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Membrane consisting of silicon carbide and silicon nitride, method for the preparation thereof and mask for X-ray lithography utilizing the same

  • US 5,209,996 A
  • Filed: 03/11/1992
  • Issued: 05/11/1993
  • Est. Priority Date: 07/26/1989
  • Status: Expired due to Term
First Claim
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1. A membrane composite consisting of a homogenous single phase of silicon carbide and silicon nitride in a molar ratio in the range from 95:

  • 5 to 30;

    70.

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