×

Symmetrical micromechanical gyroscope

  • US 5,203,208 A
  • Filed: 04/29/1991
  • Issued: 04/20/1993
  • Est. Priority Date: 04/29/1991
  • Status: Expired due to Term
First Claim
Patent Images

1. A symmetrical, micromechanical gyroscope, for detecting rotational movement about an input axis, comprising:

  • a gyroscope support frame including a cavity above which is suspended an inertial mass;

    first and second pairs of flexures suspending said mass above said cavity;

    said first pair of flexures including first and second flexible elements, each of said flexible elements including a first end coupled to a first side of said mass, and a second end coupled to a first portion of said support frame, each of said first and second flexible elements oriented generally at a 45°

    angle from a sense axis;

    said second pair of flexures including third and forth flexible elements, each of said flexible elements including a first end coupled to a second side of said mass diametrically opposed from said first side of the mass, and a second end coupled to a second portion of said support frame, diametrically opposed from the first portion of said support frame, said third and forth flexible elements oriented generally at a 45°

    angle from said sense axis;

    a drive axis, about which said inertial mass is induced to vibrate in response to an applied drive signal, said drive axis coplanar with and orthogonal to said sense axis;

    means for driving said hydroscope about said drive axis;

    means for sensing rotation of said inertial mass about said sense axis; and

    wherein each flexible element of said first and second pair of flexures is oriented generally at a 45°

    angle from said drive axis, for providing a micromechanical gyroscope with flexures coupling said inertial mass which are symmetrically oriented about both said drive and sense axes.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×