×

Metrology

  • US 5,209,131 A
  • Filed: 10/12/1990
  • Issued: 05/11/1993
  • Est. Priority Date: 11/03/1989
  • Status: Expired due to Fees
First Claim
Patent Images

1. A probe for measuring workpieces, the probe having a longitudinal Z axis and comprising a body and a stylus or stylus mount having a rest position relative to the body defined by the equilibrium between a plurality of restoring forces the magnitude of at least one of which:

  • (a) varies with the displacement of the stylus or stylus mount; and

    (b) is provided by a diaphragm spring, such that movement of the stylus or stylus mount in the Z axis direction changes the degree to which the diaphragm spring has a conical shape.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×