiner(s): McGraw, Vincent P.
• Application Number:
  US07/844,905
• Time in Patent Office: 407 Days
• Field of Search: 356/73.1, 356/351
• US Class Current: 356/73.1
• CPC Class Codes: G01B 2290/45 Multiple detectors for detecting interferometer signals
• CPC Class Codes: G01B 2290/70 Using polarization in the interferometer
• CPC Class Codes: G01B 9/02002 using two or more frequencies
• CPC Class Codes: G01B 9/02072 by calibration or testing of interferometer
• CPC Class Codes: G01B 9/0209 Low-coherence interferometers
• CPC Class Codes: G01M 11/3172 Reflectometers detecting the back-scattered light in the frequency-domain, e.g. OFDR, FMCW, heterodyne detection
• CPC Class Codes: G01M 11/3181 Reflectometers dealing with polarisation

Abstract

An optical coherence-domain reflectometry system provides an interferometer driven by a broadband incoherent light source with the device under test connected to one arm of the interferometer and a movable scanning mirror in the other arm providing a reference signal. The mirror moves at a controlled velocity to produce a Doppler shift in the reference signal frequency. The reference signal arm also includes a piezoelectric transducer which modulates the phase of the reference signal at a given frequency, causing a further shift in the reference signal frequency. The interference signal is detected and measured by a polarization diversity receiver. A linear polarizer in the reference signal arm is adjusted to produce equal reference signal powers in each arm of the polarization diversity receiver in the absence of a reflection signal from the test arm. The measured reflectometry signal is substantially independent of the state of polarization of the reflected signal from the device under test.

Claims

1. An optical reflectometer for measuring an optical parameter of a device under test, the reflectometer comprising:

means for providing a broadband reference signal;

means for applying a broadband test signal to a device under test and receiving a response signal from said device;

a plurality of optical sensors responsive to optical signals of differing polarities for receiving the reference and response signals;

polarization control means for controlling the polarization of the reference signal to balance the sensor responses; and

output means responsive to the sensors for providing an output signal indicative of an optical parameter of the device under test, the output signal being substantially independent of polarization in the response signal when the sensor responses have been balanced by the polarization control means.

2. A reflectometer as in claim 1 wherein;

the polarization control means comprises a linear polarizer;

the reference signal is substantially unpolarized; and

the test signal is substantially unpolarized.

3. A reflectometer as in claim 1 wherein the polarization control means comprises a birefringent waveplate.

4. An optical reflectometer as in claim 1 further comprising phase-controlling means to change the phase of the reference signal.

5. An optical reflectometer for measuring an optical parameter of a device under test, the reflectometer comprising:

an interferometer having a light source for providing a beam of broadband light, means for dividing the beam of light into a reference signal and a test signal, means for applying the test signal to a device under test and receiving a response signal from said device, and means for combining the reference and response signals;

a polarization diversity receiver having a plurality of optical sensors responsive to optical signals of differing polarities for receiving the combined reference and response signals;

polarization control means for controlling the polarization of the reference signal to balance the sensor responses; and

means in the receiver responsive to the sensors for providing an output signal indicative of an optical parameter of the device under test, the output signal being substantially independent of polarization in the response signal when the sensor responses have ben balanced by the polarization control means.

6. A reflectometer as in claim 5 wherein;

the polarization control means comprises a linear polarizer; and

the beam provided by the light source is substantially unpolarized.

7. A reflectometer as in claim 5 wherein the light source comprises a polarized light source and the polarization control means comprises a birefringent waveplate.

8. An optical reflectometer as in claim 5 further comprising phase-controlling means to change the phase of the reference signal.