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Ultraminiature single-crystal sensor with movable member

  • US 5,207,103 A
  • Filed: 05/18/1992
  • Issued: 05/04/1993
  • Est. Priority Date: 06/01/1987
  • Status: Expired due to Term
First Claim
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1. A solid-state, capacitive transducer having at least one movable member responsive to a physical force applied thereto, the transducer comprising:

  • an integrally formed structure made from single-crystal silicon semiconductor material and having a movable member which is movable in response to a physical force applied thereto, and a rim portion that extends at least around a part of the periphery of and mechanically supports the movable member, the movable member and the rim portion each being heavily impregnated with at least a first material which alters an etching characteristic thereof in comparison to single-crystal material which is identical to the heavily impregnated material of the movable member and rim portion except for containing substantially less of such first material; and

    a capacitor having first and second electrically conductive plates, the first plate being arranged to move with the movable member, thereby allowing the capacitance of the capacitor to be adjusted in response to the physical force applied to the movable member.

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