Wafer alignment fixture for wafers having notches and/or flats

• US 5,205,028 A
• Filed: 04/01/1991
• Issued: 04/27/1993
• Est. Priority Date: 04/01/1991
• Status: Expired due to Fees

• Current Assignee: Silicon Technology Corporation Oakland NJ
• Original Assignee: Silicon Technology Corp. (Carlit Holdings Co., Ltd.)
• Inventors: Leonard, Thomas E.
• Primary Examiner(s): Watson, Robert C.
• Application Number:
  US07/678,604
• Time in Patent Office: 757 Days
• Field of Search: 269/287, 269/254 R, 269/903, 269/20, 269/289 MR, 269/289 R, 269/295, 269/156, 269/13, 269/14, 279/46 R, 279/4, 279/50, 279/23 R, 279/35-37, 279/79, 279/106-107, 29/271
• US Class Current: 29/271
• CPC Class Codes: H01L 21/67793 with orientating and positioning by means of a vibratory bowl or track
• CPC Class Codes: Y10S 269/903 Work holder for electrical circuit assemblages or wiring systems
• CPC Class Codes: Y10T 29/53913 Aligner or center

Abstract

The wafer alignment fixture is provided with a cassette support which can be slid between two positions on a base plate. In one position, the cassette support is aligned with a roller in order to align notched wafers with each other. In the second position, the cassette support is aligned with a second roller so as to effect alignment of wafers having flats.

Claims

1. A wafer support assembly for a wafer alignment fixture, said assembly comprising

a support having a pair of spaced parallel upstanding walls defining wafer support surfaces at the upper ends;

a dowel pin disposed in parallel between said walls on an axis disposed longitudinally of said walls to support a roller thereon while contacting an outer surface of the roller;

means for adjustably supporting said dowel pin in said support for raising and lowering said pin relative to said walls, said means including a flat bar supporting said dowel pin horizontally thereon and a vertically disposed dowel pin supporting said bar support thereon; and

a screw rotatably mounted in said support for actuating said means in response to rotation of said screw to move said dowel pin relative to said walls.

2. A wafer support assembly as set forth in claim 1 wherein said screw includes a recessed intermediate portion having at least one conical cam surface abutting a lower end of said vertically disposed dowel pin.

3. A wafer alignment fixture for wafers comprising

cassette support means for supporting a cassette containing a row of wafers, at least some of said wafers having one of a peripheral notch and a flat therein;

means for moving said support means between a first position and a second position;

a first roller extending within said support means and below a supported cassette to frictionally contact a row of wafers therein with said support means in said first position and to lift the wafers within the cassette;

first means for rotating said first roller to cause the wafers in frictional contact with said first roller to rotate within the cassette to bring a notch of a respective wafer into alignment with said roller;

a wafer support assembly for supporting each respective wafer having a notch aligned with and receiving said first roller therein;

a second roller extending in spaced parallel relation to said first roller below the cassette to frictionally contact the row of wafers with said support means in said second position and to lift the wafers within the cassette; and

second means for rotating said second roller to cause the wafers in frictional contact therewith to rotate within the cassette to bring a flat of a respective wafer into alignment with said second roller while lowering the respective wafer within the cassette.

4. A wafer alignment fixture as set forth in claim 3 wherein said cassette support means includes a pair of parallel walls for supporting a wafer cassette thereon with said rollers extending in parallel between said walls.

5. A wafer alignment fixture as set forth in claim 3 wherein said means includes a shaft secured to one end of said roller and a motor for driving said shaft.

6. A wafer alignment fixture as set forth in claim 3 wherein said wafer support assembly includes a pair of upstanding support surfaces for receiving wafers thereon.

7. A wafer alignment fixture as set forth in claim 3 which further comprises a handle rotatably mounting said second roller therein and being pivotally mounted on said first roller and said second means includes gear means interconnecting said rollers to each other.

8. A wafer alignment fixture as set forth in claim 3 wherein said each roller has an elastomeric peripheral surface.

9. A wafer alignment fixture as set forth in claim 8 wherein said first roller includes a longitudinally extending wire and means for tensioning said wire to eliminate sag due to the weight of the wafers.

10. A wafer alignment fixture as set forth in claim 3 wherein said wafer support assembly comprises a support having a pair of spaced parallel upstanding walls defining wafer support surfaces;

a dowel pin disposed between said walls on an axis parallel to said first roller to support said first roller thereon;

means for adjustably supporting said dowel pin in said support for raising and lowering said pin relative to said walls; and

a screw rotatably mounted in said support for actuating said means in response to rotation of said screw to move said dowel pin relative to said walls.

11. A wafer alignment fixture as set forth in claim 10 wherein said means for supporting said dowel pin includes a flat bar supporting said dowel pin horizontally thereon and a vertically disposed dowel pin supporting said bar support thereon.

12. A wafer alignment fixture as set forth in claim 11 wherein said screw includes a recessed intermediate portion having at least one conical cam surface abutting a lower end of said vertically disposed dowel pin.

13. A wafer alignment fixture as set forth in claim 3 which further comprises a plate slidably mounting said cassette support means thereon and said means for moving said support means includes a lever pivotally mounted on said plate and secured at one end to said support means.

14. A wafer alignment fixture as set forth in claim 13 wherein said means for moving said cassette support means includes a guide secured to said plate and a slider secured to and between said lever and said cassette support means, said slider being slidably mounted in said guide for moving said support means transversely of said rollers.

15. A wafer alignment fixture as set forth in claim 3 which further comprises a handle rotatably mounting said second roller therein and being pivotally mounted about an axis of said first roller.

16. A wafer alignment fixture as set forth in claim 15 which further comprises a plate slidably supporting said cassette support means thereon and a bracket mounted on said plate, said bracket having a first surface for supporting said handle thereon with said support means in said first position and a recessed surface for supporting said handle thereon with said support means in said second position.

17. A wafer alignment fixture as set forth in claim 16 wherein said second roller is disposed in a horizontal plane below said first roller with said handle on said recessed surface of said bracket.

18. A wafer alignment fixture for wafers comprising

cassette support means for supporting a cassette containing a row of wafers, at least some of said wafers having one of a peripheral notch and a flat therein;

means for moving said support means between a first position and a second position;

a first roller extending within said support means and below a supported cassette to frictionally contact a row of wafers therein with said support means in said first position and to lift the wafers within the cassette;

first means for rotating said first roller to cause the wafers in frictional contact with said first roller to rotate within the cassette to bring a notch of a respective wafer into alignment with said roller;

a wafer support assembly for supporting each respective wafer having a notch aligned with and receiving said first roller therein;

a second roller extending in spaced parallel relation to said first roller below the cassette to frictionally contact the row of wafers with said support means in said second position and to lift the wafers within the cassette; and

second means for rotating said second roller to cause the wafers in frictional contact therewith to rotate within the cassette.

19. A wafer alignment fixture as set forth in claim 18 which further comprises a handle rotatably mounting said second roller therein and being pivotally mounted on said first roller and said second means includes gear means interconnecting said rollers to each other.

20. A wafer alignment fixture as set forth in claim 18 which further comprises a handle rotatably mounting said second roller therein and being pivotally mounted about an axis of said first roller.

21. A wafer alignment fixture as set forth in claim 20 which further comprises a plate slidably supporting said cassette support means thereon and a bracket mounted on said plate, said bracket having a first surface for supporting said handle thereon with said support means in said first position.