Metrology
First Claim
1. A probe for measuring workpieces, the probe having a longitudinal Z axis and comprising a body and a stylus or stylus mount having a rest position relative to the body defined by the equilibrium between a plurality of restoring forces the magnitude of at least one of which:
- (a) varies with the displacement of the stylus or stylus mount; and
(b) is provided by a diaphragm spring, such that movement of the stylus or stylus mount in the Z axis direction changes the degree to which the diaphragm spring has a conical shape.
2 Assignments
0 Petitions
Accused Products
Abstract
A multiaxis measuring probe 10 for continuous measurement of workpieces (e.g. roundness, other form, or size measurment) has in one embodiment a stylus 50 suspended by resilient forces acting in opposition so as to determine an equilibrium rest position. This appears to improve the dynamic response/accuracy trade-off of the probe. The resilient forces are preferably provided by a diaphragm spring 40,140,210 and one or more opposing springs 80A,80B,180,214. The stylus 50 is preferably held magnetically to a stylus mount 34,134,206,208 via precision bearings, and the resilient forces act on the stylus mount. During calibration, a series of probe data is gathered from probe/sensor output signals at given positions of the probe along curved paths. A corresponding series of positional data for the given positions is gathered independently of the probe. A correlation is made between the probe data and the positional data so as to obtain calibration parameters for correction of measurement signals. These calibration parameters are stored with a measurement expression for later use with probe output signals to obtain corrected measurement signals.
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Citations
17 Claims
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1. A probe for measuring workpieces, the probe having a longitudinal Z axis and comprising a body and a stylus or stylus mount having a rest position relative to the body defined by the equilibrium between a plurality of restoring forces the magnitude of at least one of which:
- (a) varies with the displacement of the stylus or stylus mount; and
(b) is provided by a diaphragm spring, such that movement of the stylus or stylus mount in the Z axis direction changes the degree to which the diaphragm spring has a conical shape. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
- (a) varies with the displacement of the stylus or stylus mount; and
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15. A measuring probe having a longitudinal Z axis and comprising:
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a body; a stylus or stylus mount; a first restoring means supporting the stylus or stylus mount relative to the body for movement through a measuring range and applying a first restoring force between the body and the stylus or stylus mount; second restoring means acting on the body and the stylus or stylus mount and applying a second restoring force therebetween opposing the first restoring force; at least one transducer providing an output in accordance with the position or movement of the stylus or stylus mount; the first and second restoring means providing the first and second restoring forces in opposition to each other throughout the said measuring range; and the first restoring means comprising a diaphragm spring, such that movement of the stylus or stylus mount in the Z axis direction changes the degree to which the diaphragm spring has a conical shape. - View Dependent Claims (16, 17)
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Specification