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Condenser microphones based on silicon with humidity resistant surface treatment

  • US 5,208,789 A
  • Filed: 04/13/1992
  • Issued: 05/04/1993
  • Est. Priority Date: 04/13/1992
  • Status: Expired due to Fees
First Claim
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1. A condenser microphone element comprisinga backplate including a silicon core and a dielectric layer thereon, said dielectric layer including a layer of silicon dioxide on said silicon core and a layer of tantalum pentoxide on said silicon dioxide layer to protect said silicon dioxide layer from humidity, said dielectric layer having a surface exposed to an air cavity, with said surface spaced from a movable electrode, wherein said movable electrode is a diaphragm of a microphone.

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